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公开(公告)号：US4719755A
公开(公告)日：1988-01-19
申请号：US764117
申请日：1985-08-09
申请人： Shigemi Nagatomo , Minoru Komori , Tsutomu Sakuma , Noboru Kagawa , Takashi Komakine , Toshinori Iwasaki , Akira Kudo
发明人： Shigemi Nagatomo , Minoru Komori , Tsutomu Sakuma , Noboru Kagawa , Takashi Komakine , Toshinori Iwasaki , Akira Kudo
CPC分类号： F02G1/055 , F02G1/053 , F02G1/057 , F02G2243/00 , F02G2243/30 , F02G2244/00 , F02G2244/10 , F02G2255/00 , F02G2255/20 , F02G2256/00 , F02G2257/00 , F02G2270/85
摘要： A Stirling engine which has an expansion cylinder and a compression cylinder with an expansion piston and a compression piston, respectively, that have a fixed phase difference between them, where the expansion cylinder and the compression cylinder are connected through a heater, a regenerator, and a cooler, a fixed amount of working fluid is sealed in the expansion cylinder and a compression cylinder, and the engine is driven by heating or cooling the working fluid with the heater or the cooler, and in the above Stirling engine, the heater for heating the working fluid includes a combustion chamber attached to the expansion cylinder, a burner for jetting a combustible substance into the combustion chamber, a plurality of heat exchanger pipes for forming a plurality of passages for the working fluid to connect through between the expansion cylinder and the regenerator by turning back on themselves, in order to heat the working fluid with the high temperature gas from the burner, and a cylinder head for installing the plurality of heat exchanger pipes, in a concentric configuration with approximately equal distance apart and with an inclination of predetermined angle, on the expansion cylinder, in order to make equal the lengths of the passages for the working fluid between the expansion cylinder and the regenerator.
摘要翻译： 一种斯特林发动机，其具有分别具有固定相位差的膨胀活塞和压缩活塞的膨胀气缸和压缩气缸，膨胀气缸和压缩气缸通过加热器，再生器和再生器连接， 冷却器中，固定量的工作流体被密封在膨胀缸和压缩缸中，并且通过用加热器或冷却器加热或冷却工作流体来驱动发动机，并且在上述斯特林发动机中，用于加热的加热器 工作流体包括附接到膨胀缸的燃烧室，用于将可燃物质喷射到燃烧室中的燃烧器，多个热交换器管道，用于形成用于工作流体的多个通道，以连接在膨胀缸和 再生器通过回转自身，以便用来自燃烧器的高温气体加热工作流体，以及a 气缸盖，用于将多个热交换器管以同心的方式分隔开并具有预定角度的倾斜角度安装在膨胀圆筒上，以便使膨胀之间的工作流体通道的长度相等 气缸和再生器。
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2.发明授权Catalyst carriers for purification of waste gas and process for preparing the same 失效用于净化废气的催化剂载体及其制备方法
公开(公告)号：US4414139A
公开(公告)日：1983-11-08
申请号：US428269
申请日：1982-09-29
CPC分类号： B01J23/58 , B01D53/864 , B01D53/865
摘要： Disclosed are a catalyst carrier for purification of waste gas which comprises a carrier comprising a calcined clay material composed of 1 to 5% by weight of lithium oxide (Li.sub.2 O), not less than 20% by weight of aluminum oxide (Al.sub.2 O.sub.3) and not less than 60% by weight of silicon dioxide (SiO.sub.2), the total thereof being substantially 100; an aluminum oxide supported on the surface of the said clay material; and a platinum group element having further supported on said aluminum oxide; and a process for preparing the same.
摘要翻译： 公开了一种用于净化废气的催化剂载体，其包括载体，其包含由1-5重量％的氧化锂（Li 2 O）组成的煅烧粘土材料，不小于20重量％的氧化铝（Al 2 O 3），并且不少于 超过60重量％的二氧化硅（SiO 2），其总量基本上为100; 负载在所述粘土材料的表面上的氧化铝; 以及进一步负载在所述氧化铝上的铂族元素; 及其制备方法。
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3.发明授权Electron beam measurement method and electron beam irradiation processing device 有权电子束测量方法和电子束照射处理装置公开(公告)号：US06657212B2
公开(公告)日：2003-12-02
申请号：US09725270
申请日：2000-11-29
申请人： Minoru Komori , Masanoru Yamaguchi
发明人： Minoru Komori , Masanoru Yamaguchi
IPC分类号： H01J3700
CPC分类号： G01R19/0061 , H01J7/44 , H01J33/00
摘要： An electron beam irradiation processing device including an electron beam tube and a current detection unit disposed outside of the window of the electron beam tube. The electron beam tube is adapted to radiate electron beams and has a window and an associated power-source unit that provides a power source. The current detection unit includes at least one of a conductor and a semiconductor covered by an insulating film, and an electron beam level measurement unit having a current measurement unit that measures the current flowing through the current detection unit. The amount of electron beams output from the electron beam tube is controlled by controlling the power-source unit as a function of the current flowing through the current detection unit. In addition, a method of measuring amount of electron beams radiated from an electron beam tube with a window including the steps of providing a current detection unit and measuring amount of electron beams radiated from the electron beam tube by measuring the current flowing through the current detection unit.
