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1.发明授权Head performance based nano-machining process control for stripe forming of advanced sliders 有权基于头部性能的纳米加工过程控制，用于高级滑块的条纹成形公开(公告)号：US07147539B1
公开(公告)日：2006-12-12
申请号：US09864562
申请日：2001-05-23
IPC分类号： B24B49/10
CPC分类号： B24B37/00 , B24B37/048 , B24B41/06 , B24B49/10 , Y10T29/49046
摘要： The present invention is a method of using direct head electrical response signals for feedback process control. When lapping the air bearing surface of a bar of sliders, a magnetic field is applied to the air bearing surface and a bias current is applied to the reader elements. A head electrical response, such as amplitude or resistance change, is measured and is used to control the lapping device. Using a fixture which allows individual slider machining, a controller can be used to monitor the head response signal for each slider on the bar and individually control each slider on the bar so that material removal over each slider proceeds until a predetermined target stripe height is reached.
摘要翻译： 本发明是一种使用直接头电响应信号进行反馈处理控制的方法。 当研磨棒状滑块的空气轴承表面时，磁场被施加到空气轴承表面，并且偏置电流被施加到读取器元件。 测量头部电响应，例如振幅或电阻变化，并用于控制研磨装置。 使用允许单独的滑块加工的夹具，可以使用控制器来监视杆上每个滑块的头响应信号，并单独控制杆上的每个滑块，使得每个滑块上的材料移除进行直到达到预定的目标条带高度 。
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公开(公告)号：US20050006227A1
公开(公告)日：2005-01-13
申请号：US10610004
申请日：2003-06-30
申请人： Shanlin Hao , Roger Hipwell
发明人： Shanlin Hao , Roger Hipwell
CPC分类号： G11B5/5552
摘要： An apparatus and method of machining sliders to obtain the optimum PTR for each slider. An array of MEMS devices configured for angular actuation are provided, and a slider is placed in each MEMS device of the array. The ion milling of the sliders is controlled individually for each slider based on the relationship of the ion angle and relative etch rates of the slider components. The MEMS devices are controlled to ensure the ion incidence angle for each slider is such that the desired PTR of each slider is achieved.
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公开(公告)号：US5991698A
公开(公告)日：1999-11-23
申请号：US852434
申请日：1997-05-07
申请人： Shanlin Hao , Ray V. Rigles , William P. Wood , Lars H. Ahlen , John C. Heitke
发明人： Shanlin Hao , Ray V. Rigles , William P. Wood , Lars H. Ahlen , John C. Heitke
CPC分类号： G11B5/3103 , H01L21/00 , G11B5/1871 , G11B5/3166 , Y10T29/49004 , Y10T29/49036 , Y10T29/49037
摘要： A lapping system data acquisition unit is disclosed for use in measuring resistances of multiple resistors embedded in a structure to be machined. Each of multiple independent current sources directs a current through one of the multiple resistors embedded in the structure during machining of a surface of the structure. Each of multiple voltage sensing devices couples to a separate one of the multiple resistors and provides a separate analog voltage output signal indicative of the resistance of the resistor. Each of multiple filters is coupled to a separate one of the multiple voltage sensing devices Analog-to-digital conversion circuitry coupled to the multiple filters generates a digitized signal for each of the filtered output signals.
摘要翻译： 公开了一种研磨系统数据采集单元，用于测量嵌入在待加工结构中的多个电阻器的电阻。 多个独立电流源中的每一个在加工结构的表面期间引导电流通过嵌入结构中的多个电阻中的一个电阻。 多个电压感测装置中的每一个耦合到多个电阻器中的单独一个，并且提供指示电阻器的电阻的单独的模拟电压输出信号。 多个滤波器中的每一个耦合到多个电压感测装置中的单独的一个。耦合到多个滤波器的模数转换电路为滤波的输出信号中的每一个生成数字化的信号。
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4.发明授权Micro-actuation apparatus for head ABS planarity (PTR) control during slider machining 失效用于滑块加工过程中头部ABS平面度（PTR）控制的微动装置公开(公告)号：US06979389B2
公开(公告)日：2005-12-27
申请号：US10610004
申请日：2003-06-30
CPC分类号： G11B5/5552
摘要： An apparatus and method of machining sliders to obtain the optimum PTR for each slider. An array of MEMS devices configured for angular actuation are provided, and a slider is placed in each MEMS device of the array. The ion milling of the sliders is controlled individually for each slider based on the relationship of the ion angle and relative etch rates of the slider components. The MEMS devices are controlled to ensure the ion incidence angle for each slider is such that the desired PTR of each slider is achieved.
