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    METHOD OF PRODUCING DIFFRACTIVE THIN-FILM PIEZOELECTRIC MICROMIRROR
    1.
    发明申请
    METHOD OF PRODUCING DIFFRACTIVE THIN-FILM PIEZOELECTRIC MICROMIRROR 审中-公开
    生产薄膜薄膜压电薄膜的方法

    公开(公告)号：US20080166473A1

    公开(公告)日：2008-07-10

    申请号：US11739058

    申请日：2007-04-23

    申请人： Seung-Do An ,  Sang Kyeong Yun ,  Jong-Hyeong Song

    发明人： Seung-Do An ,  Sang Kyeong Yun ,  Jong-Hyeong Song

    IPC分类号： B05D5/12

    CPC分类号： G02B26/0808

    摘要： Disclosed is a method of producing a diffractive micromirror. More particularly, the present invention pertains to a method of producing a diffractive micromirror, in which a recess having a desired depth and width is precisely formed in a piezoelectric operation manner.

    摘要翻译： 公开了衍射微镜的制造方法。 更具体地，本发明涉及一种制造衍射微镜的方法，其中具有期望的深度和宽度的凹槽以压电操作方式精确地形成。

    DEVICE AND METHOD FOR INSPECTING OPTICAL MODULATOR
    3.
    发明申请
    DEVICE AND METHOD FOR INSPECTING OPTICAL MODULATOR 审中-公开
    用于检查光学调制器的装置和方法

    公开(公告)号：US20080095531A1

    公开(公告)日：2008-04-24

    申请号：US11863096

    申请日：2007-09-27

    申请人： In-Jae Yeo ,  Sang-Kyeong Yun ,  Seung-Do An ,  Kyu-Bum Han ,  Jong-Hyeong Song ,  Yoon-Shik Hong

    发明人： In-Jae Yeo ,  Sang-Kyeong Yun ,  Seung-Do An ,  Kyu-Bum Han ,  Jong-Hyeong Song ,  Yoon-Shik Hong

    IPC分类号： H04B10/08

    CPC分类号： G09G3/006 ,  G02B26/001 ,  G02B26/0808 ,  G09G3/02 ,  G09G3/3433 ,  G09G2360/145

    摘要： An aspect of the present invention provides a device for inspecting an optical modulator. The device can comprise: a probe card that converts an inputted control signal to a driving signal, and provide the driving signal by contacting with each driving signal input pad of an optical modulator—wherein the optical modulator comprises one or more micromirrors and one or more driving signal input pads connected to the micromirrors, respectively, and the micromirror moves up and down according to the driving signal inputted through the driving signal input pad—; and an image control circuit that generates the control signal for checking if the optical modulator is operation properly, and is connected electrically to the probe card to transmit the control signal. A device and a method for inspecting an optical modulator according to the present invention can inspect performance and function of the optical modulator at a chip level.

    摘要翻译： 本发明的一个方面提供了一种用于检查光学调制器的装置。 该装置可以包括：探针卡，其将输入的控制信号转换为驱动信号，并通过与光学调制器的每个驱动信号输入焊盘接触来提供驱动信号，其中光学调制器包括一个或多个微镜和一个或多个 分别连接到微镜的驱动信号输入焊盘，微镜根据通过驱动信号输入焊盘输入的驱动信号上下移动; 以及图像控制电路，其生成用于检查光调制器是否正常工作的控制信号，并且与探针卡电连接以发送控制信号。 根据本发明的用于检查光学调制器的装置和方法可以在芯片级检查光调制器的性能和功能。

    Diffractive thin-film piezoelectric micromirror and method of producing the same
    4.
    发明授权
    Diffractive thin-film piezoelectric micromirror and method of producing the same 失效
    衍射薄膜压电微镜及其制造方法

    公开(公告)号：US07626745B2

    公开(公告)日：2009-12-01

    申请号：US10952556

    申请日：2004-09-28

    申请人： Sang Kyeong Yun ,  Jong-Hyeong Song ,  Seung-Do An ,  Min-Suk Oh

    发明人： Sang Kyeong Yun ,  Jong-Hyeong Song ,  Seung-Do An ,  Min-Suk Oh

    IPC分类号： G02B26/12

    CPC分类号： G02B26/0808 ,  G09F9/372

    摘要： Disclosed is a diffractive micromirror and a method of producing the same. More particularly, the present invention pertains to a diffractive thin-film piezoelectric micromirror, which is operated in a piezoelectric operation manner to assure excellent displacement, operation speed, reliability, linearity, and low voltage operation, and a method of producing the same. The diffractive thin-film piezoelectric micromirror includes a silicon substrate on which a recess is formed to provide an air space to the center thereof, and a piezoelectric mirror layer having a band shape, which is attached to the silicon substrate along both ends of the recess at both ends thereof while being spaced from the bottom of the recess at a center portion thereof and which includes a thin-film piezoelectric material layer to be vertically movable when voltage is applied to the piezoelectric material layer, and thus diffracts an incident light beam.

