公开(公告)号：US11833555B2

公开(公告)日：2023-12-05

申请号：US17658163

申请日：2022-04-06

Applicant: Semes Co., Ltd.

Inventor： Sangmin Lee ,  Joojib Park ,  Euisang Lim

IPC: B08B7/00 ,  B08B13/00 ,  H01L21/67

CPC classification number: B08B7/0021 ,  B08B13/00 ,  H01L21/67011

Abstract: An apparatus for processing a substrate may include an upper chamber, a lower chamber being combined with the upper chamber and separated from the upper chamber, and at least one driving member for moving the lower chamber in an upward direction and a downward direction. The least one driving member may include a supporting element for supporting the lower chamber, a first driving element for moving the lower chamber and the supporting element, a second driving element for moving the lower chamber, the supporting element and the first driving element, the second driving element being disposed adjacent to the first driving element, and a connecting element for connecting the first driving element to the second driving element. A processing space may be provided between the upper chamber and the lower chamber when the lower chamber is combined with the upper chamber.

公开(公告)号：US12059714B2

公开(公告)日：2024-08-13

申请号：US18492021

申请日：2023-10-23

Applicant: Semes Co., Ltd.

Inventor： Sangmin Lee ,  Joojib Park ,  Euisang Lim

IPC: B08B3/02 ,  B08B7/00 ,  B08B13/00 ,  H01L21/67

CPC classification number: B08B7/0021 ,  B08B13/00 ,  H01L21/67011

Abstract: An apparatus for processing a substrate may include an upper chamber, a lower chamber being combined with the upper chamber and separated from the upper chamber, and at least one driving member for moving the lower chamber in an upward direction and a downward direction. The least one driving member may include a supporting element for supporting the lower chamber, a first driving element for moving the lower chamber and the supporting element, a second driving element for moving the lower chamber, the supporting element and the first driving element, the second driving element being disposed adjacent to the first driving element, and a connecting element for connecting the first driving element to the second driving element. A processing space may be provided between the upper chamber and the lower chamber when the lower chamber is combined with the upper chamber.