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公开(公告)号：US10906190B2
公开(公告)日：2021-02-02
申请号：US16286704
申请日：2019-02-27
Applicant: Seiko Epson Corporation
Inventor： Hideo Miyasaka , Hiroki Kawai , Mitsuhiro Tateyama , Hiroshi Komatsu
Abstract: A sensor device includes a base body including a recess, a lid body configured to close an opening of the recess, a force detection element disposed in the recess and configured to output an electric charge according to a received external force, and an electronic component disposed in the recess and electrically connected to the force detection element. A separation distance between the electronic component and the lid body is larger than a separation distance between the force detection element and the lid body in the thickness direction of the lid body.
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公开(公告)号：US09873201B2
公开(公告)日：2018-01-23
申请号：US15171442
申请日：2016-06-02
Applicant: Seiko Epson Corporation
Inventor： Toshiyuki Kamiya , Takanobu Matsumoto , Hideaki Oka , Hiroki Kawai
CPC classification number: B25J13/085 , G01L1/142 , G01L1/144 , G01L1/146 , G01L1/16 , G01L5/0076
Abstract: A force detection device includes a charge output element that outputs charge in accordance with a received external force, a conversion and output circuit, having a first switching element and a first capacitor, which converts the charge into a voltage and outputs the voltage, a compensation signal output circuit, having a second switching element and a second capacitor, which outputs a compensation signal, and an external force detection circuit that detects an external force on the basis of the voltage which is output from the conversion and output circuit and the compensation signal which is output from the compensation signal output circuit. The capacitance of the second capacitor is smaller than the capacitance of the first capacitor.
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公开(公告)号：US09410856B2
公开(公告)日：2016-08-09
申请号：US13967575
申请日：2013-08-15
Applicant: Seiko Epson Corporation
Inventor： Toshiyuki Kamiya , Hiroki Kawai
CPC classification number: G01L1/16 , B25J19/028 , G01L1/162 , G01L5/167 , G01L5/226 , Y10S901/46
Abstract: A package having a recessed section, a sensor element arranged in the recessed section and having a piezoelectric material, a lid joined to the package and sealing the recessed section of the package are provided. The package has a first hollow portion which a part of the sensor element fits with, on an inner bottom surface of the recessed section. The lid has a second hollow portion which a part of the sensor element fits with.
Abstract translation: 具有凹部的封装，设置在凹部中的具有压电材料的传感器元件，与封装体接合并密封封装的凹部的盖。 该包装具有第一中空部分，传感器元件的一部分在凹部的内底表面上配合。 盖具有传感器元件的一部分配合的第二中空部分。
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公开(公告)号：US11417823B2
公开(公告)日：2022-08-16
申请号：US16365760
申请日：2019-03-27
Applicant: Seiko Epson Corporation
Inventor： Hiroshi Komatsu , Hiroki Kawai , Mitsuhiro Tateyama
IPC: H01L41/047 , H01L41/08 , H01L41/113 , H01L41/083
Abstract: A sensor element includes a first reference potential side terminal located between a first signal side terminal and a second signal side terminal along a first axis passing through the first signal side terminal and the second signal side terminal in a plan view from a direction in which a first piezoelectric element and a second piezoelectric element are stacked and a second reference potential side terminal located between the first signal side terminal and the second signal side terminal along the first axis in the plan view from the direction. The first axis is located between the first reference potential side terminal and the second reference potential side terminal in the plain view from the direction.
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5.发明授权公开(公告)号：US10899022B2
公开(公告)日：2021-01-26
申请号：US16286805
申请日：2019-02-27
Applicant: Seiko Epson Corporation
Inventor： Hiroshi Komatsu , Hiroki Kawai , Mitsuhiro Tateyama , Hideo Miyasaka
Abstract: A sensor device includes a base body including a recess, a lid body configured to close an opening of the recess, a force detection element disposed in the recess and including a first element that outputs a first signal according to an external force in a first axis and a second element that stacks on the first element and outputs a second signal according to an external force in a second axis; a first circuit disposed in the recess and configured to process the first signal, and a second circuit disposed in the recess and configured to process the second signal.
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Patent Agency Ranking
公开(公告)号：US10654179B2
公开(公告)日：2020-05-19
申请号：US16023466
申请日：2018-06-29
Applicant: Seiko Epson Corporation
Inventor： Hiroki Kawai
Abstract: A force detection apparatus includes a first member, a second member, a piezoelectric sensor device sandwiched by the first member and the second member and outputting electric charge according to an external force, and a conversion and output circuit converting an electric charge output from the piezoelectric sensor device into a voltage and outputting the voltage. When a detectable range of a component of the external force in a predetermined axis direction is a first range, the external force is detected within the first range. When the detectable range is a second range different from the first range, the external force is detected within the second range.
