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公开(公告)号：US11366031B2
公开(公告)日：2022-06-21
申请号：US16337554
申请日：2017-10-02
Applicant: Sciosense B.V.
Inventor： Willem Frederik Adrianus Besling , Casper Van Der Avoort , Coenraad Cornelis Tak , Remco Henricus Wilhelmus Pijnenburg , Olaf Wunnicke , Martijn Goossens
Abstract: In an embodiment, a semiconductor device includes a substrate body, an environmental sensor, a cap body and a volume of gas, wherein the environmental sensor and the volume of gas are arranged between the substrate body and the cap body in a vertical direction which is perpendicular to a main plane of extension of the substrate body, wherein at least one channel between the substrate body and the cap body connects the volume of gas with an environment of the semiconductor device such that the channel is permeable for gases, and wherein a thickness of the substrate body amounts to at least 80% of a thickness of the cap body and at most 120% of the thickness of the cap body.
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公开(公告)号：US11427465B2
公开(公告)日：2022-08-30
申请号：US17043397
申请日：2019-04-25
Applicant: Sciosense B.V.
Inventor： Olaf Wunnicke , Frederik Willem Maurits Vanhelmont , Willem Frederik Adrianus Besling , Remco Henricus Wilhelmus Pijnenburg , Casper Van Der Avoort , Anderson Pires Singulani , Martijn Goossens
Abstract: In an embodiment a system includes a sensor including a base having a base electrode and a first membrane suspended above the base, wherein the first membrane has a first membrane electrode, wherein the first membrane is configured to deflect with respect to the base electrode in response to an environmental condition, and wherein the sensor is configured to measure a capacitance between the base electrode and the first membrane electrode. The system further includes a first device of the system configured to generate electrical interference signals, a first electrically conductive shield layer positioned between the sensor and the first device of the system, wherein the first electrically conductive shield layer defines a plurality of first apertures extending through the first electrically conductive shield layer and a dielectric material disposed in the plurality of first apertures.
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公开(公告)号：US20210163282A1
公开(公告)日：2021-06-03
申请号：US17043397
申请日：2019-04-25
Applicant: Sciosense B.V.
Inventor： Olaf Wunnicke , Frederik Willem Maurits Vanhelmont , Willem Frederik Adrianus Besling , Remco Henricus Wilhelmus Pijnenburg , Casper Van Der Avoort , Anderson Pires Singulani , Martijn Goossens
Abstract: In an embodiment a system includes a sensor including a base having a base electrode and a first membrane suspended above the base, wherein the first membrane has a first membrane electrode, wherein the first membrane is configured to deflect with respect to the base electrode in response to an environmental condition, and wherein the sensor is configured to measure a capacitance between the base electrode and the first membrane electrode. The system further includes a first device of the system configured to generate electrical interference signals, a first electrically conductive shield layer positioned between the sensor and the first device of the system, wherein the first electrically conductive shield layer defines a plurality of first apertures extending through the first electrically conductive shield layer and a dielectric material disposed in the plurality of first apertures.
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