公开(公告)号：US09915261B2

公开(公告)日：2018-03-13

申请号：US14527936

申请日：2014-10-30

Applicant: Semes Co., Ltd.

Inventor： Jin Ho Choi ,  Ju Mi Yoo

IPC: F16D31/02 ,  F04B49/20 ,  H01L21/67 ,  F04B49/06 ,  F04B49/10 ,  H01L21/677

CPC classification number: F04B49/20 ,  F04B49/06 ,  F04B49/103 ,  F04B2201/0201 ,  F04B2201/0202 ,  H01L21/67259 ,  H01L21/67742

Abstract: Provided is a substrate treating apparatus. The substrate treating apparatus includes: a transfer chamber conveying a substrate; a process chamber disposed adjacent to the transfer chamber and performing a treating process o the substrate; and a drive assembly supplying a power by which a component of the transfer chamber or the process chamber operates, wherein the drive assembly includes: a cylinder connected to pipes; a piston disposed to be movable inside the cylinder and connected to the component by a drive shaft; and a pipe control unit automatically adjusting a moving speed of the piston.