摘要翻译： 一种加工滑块以获得每个滑块的最佳PTR的装置和方法。 提供了构造成用于角度致动的MEMS器件的阵列，并且滑块被放置在阵列的每个MEMS器件中。 基于滑块组件的离子角和相对蚀刻速率的关系，滑块的离子铣削对于每个滑块单独控制。 控制MEMS器件以确保每个滑块的离子入射角度使得实现每个滑块的期望的PTR。
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公开(公告)号：US20050157425A1
公开(公告)日：2005-07-21
申请号：US10761079
申请日：2004-01-20
申请人： Lee Walter , Shanlin Hao , Moshe Olim
发明人： Lee Walter , Shanlin Hao , Moshe Olim
CPC分类号： G11B5/4826
摘要： A gimbal assembly includes a gimbal and a slider. The slider has at least one adhesive receiving feature which is formed on a mounting surface of the slider. The gimbal has a lock feature including at least one body that protrudes from a slider-engaging surface and terminates at a first end. Each body of the lock feature engages each adhesive receiving feature of the slider.
摘要翻译： 万向节组件包括万向节和滑块。 滑块具有形成在滑块的安装表面上的至少一个粘合剂接收特征。 万向节具有锁定特征，包括至少一个从滑块接合表面突出并终止于第一端的主体。 锁定件的每个主体都与滑块的每个粘合剂接收特征相啮合。
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6.发明授权公开(公告)号：US06287170B1
公开(公告)日：2001-09-11
申请号：US09020549
申请日：1998-02-09
IPC分类号： B24B4902
CPC分类号： G11B5/3163 , B24B37/048 , B24B49/16 , G11B5/1871 , G11B5/3103 , G11B5/3116 , G11B5/3169 , G11B5/3173 , G11B5/3903 , G11B5/3967
摘要： An actuator adapted to adjust the profile of a carrier supporting a bar relative to a lapping surface. The carrier including a plurality of spaced control or actuation points along the length of the carrier for adjusting the profile of the mounting surface of the carrier adapted to support a bar for lapping. The actuator adapted to actuate the carrier at the spaced actuation points and including a plurality of actuation members movably actuated via pressure supplied to the actuation members. The actuation members are supported in spaced staggered relation in chambers in a manifold. The actuation members are spaced relative to the spaced actuation points and are supported relative to the manifold to provide precision actuation for incrementally adjusting the profile of the carrier.
摘要翻译： 适于调节相对于研磨表面支撑杆的载体的轮廓的致动器。 载体包括沿着载体的长度的多个间隔的控制或致动点，用于调节载体的安装表面的轮廓，其适于支撑用于研磨的条。 所述致动器适于在所述间隔的致动点处致动所述载体，并且包括通过供应到所述致动构件的压力可移动地致动的多个致动构件。 致动构件在歧管中的腔室中以间隔开的交错关系支撑。 致动构件相对于间隔的致动点间隔开并且相对于歧管被支撑，以提供用于逐渐调节载体轮廓的精确致动。
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公开(公告)号：US06609949B2
公开(公告)日：2003-08-26
申请号：US09777713
申请日：2001-02-06
申请人： Bruce Anderson , Dongming Liu , Edward M. Erickson , Shanlin Hao
发明人： Bruce Anderson , Dongming Liu , Edward M. Erickson , Shanlin Hao
IPC分类号： B24B4900
CPC分类号： B24B49/12 , B24B37/048 , B24B41/067 , B24B49/10 , G11B5/102 , G11B5/1871 , G11B5/3116 , G11B5/3903 , Y10T29/49048
摘要： An interfaced carrier assembly including an interface circuit having printed contacts to provide electrical interface or feedback control for lapping operations. The printed contacts are formed on a base material on the interface circuit and interface with terminal pads on a slider bar supported by a carrier plate for lapping feedback control. The interface circuit is assembled with the carrier plate with contacts on the interface circuit aligned with terminal pads on the slider bar supported by the carrier plate. Alignment of the terminal pads on the slider bar and contacts on the interface circuit are measured by digital cameras for assembly of the interfaced carrier assembly.
