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    Probe apparatus with optical length-measuring unit and probe testing method
    1.
    发明授权
    Probe apparatus with optical length-measuring unit and probe testing method 失效
    具有光学长度测量单元和探头测试方法的探头设备

    公开(公告)号：US07221177B2

    公开(公告)日：2007-05-22

    申请号：US11184796

    申请日：2005-07-20

    申请人： Shigekazu Komatsu ,  Takanori Hyakudomi ,  Hiromi Chaya ,  Takahisa Hayashi ,  Yukihide Shigeno

    发明人： Shigekazu Komatsu ,  Takanori Hyakudomi ,  Hiromi Chaya ,  Takahisa Hayashi ,  Yukihide Shigeno

    IPC分类号： G01R31/02

    CPC分类号： G01R31/2891 ,  G01R31/2887

    摘要： A probe apparatus with control-position detection means is provided for testing an electrical characteristic of a to-be-tested object formed on a substrate W. The probe apparatus includes a prober chamber, a susceptor provided in the prober chamber for placing thereon a to-be-tested object, and a moving mechanism for moving the susceptor in X-, Y-, Z- and θ-directions. The probe apparatus further includes a probe card having a plurality of probes and opposing the susceptor, and a first optical length-measuring unit. The first length-measuring unit emits light to the surface of the to-be-tested object placed on the susceptor, and detects the Z-directional position of the to-be-tested object based on the light reflected from the object. The probe apparatus can have a second length-measuring unit.

    摘要翻译： 提供了一种具有控制位置检测装置的探针装置，用于测试形成在基片W上的待测物体的电特性。探针装置包括探针室，设置在探针室中的基座， 以及用于在X，Y，Z和θ方向上移动基座的移动机构。 探针装置还包括具有多个探针并与基座对置的探针卡和第一光学长度测量单元。 第一长度测量单元向放置在基座上的被测试物体的表面发光，并且基于从物体反射的光检测被测试对象的Z方向位置。 探针装置可以具有第二长度测量单元。

    Probe apparatus with optical length-measuring unit and probe testing method
    2.
    发明申请
    Probe apparatus with optical length-measuring unit and probe testing method 失效
    具有光学长度测量单元和探头测试方法的探头设备

    公开(公告)号：US20050253613A1

    公开(公告)日：2005-11-17

    申请号：US11184796

    申请日：2005-07-20

    申请人： Shigekazu Komatsu ,  Takanori Hyakudomi ,  Hiromi Chaya ,  Takahisa Hayashi ,  Yukihide Shigeno

    发明人： Shigekazu Komatsu ,  Takanori Hyakudomi ,  Hiromi Chaya ,  Takahisa Hayashi ,  Yukihide Shigeno

    IPC分类号： G01R1/06 ,  G01R31/28 ,  H01L21/66 ,  G01R31/02

    CPC分类号： G01R31/2891 ,  G01R31/2887

    摘要： A probe apparatus with control-position detection means is provided for testing an electrical characteristic of a to-be-tested object formed on a substrate W. The probe apparatus includes a prober chamber, a susceptor provided in the prober chamber for placing thereon a to-be-tested object, and a moving mechanism for moving the susceptor in X-, Y-, Z- and θ-directions. The probe apparatus further includes a probe card having a plurality of probes and opposing the susceptor, and a first optical length-measuring unit. The first length-measuring unit emits light to the surface of the to-be-tested object placed on the susceptor, and detects the Z-directional position of the to-be-tested object based on the light reflected from the object. The probe apparatus can have a second length-measuring unit.

    摘要翻译： 提供了一种具有控制位置检测装置的探针装置，用于测试形成在基片W上的待测物体的电特性。探针装置包括探针室，设置在探针室中的基座， 以及用于在X，Y，Z和θ方向上移动基座的移动机构。 探针装置还包括具有多个探针并与基座对置的探针卡和第一光学长度测量单元。 第一长度测量单元向放置在基座上的被测试物体的表面发光，并且基于从物体反射的光检测被测试对象的Z方向位置。 探针装置可以具有第二长度测量单元。

    Probe mark reading device and probe mark reading method
    3.
    发明授权
    Probe mark reading device and probe mark reading method 有权
    探针标记读取装置和探针标记读取方法

