公开(公告)号：US20140144584A1

公开(公告)日：2014-05-29

申请号：US14091605

申请日：2013-11-27

Applicant: Semes Co., Ltd.

Inventor： Il Gyo KOO ,  Harutyun MELIKYAN ,  Hyo Seong SEONG ,  Soojin LEE

IPC: H01J37/32

CPC classification number: H01J37/32091 ,  H01J37/3211

Abstract: Provided are a plasma antenna and a plasma generating apparatus including the same. The plasma antenna includes a first antenna inducing electromagnetic fields by using an RF signal, a second antenna inducing electromagnetic fields by using the RF signal, and a capacitor connected between an input terminal of the first antenna and an input terminal of the second antenna.

Abstract translation: 提供了一种等离子体天线和包括该等离子体天线的等离子体产生装置。 等离子体天线包括通过使用RF信号来感应电磁场的第一天线，通过使用RF信号来感应电磁场的第二天线以及连接在第一天线的输入端和第二天线的输入端之间的电容器。

公开(公告)号：US20210057185A1

公开(公告)日：2021-02-25

申请号：US17092757

申请日：2020-11-09

Applicant: SEMES CO., LTD.

Inventor： Il Gyo KOO ,  Harutyun MELIKYAN ,  Hyo Seong SEONG ,  Soojin LEE

IPC: H01J37/32

Abstract: Provided are a plasma antenna and a plasma generating apparatus including the same. The plasma antenna includes a first antenna inducing electromagnetic fields by using an RF signal, a second antenna inducing electromagnetic fields by using the RF signal, and a capacitor connected between an input terminal of the first antenna and an input terminal of the second antenna.