Method for fabricating multiple FETs of different types
    1.
    发明申请
    Method for fabricating multiple FETs of different types 有权
    制造不同类型多个FET的方法

    公开(公告)号:US20070298599A1

    公开(公告)日:2007-12-27

    申请号:US11804875

    申请日:2007-05-21

    IPC分类号: H01L21/8232

    CPC分类号: H01L21/823412

    摘要: For fabricating multiple field effect transistors (FETs), a first conductive layer is deposited over first and second active regions of a semiconductor substrate. The first conductive layer is patterned over the second active region to form mold structures. Mask structures are formed between the mold structures. The second active region is patterned using the mask structures or using spacers formed at sidewalls of the mold structures to form multiple fins of a field effect transistor of a fin type. The first conductive layer is patterned over the first active region to form a gate of another field effect transistor of a different type.

    摘要翻译: 为了制造多个场效应晶体管(FET),第一导电层沉积在半导体衬底的第一和第二有源区上。 在第二有源区上形成第一导电层以形成模具结构。 在模具结构之间形成掩模结构。 使用掩模结构或使用形成在模具结构的侧壁处的间隔来形成第二有源区,以形成翅片型场效应晶体管的多个鳍。 在第一有源区上图案化第一导电层以形成不同类型的另一场效应晶体管的栅极。

    Method for fabricating multiple FETs of different types
    2.
    发明授权
    Method for fabricating multiple FETs of different types 有权
    制造不同类型多个FET的方法

    公开(公告)号:US07700445B2

    公开(公告)日:2010-04-20

    申请号:US11804875

    申请日:2007-05-21

    IPC分类号: H01L21/336

    CPC分类号: H01L21/823412

    摘要: For fabricating multiple field effect transistors (FETs), a first conductive layer is deposited over first and second active regions of a semiconductor substrate. The first conductive layer is patterned over the second active region to form mold structures. Mask structures are formed between the mold structures. The second active region is patterned using the mask structures or using spacers formed at sidewalls of the mold structures to form multiple fins of a field effect transistor of a fin type. The first conductive layer is patterned over the first active region to form a gate of another field effect transistor of a different type.

    摘要翻译: 为了制造多个场效应晶体管(FET),第一导电层沉积在半导体衬底的第一和第二有源区上。 在第二有源区上形成第一导电层以形成模具结构。 在模具结构之间形成掩模结构。 使用掩模结构或使用形成在模具结构的侧壁处的间隔来形成第二有源区,以形成翅片型场效应晶体管的多个鳍。 在第一有源区上图案化第一导电层以形成不同类型的另一场效应晶体管的栅极。