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公开(公告)号：US11454562B2
公开(公告)日：2022-09-27
申请号：US17053135
申请日：2019-04-10
Applicant: Sciosense B.V.
Inventor： Alberto Maccioni , Willem Frederik Adrianus Besling , Olaf Wunnicke , Casper Van Der Avoort , Remco Henricus Wilhelmus Pijnenburg , Anderson Pires Singulani
Abstract: A sensor arrangement and a method of operating a sensor arrangement are disclosed. In an embodiment, a sensor arrangement includes a pressure sensor realized as a capacitive pressure sensor, a capacitance-to-digital converter, a test circuit and a switching circuit coupling the capacitance-to-digital converter and the test circuit to the pressure sensor.
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公开(公告)号：US11427465B2
公开(公告)日：2022-08-30
申请号：US17043397
申请日：2019-04-25
Applicant: Sciosense B.V.
Inventor： Olaf Wunnicke , Frederik Willem Maurits Vanhelmont , Willem Frederik Adrianus Besling , Remco Henricus Wilhelmus Pijnenburg , Casper Van Der Avoort , Anderson Pires Singulani , Martijn Goossens
Abstract: In an embodiment a system includes a sensor including a base having a base electrode and a first membrane suspended above the base, wherein the first membrane has a first membrane electrode, wherein the first membrane is configured to deflect with respect to the base electrode in response to an environmental condition, and wherein the sensor is configured to measure a capacitance between the base electrode and the first membrane electrode. The system further includes a first device of the system configured to generate electrical interference signals, a first electrically conductive shield layer positioned between the sensor and the first device of the system, wherein the first electrically conductive shield layer defines a plurality of first apertures extending through the first electrically conductive shield layer and a dielectric material disposed in the plurality of first apertures.
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公开(公告)号：US20220260446A1
公开(公告)日：2022-08-18
申请号：US17597672
申请日：2020-07-22
Applicant: Sciosense B.V.
Inventor： Willem Frederik Adrianus Besling , Anderson Pires Singulani , Coenraad Cornelis Tak , Casper Van Der Avoort
Abstract: In an embodiment a sensor arrangement includes a sensor die having a contact area, a suspended area and a sensitive element located in the suspended area, an interposer including at least two vias connecting a first side of the interposer to a second side of the interposer and a support mechanically and electrically connecting the contact area of the sensor die to the first side of the interposer, the support including at least two contact joints.
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公开(公告)号：US20210163282A1
公开(公告)日：2021-06-03
申请号：US17043397
申请日：2019-04-25
Applicant: Sciosense B.V.
Inventor： Olaf Wunnicke , Frederik Willem Maurits Vanhelmont , Willem Frederik Adrianus Besling , Remco Henricus Wilhelmus Pijnenburg , Casper Van Der Avoort , Anderson Pires Singulani , Martijn Goossens
Abstract: In an embodiment a system includes a sensor including a base having a base electrode and a first membrane suspended above the base, wherein the first membrane has a first membrane electrode, wherein the first membrane is configured to deflect with respect to the base electrode in response to an environmental condition, and wherein the sensor is configured to measure a capacitance between the base electrode and the first membrane electrode. The system further includes a first device of the system configured to generate electrical interference signals, a first electrically conductive shield layer positioned between the sensor and the first device of the system, wherein the first electrically conductive shield layer defines a plurality of first apertures extending through the first electrically conductive shield layer and a dielectric material disposed in the plurality of first apertures.
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