公开(公告)号：US20030159769A1

公开(公告)日：2003-08-28

申请号：US10372453

申请日：2003-02-24

Applicant: SHIBAURA MECHATRONICS CORPORATION

Inventor： Shinichi Ogimoto ,  Hirokazu Masuda

IPC: B32B031/00

CPC classification number: B32B38/1841 ,  B32B37/0046 ,  B32B37/12 ,  B32B2309/68 ,  B32B2309/70 ,  B32B2315/08 ,  B32B2457/20

Abstract: A substrate laminating apparatus has an upper stage for holding an upper glass substrate and a lower stage for holding a lower glass substrate, and which laminates together the upper glass substrate and the lower glass substrate in a condition that both of the substrates are positioned relative to each other. An image pickup device photographs position detecting marks on the upper and lower glass substrates, and a moving device changes a relative distance between the image pickup device and the upper/lower glass substrates. A data acquiring device acquires data about the relative distance between the upper/lower glass substrates and the image pickup device, and a control device controls the moving device based on data about the relative distance.

Abstract translation: 基板层叠装置具有用于保持上玻璃基板的上台和用于保持下玻璃基板的下台，并且在两个基板相对于两个基板定位的条件下将上玻璃基板和下玻璃基板层叠在一起 彼此。 图像拾取装置拍摄上玻璃基板和下玻璃基板上的位置检测标记，并且移动装置改变图像拾取装置和上/下玻璃基板之间的相对距离。 数据获取装置获取关于上下玻璃基板和图像拾取装置之间的相对距离的数据，并且控制装置基于关于相对距离的数据来控制移动装置。

公开(公告)号：US20040109124A1

公开(公告)日：2004-06-10

申请号：US10726401

申请日：2003-12-03

Applicant: Shibaura Mechatronics Corporation

Inventor： Hirokazu Masuda

IPC: G02F001/1339

CPC classification number: G02F1/1339 ,  B32B37/10 ,  B32B2305/55 ,  B32B2309/68 ,  B32B2457/20

Abstract: A bonding apparatus which bonds two substrates together with a sealing agent applied to, in the form of a frame, on one of the substrates. The apparatus comprises a first retaining table having a retaining surface which retains a first substrate thereon, a second retaining table opposed to the first retaining table and having a retaining surface which retains a second substrate thereon, a nonviscous elastic material provided on that part of the retaining surface of at least one of the retaining tables which retains the substrate thereon, and first and second drive sources which relatively drive the first and second retaining tables in the vertical direction so that the substrates on the respective retaining surfaces of the retaining tables are bonded together with the sealing agent.

Abstract translation: 一种粘合装置，其将两个基板与以框架的形式施加到其中一个基板上的密封剂结合在一起。 该装置包括第一保持台，其具有在其上保持第一基板的保持表面，与第一保持台相对的第二保持台，并具有在其上保持第二基板的保持表面，设置在该部分上的非粘性弹性材料 将保持基板的至少一个保持台的保持表面以及在垂直方向上相对地驱动第一和第二保持台的第一和第二驱动源，使得保持台的各个保持表面上的基板被接合 与密封剂一起。

公开(公告)号：US20040223284A1

公开(公告)日：2004-11-11

申请号：US10725983

申请日：2003-12-02

Applicant: Shibaura Mechatronics Corporation

Inventor： Munenori Iwami ,  Noboru Kuriyama ,  Koji Takeishi ,  Ikuo Hayafuji ,  Hirokazu Masuda

IPC: H02H001/00

CPC classification number: H01L21/6833 ,  G02F2001/133354 ,  H02N13/00

Abstract: There is disclosed an electrostatic attracting method in which a direct-current voltage is applied to an electrode disposed at a table formed of a dielectric material to attract/hold a substrate onto a holding surface of the table with an electrostatic force produced thereby, the method comprising a first step of applying a voltage having a predetermined polarity to the electrode to charge the holding surface with an electric charge having a polarity different from that applied to the electrode, a second step of holding the substrate in contact with the holding surface to prevent electric charges charged on the holding surface from disappearing, and a third step of applying a voltage having a polarity different from that applied in the first step to the electrode in a state in which the substrate contacts the holding surface to produce an electric charge having the same polarity as that charged at the holding surface in the first step on the holding surface of the table, and attracting/holding the substrate with the electric charge together with the electric charge charged on the holding surface in the first step.

Abstract translation: 公开了一种静电吸引方法，其中将直流电压施加到设置在由电介质材料制成的工作台上的电极上，以便由其产生的静电力将衬底吸引/保持在工作台的保持表面上，该方法 包括：向所述电极施加具有预定极性的电压的第一步骤，以与施加到所述电极的极性不同的极性的电荷对所述保持表面充电;第二步骤，保持所述基板与所述保持表面接触以防止 在保持表面上充电的电荷消失，第三步骤是在基板与保持表面接触的状态下将与第一步骤中施加的极性不同的电压施加到电极，以产生具有 与在桌子的保持表面上的第一步骤中的保持表面处的相同极性，并且吸引 在第一步骤中，将带有电荷的基板与充电在保持表面上的电荷一起保持。