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公开(公告)号：US10578500B2
公开(公告)日：2020-03-03
申请号：US15879935
申请日：2018-01-25
Applicant: Seiko Epson Corporation
Inventor： Hiroki Kawai , Yoshiteru Nishimura
Abstract: A force detecting device attachable to a robot including an arm includes a first base including a projection having an attachment surface to which an end effector is attachable, a second base attached to the arm, and at least one piezoelectric element supported between the first base and the second base and configured to detect external forces applied to the first base and the second base.
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公开(公告)号：US10444101B2
公开(公告)日：2019-10-15
申请号：US15911711
申请日：2018-03-05
Applicant: Seiko Epson Corporation
Inventor： Hiroki Kawai , Hideo Miyasaka
IPC: G01L5/00 , G01L5/16 , B25J19/02 , H01L41/187 , G01L5/22 , B25J13/08 , H01L41/113 , H01L41/18 , H01L41/313
Abstract: A sensor device includes: a base having a recess; a force detecting element which is provided in the recess, and includes at least one piezoelectric element that outputs a signal in accordance with an external force; an adhesive which is provided between the force detecting element and a bottom surface of the recess; at least one electrode provided in the force detecting element; at least one terminal provided in the base; and at least one conductive paste which electrically connects the electrode and the terminal to each other, in which the conductive paste has a part that overlaps the adhesive when viewed from a direction in which the force detecting element and the bottom surface overlap each other, and in which the force detecting element overlaps the bottom surface when viewed from the direction in which the force detecting element and the bottom surface overlap each other.
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公开(公告)号：US09975250B2
公开(公告)日：2018-05-22
申请号：US15631511
申请日：2017-06-23
Applicant: Seiko Epson Corporation
Inventor： Toshiyuki Kamiya , Hiroki Kawai
IPC: G01L1/22 , B25J13/08 , G01L5/16 , G01L5/22 , G01P15/09 , G01P15/18 , H01L41/113 , H01L41/083 , B25J9/16 , G01L5/00 , G01L1/18 , G01L1/16
CPC classification number: B25J13/085 , B25J9/1633 , B25J9/1694 , G01L1/16 , G01L1/18 , G01L5/00 , G01L5/009 , G01L5/167 , G01L5/226 , G01P15/09 , G01P15/18 , H01L41/042 , H01L41/083 , H01L41/1132 , H02N2/0095 , Y10S901/46
Abstract: A force detecting device includes a first base section, a second base section, and a charge output element arranged between the first base section and the second base section. The charge output element includes a first board formed by a Y-cut quartz plate and a second board formed by a Y-cut quartz plate. The boards are laminated in a direction orthogonal to the normal an attachment surface of the second base section. The force detecting device detects an external force on the basis of a first output corresponding to a shearing force in a first detection direction orthogonal to the laminating direction of the first board and a second output corresponding to a shearing force in a second detection direction orthogonal to the laminating direction of the second board and crossing the first detection direction.
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公开(公告)号：US09381647B2
公开(公告)日：2016-07-05
申请号：US14181915
申请日：2014-02-17
Applicant: Seiko Epson Corporation
Inventor： Toshiyuki Kamiya , Takanobu Matsumoto , Hideaki Oka , Hiroki Kawai
CPC classification number: B25J13/085 , G01L1/142 , G01L1/144 , G01L1/146 , G01L1/16 , G01L5/0076
Abstract: A force detection device includes a charge output element that outputs charge in accordance with a received external force, a conversion and output circuit, having a first switching element and a first capacitor, which converts the charge into a voltage and outputs the voltage, a compensation signal output circuit, having a second switching element and a second capacitor, which outputs a compensation signal, and an external force detection circuit that detects an external force on the basis of the voltage which is output from the conversion and output circuit and the compensation signal which is output from the compensation signal output circuit. The capacitance of the second capacitor is smaller than the capacitance of the first capacitor.
Abstract translation: 力检测装置包括根据接收的外力输出电荷的电荷输出元件，具有第一开关元件和第一电容器的转换和输出电路，其将电荷转换成电压并输出电压，补偿 信号输出电路，具有输出补偿信号的第二开关元件和第二电容器;以及外力检测电路，其根据从转换和输出电路输出的电压和补偿信号检测外力 其从补偿信号输出电路输出。 第二电容器的电容小于第一电容器的电容。
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