    摘要翻译： 公开了一种衍射微镜及其制造方法。 更具体地，本发明涉及以压电操作方式操作以确保优异的位移，操作速度，可靠性，线性和低电压操作的衍射薄膜压电微镜及其制造方法。 衍射薄膜压电微反射镜包括硅基板，其上形成有凹部以在其中心提供空气空间;以及具有带状的压电反射镜层，其沿着凹部的两端附接到硅基板 同时在其中心部分与凹部的底部间隔开，并且包括薄膜压电材料层，当电压施加到压电材料层时可以垂直移动，从而衍射入射光束。

    Diffractive thin-film piezoelectric micromirror and method of producing the same
    5.
    发明申请
    Diffractive thin-film piezoelectric micromirror and method of producing the same 失效
    衍射薄膜压电微镜及其制造方法

    公开(公告)号：US20050105157A1

    公开(公告)日：2005-05-19

    申请号：US10952556

    申请日：2004-09-28

    申请人： Sang-Kyeong Yun ,  Jong-Hyeong Song ,  Seung-Do An ,  Min-Suk Oh

    发明人： Sang-Kyeong Yun ,  Jong-Hyeong Song ,  Seung-Do An ,  Min-Suk Oh

    IPC分类号： B81B3/00 ,  B81C1/00 ,  G02B26/06 ,  G02B26/08 ,  G09F9/37 ,  H01L41/09 ,  H01L41/18 ,  H01L41/187 ,  H01L41/22 ,  H02N2/00

    CPC分类号： G02B26/0808 ,  G09F9/372

    摘要： Disclosed is a diffractive micromirror and a method of producing the same. More particularly, the present invention pertains to a diffractive thin-film piezoelectric micromirror, which is operated in a piezoelectric operation manner to assure excellent displacement, operation speed, reliability, linearity, and low voltage operation, and a method of producing the same. The diffractive thin-film piezoelectric micromirror includes a silicon substrate on which a recess is formed to provide an air space to the center thereof, and a piezoelectric mirror layer having a band shape, which is attached to the silicon substrate along both ends of the recess at both ends thereof while being spaced from the bottom of the recess at a center portion thereof and which includes a thin-film piezoelectric material layer to be vertically movable when voltage is applied to the piezoelectric material layer, and thus diffracts an incident light beam.

    摘要翻译： 公开了一种衍射微镜及其制造方法。 更具体地，本发明涉及以压电操作方式操作以确保优异的位移，操作速度，可靠性，线性和低电压操作的衍射薄膜压电微镜及其制造方法。 衍射薄膜压电微反射镜包括硅基板，其上形成有凹部以在其中心提供空气空间;以及具有带状的压电反射镜层，其沿着凹部的两端附接到硅基板 同时在其中心部分与凹部的底部间隔开，并且包括薄膜压电材料层，当电压施加到压电材料层时可以垂直移动，从而衍射入射光束。

    OPTICAL MODULATOR, OPTICAL MODULATOR MODULE AND SCANNING DISPLAY APPARATUS INCLUDING THE SAME
    6.
    发明申请
    OPTICAL MODULATOR, OPTICAL MODULATOR MODULE AND SCANNING DISPLAY APPARATUS INCLUDING THE SAME 审中-公开
    光学调制器，光学调制器模块和扫描显示装置，包括它们

    公开(公告)号：US20090141339A1

    公开(公告)日：2009-06-04

    申请号：US12325988

    申请日：2008-12-01

    申请人： Victor Yurlov ,  Sang-Kyeong Yun ,  Jong-Hyeong Song ,  In-Jae Yeo ,  Haeng-Seok Yang ,  Anatoliy Lapchuk

    发明人： Victor Yurlov ,  Sang-Kyeong Yun ,  Jong-Hyeong Song ,  In-Jae Yeo ,  Haeng-Seok Yang ,  Anatoliy Lapchuk

    IPC分类号： G02F1/29

    CPC分类号： G02B26/06

    摘要： Disclosed are an optical modulator and an optical modulator module that can reduce a laser speckle. The optical modulator module can include an optical modulator, modulating an incident beam of light incident according to a driving signal and outputting the modulated beam of light; and a light transmissive substrate, placed in the optical modulator and formed with a phase control pattern, the incident beam of light and the outputted beam of light passing through the light transmissive substrate and the phase control pattern being formed in a part of a surface that is a light path of the incident beam of light and the outputted beam of light. Here, the phase control pattern, a central peak of an autocorrelation function can have a width that is smaller than a width of the phase control pattern, and a side lobe level is smaller than a level of the central peak.

