公开(公告)号：US20170309445A1

公开(公告)日：2017-10-26

申请号：US15521278

申请日：2015-10-21

Applicant: ScienceTomorrow

Inventor： Jyoti Agrawal ,  David C. Joy ,  Subuhadarshi Nayak

IPC: H01J37/244 ,  H01J37/28 ,  H01J37/285

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/2441 ,  H01J2237/2446 ,  H01J2237/2448 ,  H01J2237/24495

Abstract: Quantitative Secondary Electron Detection (QSED) using the array of solid state devices (SSD) based electron-counters enable critical dimension metrology measurements in materials such as semiconductors, nanomaterials, and biological samples (FIG. 3). Methods and devices effect a quantitative detection of secondary electrons with the array of solid state detectors comprising a number of solid state detectors. An array senses the number of secondary electrons with a plurality of solid state detectors, counting the number of secondary electrons with a time to digital converter circuit in counter mode.

公开(公告)号：US10256071B2

公开(公告)日：2019-04-09

申请号：US15521278

申请日：2015-10-21

Applicant: ScienceTomorrow

Inventor： Jyoti Agrawal ,  David C. Joy ,  Subuhadarshi Nayak

IPC: H01J37/244 ,  H01J37/285 ,  H01J37/28

Abstract: Quantitative Secondary Electron Detection (QSED) using the array of solid state devices (SSD) based electron-counters enable critical dimension metrology measurements in materials such as semiconductors, nanomaterials, and biological samples (FIG. 3). Methods and devices effect a quantitative detection of secondary electrons with the array of solid state detectors comprising a number of solid state detectors. An array senses the number of secondary electrons with a plurality of solid state detectors, counting the number of secondary electrons with a time to digital converter circuit in counter mode.

公开(公告)号：US09966224B2

公开(公告)日：2018-05-08

申请号：US14918560

申请日：2015-10-20

Applicant: ScienceTomorrow LLC

Inventor： Jyoti Agrawal ,  David C. Joy ,  Subuhadarshi Nayak

IPC: H01J37/244 ,  H01J37/285 ,  H01J37/28

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/2441 ,  H01J2237/2446 ,  H01J2237/2448 ,  H01J2237/24495

Abstract: Quantitative Secondary Electron Detection (QSED) using the array of solid state devices (SSD) based electron-counters enable critical dimension metrology measurements in materials such as semiconductors, nanomaterials, and biological samples (FIG. 3). Methods and devices effect a quantitative detection of secondary electrons with the array of solid state detectors comprising a number of solid state detectors. An array senses the number of secondary electrons with a plurality of solid state detectors, counting the number of secondary electrons with a time to digital converter circuit in counter mode.