    公开(公告)号：US07224175B2

    公开(公告)日：2007-05-29

    申请号：US11355928

    申请日：2006-02-17

    申请人： Hiromi Chaya ,  Takahisa Hayashi ,  Shigekazu Komatsu

    发明人： Hiromi Chaya ,  Takahisa Hayashi ,  Shigekazu Komatsu

    IPC分类号： G01R31/02 ,  G06K9/00

    CPC分类号： G06T7/0004 ,  G01R31/2891 ,  G01R31/311 ,  G06T2207/30148

    摘要： A probe mark reading device for reading probe marks stormed on electrode pads of semiconductor chips contained in a semiconductor wafer (90), comprising a CCD camera (20) for taking an image of the semiconductor wafer (90) and outputting the image as an image signal Si, an optical unit (21) for optically enlarging a location to be photographed by the CCD camera (20), a light source (30) for illuminating the location to be photographed by the CCD camera (20) with a flash of light generated for a short period of time from when a flash signal Sf is provided, an X-Y stage (40) capable of changing a position to be photographed by the CCD camera (20) based on a motor control signal Sm by moving a mounted semiconductor wafer (90) in an X-direction and a Y-direction, and a computer (10) for providing control and saving the images after receiving and trimming the image signal Si. With the above configuration, it is possible to read probe marks in a short time without a user having to expend much time or effort.

    摘要翻译： 一种用于读取在包含在半导体晶片（90）中的半导体芯片的电极焊盘上暴露的探针标记的探针标记读取装置，包括用于拍摄半导体晶片（90）的图像并将图像作为图像输出的CCD照相机（20） 信号Si，用于光学地放大由CCD照相机（20）拍摄的位置的光学单元（21），用于利用闪光灯照亮由CCD照相机（20）拍摄的位置的光源（30） 从提供闪光信号Sf的短时间产生的XY台（40），通过移动安装的半导体晶片，能够基于电机控制信号Sm改变由CCD照相机（20）拍摄的位置的XY台 （90）在X方向和Y方向上，以及计算机（10），用于在接收和修整图像信号Si之后提供控制和保存图像。 利用上述配置，可以在短时间内读取探针标记，而无需用户花费大量时间或精力。

    Probe mark reading device and probe mark reading method
    4.
    发明申请
    Probe mark reading device and probe mark reading method 有权
    探针标记读取装置和探针标记读取方法

    公开(公告)号：US20060139628A1

    公开(公告)日：2006-06-29

    申请号：US11355928

    申请日：2006-02-17

    申请人： Hiromi Chaya ,  Takahisa Hayashi ,  Shigekazu Komatsu

    发明人： Hiromi Chaya ,  Takahisa Hayashi ,  Shigekazu Komatsu

    IPC分类号： G01N21/88

    CPC分类号： G06T7/0004 ,  G01R31/2891 ,  G01R31/311 ,  G06T2207/30148

    摘要： A probe mark reading device for reading probe marks stormed on electrode pads of semi conductor chips contained in a semiconductor wafer (90), comprising a CCD camera (20) for taking an image of the semiconductor wafer (90) and outputting the image as an image signal Si, an optical unit (21) for optically enlarging a location to be photographed by the CCD camera (20), a light source (30) for illuminating the location to be photographed by the CCD camera (20) with a flash of light generated for a short period of time from when a flash signal Sf is provided, an X-Y stage (40) capable of changing a position to be photographed by the CCD camera (20) based on a motor control signal Sm by moving a mounted semiconductor wafer (90) in an X-direction and a Y-direction, and a computer (10) for providing control and saving the images after receiving and trimming the image signal Si. With the above configuration, it is possible to read probe marks in a short time without a user having to expend much time or effort.

    摘要翻译： 一种用于读取在半导体晶片（90）中包含的半导体芯片的电极焊盘上暴露的探针标记的探针标记读取装置，包括用于拍摄半导体晶片（90）的图像的CCD照相机（20），并将该图像输出为 图像信号Si，用于光学地放大由CCD照相机（20）拍摄的位置的光学单元（21），用于照射由CCD照相机（20）拍摄的位置的光源（30），其中闪光 从提供闪光信号Sf的短时间内产生的光，能够通过移动安装的半导体，能够基于电机控制信号Sm改变由CCD照相机（20）拍摄的位置的XY平台（40） 晶片（90）在X方向和Y方向上，以及计算机（10），用于在接收和修整图像信号Si之后提供控制和保存图像。 利用上述配置，可以在短时间内读取探针标记，而无需用户花费大量时间或精力。

    Probe mark reading device and probe mark reading method
    5.
    发明授权
    Probe mark reading device and probe mark reading method 有权
    探针标记读取装置和探针标记读取方法