摘要翻译： 接口载体组件包括具有印刷触点的接口电路，以提供用于研磨操作的电接口或反馈控制。 印刷的触点形成在接口电路上的基底材料上，并且与由用于研磨反馈控制的载体板支撑的滑块上的端子焊盘接合。 接口电路与承载板组装，接口电路上的触点与由载板支撑的滑块上的端子焊盘对齐。 滑块上的端子焊盘和接口电路上的触点的对准由数字照相机测量，用于组装接口的载体组件。
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公开(公告)号：US06347983B1
公开(公告)日：2002-02-19
申请号：US09589926
申请日：2000-06-07
申请人： Shanlin Hao , James K. Price , Dongming Liu
发明人： Shanlin Hao , James K. Price , Dongming Liu
IPC分类号： B24B100
CPC分类号： B24B37/04 , B24B49/04 , B24B49/10 , G11B5/1871 , G11B5/3116 , G11B5/3163 , G11B5/3166 , G11B5/3169 , G11B5/3903 , Y10S451/908 , Y10T29/49036 , Y10T29/49037
摘要： A method and system for lapping a magnetic transducer using an electrical lapping guide is presented. This includes rough lapping the transducer based on a first signal and fine lapping the transducer based on a second signal from a dummy transducer. The dummy transducer can have electrical properties substantially similar to electrical properties of the magnetic transducer. The first signal can include a stripe height calculated as a function of a reference resistor element and an analog resistor element. The second signal can include lap to reader resistance from the dummy transducer and a stripe height calculated from a reference resistor element and an analog resistor element. The dummy transducer can also provide process noise monitoring capability during lapping.
摘要翻译： 提出了一种使用电研磨导轨研磨磁传感器的方法和系统。 这包括基于第一信号粗糙地研磨传感器，并且基于来自虚拟换能器的第二信号精细研磨换能器。 虚拟换能器可以具有与磁换能器的电气特性基本相似的电气特性。 第一信号可以包括作为参考电阻器元件和模拟电阻器元件的函数计算的条纹高度。 第二信号可以包括来自虚拟换能器的搭接读取器电阻和从参考电阻器元件和模拟电阻器元件计算的条带高度。 虚拟换能器还可以在研磨过程中提供过程噪声监测能力。
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公开(公告)号：US07144484B2
公开(公告)日：2006-12-05
申请号：US09930741
申请日：2001-08-15
申请人： Edwin Frank Rejda , Joel William Hoehn , Shanlin Hao , Lance Eugene Stover , Todd Arthur Luse , James Richard Peterson
发明人： Edwin Frank Rejda , Joel William Hoehn , Shanlin Hao , Lance Eugene Stover , Todd Arthur Luse , James Richard Peterson
IPC分类号： C23C14/34 , H01L21/306
CPC分类号： G11B5/3173 , G11B5/3163 , G11B5/3166 , G11B5/3903
摘要： A method for producing magneto resistive heads includes the steps of positioning at least two magneto resistive elements in spaced relation to one another and placing the at least two magneto resistive elements in an ion milling environment where material is removed nonselectively from items in the environment. A property of at least two of the plurality of magneto resistive elements is monitored. In response to monitoring, one of the at least two magneto resistive elements is dynamically covered to prevent additional removal of material from the covered magneto resistive element.
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10.发明授权公开(公告)号：US06475064B2
公开(公告)日：2002-11-05
申请号：US09892039
申请日：2001-06-26
IPC分类号： B24B4900
CPC分类号： G11B5/3163 , B24B37/048 , B24B49/16 , G11B5/1871 , G11B5/3103 , G11B5/3116 , G11B5/3169 , G11B5/3173 , G11B5/3903 , G11B5/3967 , Y10T29/49004
摘要： An actuator adapted to adjust the profile of a carrier supporting a bar relative to a lapping surface. The carrier including a plurality of spaced control or actuation points along the length of the carrier for adjusting the profile of the mounting surface of the carrier adapted to support a bar for lapping. The actuator adapted to actuate the carrier at the spaced actuation points and including a plurality of actuation members movably actuated via pressure supplied to the actuation members. The actuation members are supported in spaced staggered relation in chambers in a manifold for bidirectional actuation. The actuation members are spaced relative to the spaced actuation points and are supported relative to the manifold to provide precision actuation for incrementally adjusting the profile of the carrier.
摘要翻译： 适于调节相对于研磨表面支撑杆的载体的轮廓的致动器。 载体包括沿着载体的长度的多个间隔的控制或致动点，用于调节载体的安装表面的轮廓，其适于支撑用于研磨的条。 所述致动器适于在所述间隔的致动点处致动所述载体，并且包括通过供应到所述致动构件的压力可移动地致动的多个致动构件。 致动构件在歧管中的腔室中以间隔开的交错关系被支撑以用于双向致动。 致动构件相对于间隔的致动点间隔开并且相对于歧管被支撑，以提供用于逐渐调节载体轮廓的精确致动。
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