公开(公告)号：US09978584B2

公开(公告)日：2018-05-22

申请号：US15251760

申请日：2016-08-30

Applicant: Semes Co., Ltd.

Inventor： Young Hun Lee ,  Eui Sang Lim ,  Min Jun Cho ,  Jae Myoung Lee

IPC: H01L21/02 ,  H01L21/67 ,  H01L21/306 ,  B08B7/00 ,  F26B21/10 ,  F26B21/06

CPC classification number: H01L21/02101 ,  B08B7/0021 ,  F26B21/06 ,  F26B21/10 ,  H01L21/02046 ,  H01L21/30604 ,  H01L21/67017 ,  H01L21/67028 ,  H01L21/67034 ,  H01L21/67069

Abstract: A method for treating a substrate, in which a supercritical fluid is supplied into a chamber, in which the substrate is carried, to treat the substrate, the method including a supply step of supplying the supercritical fluid into the chamber until a pressure of the interior of the chamber reaches a preset pressure, and a substrate treating step of performing a supercritical process while repeating supply and exhaust of the supercritical fluid into and out of the interior of the chamber after the supply step, wherein a flow rate of the supercritical fluid supplied into the chamber in the supply step is variable.

公开(公告)号：US20180012755A1

公开(公告)日：2018-01-11

申请号：US15251760

申请日：2016-08-30

Applicant: Semes Co., Ltd.

Inventor： Young Hun Lee ,  Eui Sang Lim ,  Min Jun Cho ,  Jae Myoung Lee

IPC: H01L21/02 ,  B08B7/00 ,  F26B21/06 ,  H01L21/306 ,  H01L21/67 ,  F26B21/10

CPC classification number: H01L21/02101 ,  B08B7/0021 ,  F26B21/06 ,  F26B21/10 ,  H01L21/02046 ,  H01L21/30604 ,  H01L21/67017 ,  H01L21/67028 ,  H01L21/67034 ,  H01L21/67069

Abstract: A method for treating a substrate, in which a supercritical fluid is supplied into a chamber, in which the substrate is carried, to treat the substrate, the method including a supply step of supplying the supercritical fluid into the chamber until a pressure of the interior of the chamber reaches a preset pressure, and a substrate treating step of performing a supercritical process while repeating supply and exhaust of the supercritical fluid into and out of the interior of the chamber after the supply step, wherein a flow rate of the supercritical fluid supplied into the chamber in the supply step is variable.