    公开(公告)号：US07026832B2

    公开(公告)日：2006-04-11

    申请号：US10681271

    申请日：2003-10-09

    申请人： Hiromi Chaya ,  Takahisa Hayashi ,  Shigekazu Komatsu

    发明人： Hiromi Chaya ,  Takahisa Hayashi ,  Shigekazu Komatsu

    IPC分类号： G01R31/02 ,  G06K9/00

    CPC分类号： G06T7/0004 ,  G01R31/2891 ,  G01R31/311 ,  G06T2207/30148

    摘要： A probe mark reading device for reading probe marks stormed on electrode pads of semiconductor chips contained in a semiconductor wafer (90), comprising a CCD camera (20) for taking an image of the semiconductor wafer (90) and outputting the image as an image signal Si, an optical unit (21) for optically enlarging a location to be photographed by the CCD camera (20), a light source (30) for illuminating the location to be photographed by the CCD camera (20) with a flash of light generated for a short period of time from when a flash signal Sf is provided, an X-Y stage (40) capable of changing a position to be photographed by the CCD camera (20) based on a motor control signal Sm by moving a mounted semiconductor wafer (90) in an X-direction and a Y-direction, and a computer (10) for providing control and saving the images after receiving and trimming the image signal Si. With the above configuration, it is possible to read probe marks in a short time without a user having to expend much time or effort.

    摘要翻译： 一种用于读取在包含在半导体晶片（90）中的半导体芯片的电极焊盘上暴露的探针标记的探针标记读取装置，包括用于拍摄半导体晶片（90）的图像并将图像作为图像输出的CCD照相机（20） 信号Si，用于光学地放大由CCD照相机（20）拍摄的位置的光学单元（21），用于以CCD闪光灯照亮由CCD照相机（20）拍摄的位置的光源（30） 从提供闪光信号Sf的短时间产生的XY台（40），通过移动安装的半导体晶片，能够基于电机控制信号Sm改变由CCD照相机（20）拍摄的位置的XY台 （90）在X方向和Y方向上，以及计算机（10），用于在接收和修整图像信号Si之后提供控制和保存图像。 利用上述配置，可以在短时间内读取探针标记，而无需用户花费大量时间或精力。

    Modulation circuit for a digital radio communications apparatus using a phase shifted DQPSK modulation system
    8.
    发明授权
    Modulation circuit for a digital radio communications apparatus using a phase shifted DQPSK modulation system 失效
    用于使用相移DQPSK调制系统的数字无线电通信装置的调制电路

    公开(公告)号：US5363410A

    公开(公告)日：1994-11-08

    申请号：US888028

    申请日：1992-05-26

    申请人： Takahisa Hayashi

    发明人： Takahisa Hayashi

    IPC分类号： H04L27/20 ,  H03C3/02

    CPC分类号： H04L27/2046

    摘要： A modulation circuit includes a mapping position detector as well as a circuit for differentially phase coding a plurality of separated data streams. The differentially phase coding circuit is adapted to differentially phase code the plurality of data streams for each pulse time and generate a coded signal containing amplitude information. The mapping position detector detects the phase mapping position of the coded signal based on the amplitude information in the coded signal which is output from the differentially phase coding circuit. Information representing the detected phase mapping position is supplied to the differentially phase coding circuit so as to achieve a differential phase coding at a pulse time following one pulse time.

    摘要翻译： 调制电路包括映射位置检测器以及用于对多个分离数据流进行差分相位编码的电路。 差分相位编码电路适于在每个脉冲时间对多个数据流进行差分相位编码，并产生包含振幅信息的编码信号。 映射位置检测器基于从差分相位编码电路输出的编码信号中的振幅信息，检测编码信号的相位映射位置。 表示检测到的相位映射位置的信息被提供给差分相位编码电路，以便在一个脉冲时间之后的脉冲时间实现差分相位编码。

    Ferroelectric memory device and manufacturing method thereof
    9.
    发明申请
    Ferroelectric memory device and manufacturing method thereof 失效

    公开(公告)号：US20060267057A1

    公开(公告)日：2006-11-30

    申请号：US11441195

    申请日：2006-05-26

    申请人： Takahisa Hayashi

    发明人： Takahisa Hayashi

    IPC分类号： H01L29/94

    CPC分类号： H01L27/105 ,  H01L21/76834 ,  H01L21/7687 ,  H01L21/76895 ,  H01L27/11502 ,  H01L27/11507 ,  H01L27/11509 ,  H01L28/57 ,  H01L28/65 ,  H01L28/75

    摘要： A ferroelectric memory device includes a semiconductor substrate, a first insulating film, a plurality of first and second plugs which extend through the first insulating film, conductive hydrogen barrier films, ferroelectric capacitor structural bodies, a first insulating hydrogen barrier film provided so as to cover the ferroelectric capacitor structural bodies, a second insulating film, local wirings extending on the second insulating film, a second insulating hydrogen barrier film which covers the local wirings, a third insulating film, third plugs which extend through the third insulating film so as to connect to their corresponding conductive hydrogen barrier films, and a first wiring layer extending on the third insulating film.