公开(公告)号：US06978041B2

公开(公告)日：2005-12-20

申请号：US10096917

申请日：2002-03-14

申请人： Seiji Isogai ,  Hitoshi Komuro ,  Hideo Wada ,  Katsuharu Shoda

发明人： Seiji Isogai ,  Hitoshi Komuro ,  Hideo Wada ,  Katsuharu Shoda

IPC分类号： G01N21/956 ,  G01N23/225 ,  G03F1/00 ,  G03F7/20 ,  G06T1/00 ,  G06T7/00 ,  H01L21/66 ,  G06K9/00

CPC分类号： G03F7/7065 ,  G03F1/84 ,  G06T7/0002 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49131

摘要： An object of the present invention is to increase efficiency in review work by appropriately narrowing down review work that verifies shapes of visual defects relating to an enormous amount of defects detected by a visual inspecting apparatus with high sensitivity. In order to appropriately extract defect information from an inspecting apparatus, a filter function and a sampling function are prepared by unitizing the functions. As a result, defects as review targets are narrowed down and extracted automatically using the filter function and the sampling function in combination. In addition, sequencing the filter conditions and the sampling conditions and registering the sequence enables automatic filtering and sampling on the basis of information on a wafer as a review target, and thereby only defect information on the review target is extracted.

摘要翻译： 本发明的目的是通过适当地缩小检查工作，从而通过适当地缩小与视觉检查装置检测到的大量缺陷相关的视觉缺陷的形状的高灵敏度来提高审查工作的效率。 为了从检查装置适当地提取缺陷信息，通过功能的组合来准备滤波器功能和采样功能。 结果，使用过滤功能和采样功能组合，将检查对象的缺陷缩小并自动提取。 此外，对过滤条件和采样条件进行排序并注册序列可以根据晶片上的信息作为审查目标进行自动过滤和采样，从而仅提取审查目标的缺陷信息。