Abstract:
An optical detection device includes a light emitting element, which is an area sensor, a light emitting lens part for irradiating an object to be measured with a bundle of emission rays emitted from the light emitting element, a light receiving lens part for condensing reflected light from the object, a light receiving element for detecting reflected light from the object condensed by the light receiving lens part, and a signal processing section for processing a light-reception signal from the light receiving element. Based on the light-reception signal from the light receiving element, the signal processing section detects at least one of an x-coordinate or a y-coordinate of the object on an x-y coordinate plane from at least one of a light-spot position or a light-spot shape on the light receiving element.
Abstract:
A photo interrupter has a lead frame assembly that has a lead frame having connector terminals for external connection, a light-emitting mold, a light-receiving mold, and a connector mold. The photo interrupter also has an outer case having a connection section. The connector terminals are adapted to be accommodated in the connector section when the lead frame assembly is accommodated in the outer case. At least one of the outer case or the connector mold is provided with a latching section for latching the connector mold to the outer case. Resin for forming the connector mold may be same as or different from light permeable resin for forming the light-emitting mold and the light-receiving mold.
Abstract:
In an optical movement information detector, light emitted from a laser diode (1) is split into a first beam (10), a second beam (11) and a third beam (12) by beam splitters (2a, 2b). The first, second and third beams are converged by a condenser lens (4) upon a surface of an object to be measured (5) to form a beam spot (13) thereon. Diffused light from the beam spot (13) is received by a photodiode (6) and an output signal of the photodiode (6) is processed by a signal processing circuit (20) including an analog-digital converter (8) and a Fourier transforming unit (9). A detecting section (21) obtains, for example, a moving velocity and a moving direction of the object based on spectrum peak frequencies obtained by the Fourier transform.
Abstract:
An object of the present invention is to increase efficiency in review work by appropriately narrowing down review work that verifies shapes of visual defects relating to an enormous amount of defects detected by a visual inspecting apparatus with high sensitivity. In order to appropriately extract defect information from an inspecting apparatus, a filter function and a sampling function are prepared by unitizing the functions. As a result, defects as review targets are narrowed down and extracted automatically using the filter function and the sampling function in combination. In addition, sequencing the filter conditions and the sampling conditions and registering the sequence enables automatic filtering and sampling on the basis of information on a wafer as a review target, and thereby only defect information on the review target is extracted.
Abstract:
In an optical movement information detector, light emitted from a laser diode (1) is split into a first beam (10), a second beam (11) and a third beam (12) by beam splitters (2a, 2b). The first, second and third beams are converged by a condenser lens (4) upon a surface of an object to be measured (5) to form a beam spot (13) thereon. Diffused light from the beam spot (13) is received by a photodiode (6) and an output signal of the photodiode (6) is processed by a signal processing circuit (20) including an analog-digital converter (8) and a Fourier transforming unit (9). A detecting section (21) obtains, for example, a moving velocity and a moving direction of the object based on spectrum peak frequencies obtained by the Fourier transform.
Abstract:
A photodiode includes a first conductivity type semiconductor substrate or a first conductivity type semiconductor layer; a second conductivity type semiconductor layer provided on the first conductivity type semiconductor substrate or the first conductivity type semiconductor layer; an anti-reflection film provided on a surface of a portion of the second conductivity type semiconductor layer which is in a light receiving area; a first conductive layer provided in an area in the vicinity of the light receiving area; and a passivation layer provided on the first conductive layer. Light incident on the photodiode is detected by a junction of the one of the first conductivity type semiconductor substrate and the first conductivity type semiconductor layer, and the second conductivity type semiconductor layer. The area in the vicinity of the light receiving area includes a window area having an opening in the passivation layer for partially exposing the first conductive layer.
Abstract:
There is provided an optical velocimeter for achieving miniaturization and lower power consumption thereof and for accurately detecting two-dimensional travel velocity of a measured object. This optical velocimeter includes a light-emitting element, a diffraction grating, two light-receiving sections, and a signal processing circuit. Light emitted from the light-emitting element is branched by the diffraction grating into three light fluxes, and optical axes of the divided light fluxes are intersected one another on the measured object to form one detection point. Scattered light from the detection point frequency-shifted by travel of the measured object is then received by the two light-receiving sections, and a light-reception signals outputted from the light-receiving sections are processed in the signal processing circuit to detect travel velocities of two directions of the measured object.
Abstract:
In a method of manufacturing a thermal-type infrared sensor including a thermosensitive part, a bolometer material is formed as the thermosensitive part and is subjected to post-processing to control a temperature coefficient of resistance in the bolometer material. The bolometer material may be formed by titanium or vanadium.
Abstract:
A data processing unit which can access a greater number of registers than registers addressable by an instruction to realize high-speed execution of a program. To this end, the data processing unit includes a greater number of floating point registers than the number of registers addressable by an ordinary instruction, a window start pointer register, a window start pointer valid register, a conversion circuit, when the window start pointer valid register has a value of 1, for converting a floating point register number in the instruction to a physical floating point register number and for changing a conversion pattern depending on the value of the window start pointer register, a window start pointer set instruction for setting a value at the window start pointer register, and floating point register pre-load and post-store instructions having a register field different in length from the ordinary instruction, and wherein the floating point register number specified by the register field is converted by the conversion circuit to the physical floating point register number on the basis of the value of the window start pointer register.
Abstract:
A hydraulic actuator comprising a pair of pressure oil chambers each of which has a cushioning port, the two cushioning ports being connected to each other through a cushioning means. The cushioning means includes a pair of cracking valves whose closing pressure is lower than its opening pressure and a pair of restricting means for restricting the flow of a pressure oil provided with regard to said cracking valves. This structure permits an output means for the actuator to be stopped smoothly as a result of fully absorbing the inertial energy that accompanies the output means.