公开(公告)号：US20020096202A1

公开(公告)日：2002-07-25

申请号：US10108278

申请日：2002-03-26

Applicant: Semitool, Inc.

Inventor： Dan Bexten ,  Jerry Norby

IPC: B08B003/02

CPC classification number: H01L21/67051 ,  B08B3/12 ,  B08B9/0861 ,  B08B9/32 ,  H01L21/6704 ,  Y10S134/902

Abstract: A system and method for cleaning carriers used for handling semiconductor wafers including a box cleaner having a rotor within an enclosure. Box holder assemblies on the rotor include upper and lower hooks for securing boxes to the rotor. A box door holder assembly is also provided on the rotor. The box door holder assembly preferably has a plurality of box door holding positions. Each box door holding position advantageously has a door guide and door hooks for holding a door. The box door holder assembly allows both the boxes and their doors to be cleaned with the centrifugal cleaner, avoiding the need for separate cleaning of the doors. In one configuration, the rotor is provided with an even number of box holder assemblies symmetrically spaced about the rotor and an even number of door holder assemblies symmetrically spaced about the rotor.

Abstract translation: 一种用于清洁用于处理半导体晶片的载体的系统和方法，包括在外壳内具有转子的盒式清洁器。 转子上的箱体组件包括用于将箱固定到转子上的上钩和下钩。 转子上也设有一个箱门组件。 盒门保持器组件优选地具有多个箱门保持位置。 每个箱门保持位置有利地具有用于保持门的门引导件和门钩。 箱门支架组件允许使用离心式清洁器清洁盒子和门，避免了单独清洁门的需要。 在一种构造中，转子设置有偶数个围绕转子对称地间隔开的盒保持器组件和偶数个围绕转子对称地间隔开的门保持器组件。

公开(公告)号：US20020100495A1

公开(公告)日：2002-08-01

申请号：US10043716

申请日：2002-01-09

Applicant: Semitool, Inc.

Inventor： Dan Bexten ,  Jerry Norby

IPC: B08B003/02

CPC classification number: H01L21/6704 ,  B08B3/02 ,  B08B9/0861 ,  B08B9/093 ,  H01L21/67051

Abstract: A machine for cleaning containers such as flat media carriers has inside and outside arrays of nozzles arranged to spray a cleaning solution onto containers supported on a spinning rotor in a chamber. The cleaning solution, a mixture of water and a detergent or surfactant, is prepared by drawing out surfactant directly from a surfactant bulk storage vessel by means of a metering pump. The flow rate of the water is measured by a flow meter and in combination with the metering pump, a proper amount of surfactant is injected into the water line to produce a mixture with a desired surfactant concentration for removing contaminants. The mixture is injected into the water line at a mixing control valve to ensure that the water and surfactant are thoroughly mixed before being injected into the media carrier. Where the wafer carrier is provided with multiple rinse manifolds for spraying the carrier, a flow meter and mixing control valve are provided in the water inlet line for each manifold and a separate metering pump is provided for injecting surfactant into each water line to ensure that a proper amount of surfactant is injected into each water line to produce a surfactant/water mixture with a desired surfactant concentration.

Abstract translation: 用于清洁诸如平坦介质载体的容器的机器具有内部和外部喷嘴阵列，布置成将清洁溶液喷射到在室中旋转的转子上支撑的容器上。 清洁溶液，水和洗涤剂或表面活性剂的混合物通过用计量泵从表面活性剂散装储存容器中直接抽出表面活性剂来制备。 通过流量计测量水的流量，并与计量泵组合，将适量的表面活性剂注入到水管线中以产生具有所需表面活性剂浓度以除去污染物的混合物。 将混合物在混合控制阀处注入水管线中，以确保水和表面活性剂在注入介质载体之前被充分混合。 在晶片载体上设置有多个用于喷涂载体的冲洗歧管的情况下，在每个歧管的进水管线中设置流量计和混合控制阀，并且提供单独的计量泵，用于将表面活性剂注入到每个水管线中，以确保 将适量的表面活性剂注入每条水线以产生具有所需表面活性剂浓度的表面活性剂/水混合物。