公开(公告)号：US20150318200A1

公开(公告)日：2015-11-05

申请号：US14699576

申请日：2015-04-29

Applicant: Semiconductor Energy Laboratory Co., LTD.

Inventor： Masakatsu OHNO ,  Satoru IDOJIRI ,  Kanpei KIKUCHI ,  Yoshiharu HIRAKATA ,  Kohei YOKOYAMA

IPC: H01L21/683 ,  H01L21/463 ,  H01L21/67

CPC classification number: H01L21/463 ,  B32B38/10 ,  B32B43/006 ,  H01L21/67092 ,  H01L21/6838 ,  Y10T156/1132 ,  Y10T156/1168 ,  Y10T156/1184 ,  Y10T156/1928 ,  Y10T156/1944 ,  Y10T156/1961 ,  Y10T156/1967 ,  Y10T156/1978

Abstract: A wedge-shaped jig (6) is inserted into a gap between a first substrate (21) and a second substrate (22) at a corner (221) of the second substrate (22) and separation of the attached first substrate (21) and second substrate (22) starts to proceed; then, a second suction pad (53) of a second suction portion (51), which is the closest to the corner (221), moves upward. Then, first suction pads (43) of first suction portions (41a), (41b), and (41c) sequentially move upward such that one side of the second substrate (22) separates from the stacked body. Although the second substrate (22) warps as the separation of the second substrate (22) proceeds, each of the plurality of first suction pads (43) elastically deforms. Therefore, the first suction pads (43) can be prevented from being detached from the second substrate (22), and the substrate (22) can be securely separated from the stacked body.

Abstract translation: 在第二基板（22）的角部（221）处将楔形夹具（6）插入到第一基板（21）和第二基板（22）之间的间隙中，并且分离附接的第一基板（21） 并且第二基板（22）开始进行; 那么最靠近拐角（221）的第二吸入部（51）的第二吸盘（53）向上移动。 然后，第一吸引部（41a），（41b）和（41c）的第一吸盘（43）依次向上移动，使得第二基板（22）的一侧与层叠体分离。 尽管第二衬底（22）随着第二衬底（22）的分离进行而变形，但是多个第一吸附垫（43）中的每一个弹性变形。 因此，可以防止第一吸盘（43）与第二基板（22）分离，并且基板（22）能够与层叠体牢固地分离。