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1.发明授权Probe apparatus with optical length-measuring unit and probe testing method 失效具有光学长度测量单元和探头测试方法的探头设备公开(公告)号：US07221177B2
公开(公告)日：2007-05-22
申请号：US11184796
申请日：2005-07-20
IPC分类号： G01R31/02
CPC分类号： G01R31/2891 , G01R31/2887
摘要： A probe apparatus with control-position detection means is provided for testing an electrical characteristic of a to-be-tested object formed on a substrate W. The probe apparatus includes a prober chamber, a susceptor provided in the prober chamber for placing thereon a to-be-tested object, and a moving mechanism for moving the susceptor in X-, Y-, Z- and θ-directions. The probe apparatus further includes a probe card having a plurality of probes and opposing the susceptor, and a first optical length-measuring unit. The first length-measuring unit emits light to the surface of the to-be-tested object placed on the susceptor, and detects the Z-directional position of the to-be-tested object based on the light reflected from the object. The probe apparatus can have a second length-measuring unit.
摘要翻译： 提供了一种具有控制位置检测装置的探针装置，用于测试形成在基片W上的待测物体的电特性。探针装置包括探针室，设置在探针室中的基座， 以及用于在X，Y，Z和θ方向上移动基座的移动机构。 探针装置还包括具有多个探针并与基座对置的探针卡和第一光学长度测量单元。 第一长度测量单元向放置在基座上的被测试物体的表面发光，并且基于从物体反射的光检测被测试对象的Z方向位置。 探针装置可以具有第二长度测量单元。
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2.发明申请Probe apparatus with optical length-measuring unit and probe testing method 失效具有光学长度测量单元和探头测试方法的探头设备公开(公告)号：US20050253613A1
公开(公告)日：2005-11-17
申请号：US11184796
申请日：2005-07-20
CPC分类号： G01R31/2891 , G01R31/2887
摘要： A probe apparatus with control-position detection means is provided for testing an electrical characteristic of a to-be-tested object formed on a substrate W. The probe apparatus includes a prober chamber, a susceptor provided in the prober chamber for placing thereon a to-be-tested object, and a moving mechanism for moving the susceptor in X-, Y-, Z- and θ-directions. The probe apparatus further includes a probe card having a plurality of probes and opposing the susceptor, and a first optical length-measuring unit. The first length-measuring unit emits light to the surface of the to-be-tested object placed on the susceptor, and detects the Z-directional position of the to-be-tested object based on the light reflected from the object. The probe apparatus can have a second length-measuring unit.
摘要翻译： 提供了一种具有控制位置检测装置的探针装置，用于测试形成在基片W上的待测物体的电特性。探针装置包括探针室，设置在探针室中的基座， 以及用于在X，Y，Z和θ方向上移动基座的移动机构。 探针装置还包括具有多个探针并与基座对置的探针卡和第一光学长度测量单元。 第一长度测量单元向放置在基座上的被测试物体的表面发光，并且基于从物体反射的光检测被测试对象的Z方向位置。 探针装置可以具有第二长度测量单元。
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