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公开(公告)号：US07470954B2
公开(公告)日：2008-12-30
申请号：US11274916
申请日：2005-11-14
IPC分类号： H01L29/94 , H01L31/062
摘要： A method and resultant device, in which metal nanoparticles are self-assembled into two-dimensional lattices. A periodic hole pattern (wells) is fabricated on a photoresist substrate, the wells having an aspect ratio of less than 0.37. The nanoparticles are synthesized within inverse micelles of a polymer, preferably a block copolymer, and are self-assembled onto the photoresist nanopatterns. The nanoparticles are selectively positioned in the holes due to the capillary forces related to the pattern geometry, with a controllable number of particles per lattice point.
摘要翻译： 金属纳米粒子自组装成二维晶格的方法和结果器件。 在光致抗蚀剂基底上制造周期性孔图案（孔），孔的纵横比小于0.37。 纳米颗粒在聚合物的反胶束中合成，优选嵌段共聚物，并且自组装到光致抗蚀剂纳米图案上。 由于与图案几何形状相关的毛细力，纳米颗粒被选择性地定位在孔中，每个晶格点具有可控数量的颗粒。
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公开(公告)号：US06989324B2
公开(公告)日：2006-01-24
申请号：US10759589
申请日：2004-01-15
IPC分类号： H01L21/44
摘要： A method and resultant device, in which metal nanoparticles are self-assembled into two-dimensional lattices. A periodic hole pattern (wells) is fabricated on a photoresist substrate, the wells having an aspect ratio of less than 0.37. The nanoparticles are synthesized within inverse micelles of a polymer, preferably a block copolymer, and are self-assembled onto the photoresist nanopatterns. The nanoparticles are selectively positioned in the holes due to the capillary forces related to the pattern geometry, with a controllable number of particles per lattice point.
摘要翻译： 金属纳米粒子自组装成二维晶格的方法和结果器件。 在光致抗蚀剂基底上制造周期性孔图案（孔），孔的纵横比小于0.37。 纳米颗粒在聚合物的反胶束中合成，优选嵌段共聚物，并且自组装到光致抗蚀剂纳米图案上。 由于与图案几何形状相关的毛细力，纳米颗粒被选择性地定位在孔中，每个晶格点具有可控数量的颗粒。
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公开(公告)号：US20060154466A1
公开(公告)日：2006-07-13
申请号：US11274916
申请日：2005-11-14
IPC分类号： H01L21/44
摘要： A method and resultant device, in which metal nanoparticles are self-assembled into two-dimensional lattices. A periodic hole pattern (wells) is fabricated on a photoresist substrate, the wells having an aspect ratio of less than 0.37. The nanoparticles are synthesized within inverse micelles of a polymer, preferably a block copolymer, and are self-assembled onto the photoresist nanopatterns. The nanoparticles are selectively positioned in the holes due to the capillary forces related to the pattern geometry, with a controllable number of particles per lattice point.
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公开(公告)号：US20050158988A1
公开(公告)日：2005-07-21
申请号：US10759589
申请日：2004-01-15
IPC分类号： G11B5/706 , H01F1/00 , H01F1/153 , H01L21/4763
摘要： A method and resultant device, in which metal nanoparticles are self-assembled into two-dimensional lattices. A periodic hole pattern (wells) is fabricated on a photoresist substrate, the wells having an aspect ratio of less than 0.37. The nanoparticles are synthesized within inverse micelles of a polymer, preferably a block copolymer, and are self-assembled onto the photoresist nanopatterns. The nanoparticles are selectively positioned in the holes due to the capillary forces related to the pattern geometry, with a controllable number of particles per lattice point.
摘要翻译： 金属纳米粒子自组装成二维晶格的方法和结果器件。 在光致抗蚀剂基底上制造周期性孔图案（孔），孔的纵横比小于0.37。 纳米颗粒在聚合物的反胶束中合成，优选嵌段共聚物，并且自组装到光致抗蚀剂纳米图案上。 由于与图案几何形状相关的毛细力，纳米颗粒被选择性地定位在孔中，每个晶格点具有可控数量的颗粒。
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