    摘要翻译： 公开了一种可以减少激光散斑的光调制器和光调制器模块。 光调制器模块可以包括光调制器，根据驱动信号调制入射的入射光束并输出调制的光束; 以及透光基板，放置在光调制器中并形成有相位控制图案，入射光束和输出的光束通过透光基板，相位控制图案形成在表面的一部分中 是入射光束和输出光束的光路。 这里，相位控制图案，自相关函数的中心峰值可以具有小于相位控制图案的宽度的宽度，并且旁瓣电平小于中心峰值的电平。

    Method for driving piezoelectric element or optical modulator including piezoelectric element
    7.
    发明授权
    Method for driving piezoelectric element or optical modulator including piezoelectric element 失效
    用于驱动包括压电元件的压电元件或光学调制器的方法

    公开(公告)号：US07569973B2

    公开(公告)日：2009-08-04

    申请号：US12128567

    申请日：2008-05-28

    申请人： Seung-Do An ,  Jong-Hyeong Song ,  Anatoliy Lapchuk

    发明人： Seung-Do An ,  Jong-Hyeong Song ,  Anatoliy Lapchuk

    IPC分类号： H01L41/09 ,  G02F1/00

    CPC分类号： G02B26/0858 ,  H01L41/042

    摘要： Disclosed are a method for driving a piezoelectric element or an optical modulator including a piezoelectric element and a recorded medium recorded with a program for executing the same. In accordance with an embodiment of the present invention, the method for driving a piezoelectric element causing a displacement object to be displaced by being contracted or expanded according to a supplied driving voltage, including supplying a driving signal to the piezoelectric element during a first driving period in a first voltage range; supplying a control signal for controlling a polarization hysteresis of the piezoelectric element according to a driving, performed during the first driving period, to the piezoelectric element; and supplying the driving signal to the piezoelectric element during a second driving period in a second voltage range.

    摘要翻译： 公开了一种用于驱动压电元件或光调制器的方法，该压电元件或光调制器包括压电元件和记录有用于执行该压电元件的程序的记录介质。 根据本发明的实施例，一种用于驱动通过根据所提供的驱动电压使位移物体收缩或膨胀的压电元件的方法，包括在第一驱动期间向压电元件提供驱动信号 在第一电压范围内; 根据在第一驱动期间执行的驱动，向压电元件提供用于控制压电元件的极化滞后的控制信号; 以及在第二电压范围内的第二驱动期间将所述驱动信号提供给所述压电元件。

    OPTICAL MODULATOR MODULE PACKAGE
    8.
    发明申请
    OPTICAL MODULATOR MODULE PACKAGE 审中-公开
    光学调制器模块封装

    公开(公告)号：US20080158649A1

    公开(公告)日：2008-07-03

    申请号：US11957107

    申请日：2007-12-14

    申请人： Heung-Woo Park ,  Tae-Won Lee ,  Sang-Kyeong Yun ,  Chang-Su Park ,  Victor Yurlov ,  Jong-Hyeong Song

    发明人： Heung-Woo Park ,  Tae-Won Lee ,  Sang-Kyeong Yun ,  Chang-Su Park ,  Victor Yurlov ,  Jong-Hyeong Song

    IPC分类号： G02B26/02

    CPC分类号： G02B26/0808

    摘要： The present invention relates to a MEMS package, more specifically to an optical module package. According to an aspect of the present invention, the optical modulator module package includes an optical modulator, emitting a beam of light, which is modulated by diffracting and interfering the beam of light by an upwardly and downwardly spaced distance of a mirror, the beam of light being incident from a light source; a driver IC, mounted on the surrounding of the optical modulator to drive the optical modulator; and a noise removing member, intercepting a beam of light, which is not incident to a mirror area of the light modulator, of the incident beams of light.

    摘要翻译： 本发明涉及一种MEMS封装，更具体地说涉及一种光学模块封装。 根据本发明的一个方面，光调制器模块封装包括光调制器，其发射光束，该光束通过镜的向上和向下间隔的距离衍射和干扰光束而被调制， 来自光源的光; 驱动器IC，安装在光调制器的周围以驱动光调制器; 以及噪声去除构件，其遮挡不入射到光调制器的镜面区域的入射光束的光束。