摘要翻译： 一种电子束照射处理装置，包括设置在电子束管的窗口外的电子束管和电流检测单元。 电子束管适于辐射电子束，并具有提供电源的窗口和相关联的电源单元。 电流检测单元包括由绝缘膜覆盖的导体和半导体中的至少一个，以及电子束电平测量单元，其具有测量流过电流检测单元的电流的电流测量单元。 通过控制电源单元作为流过电流检测单元的电流的函数来控制从电子束管输出的电子束的量。 另外，测量从具有窗口的电子束管辐射的电子束量的方法，包括以下步骤：通过测量流过电流检测的电流来提供电流检测单元和测量从电子束管辐射的电子束的量 单元。
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公开(公告)号：US06741044B2
公开(公告)日：2004-05-25
申请号：US10448013
申请日：2003-05-30
申请人： Minoru Komori , Hirotoshi Sugimoto
发明人： Minoru Komori , Hirotoshi Sugimoto
IPC分类号： G05F100
CPC分类号： H05B41/325
摘要： When a lamp is turned on and a wafer is placed on a light exposure surface, a controlling unit opens a shutter plate so that light is emitted on the light exposure surface and an illuminometer receives the light. An accumulated light amount measuring unit converts illumination intensity measured by the illuminometer to an accumulated light amount. The controlling unit turns off the lamp by sending a lamp OFF signal to a power supplying unit. At the same time, the controlling unit sends a shutter closing command to the power supplying unit. After the shutter is closed, the controlling unit relight the lamp by sending a lamp ON signal to the power supplying unit.
摘要翻译： 当灯打开并且晶片被放置在曝光表面上时，控制单元打开快门板，使得光在曝光表面上发射，并且照度计接收光。 累积光量测量单元将由照度计测量的照明强度转换为累积光量。 控制单元通过向供电单元发送灯关闭信号来关闭灯。 同时，控制单元向供电单元发送快门关闭命令。 在快门关闭之后，控制单元通过向供电单元发送灯开启信号来重新点亮灯。
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公开(公告)号：US4626197A
公开(公告)日：1986-12-02
申请号：US716457
申请日：1985-03-27
摘要： A wick temperature control unit is provided for controlling the temperature of a wick having the lower end portion dipped in a fuel tank for storing liquid fuel and the upper end portion inserted in a combustion chamber through a narrow path. The wick soaks up the liquid fuel by capillary action in the combustion chamber and evaporates the liquid fuel therein. The wick temperature control unit holds the temperature of the upper end portion of the wick in accordance with a given heating power state, thereby contributing to widen a heating power adjustment range.
摘要翻译： 设置芯温控制单元，用于控制浸渍在用于储存液体燃料的燃料箱中的下端部的芯的温度，以及通过狭窄的路径插入燃烧室的上端部。 油缸通过毛细作用在燃烧室中吸收液体燃料，并使其中的液体燃料蒸发。 芯温控制单元根据给定的加热功率状态保持芯的上端部的温度，有助于加宽加热功率调节范围。
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6.发明授权Process for increasing thermostability of a resist through electron beam exposure 失效通过电子束曝光提高抗蚀剂的热稳定性的方法
公开(公告)号：US6087071A
公开(公告)日：2000-07-11
申请号：US394346
申请日：1999-09-13
申请人： Minoru Komori
发明人： Minoru Komori
CPC分类号： G03F7/38 , G03F7/40 , H01B3/36 , Y10S430/143
摘要： A process for curing a resist in which a resist is cured quickly and with high efficiency without gas, which is formed by irradiation with electron beams with which the resist is irradiated for curing, remaining in it and thereby increase its thermostability, is achieved by the following process steps:a first, the resist is irradiated with electron beams and kept at a temperature such that gas is produced and released in the resist, but no gas bubbles are formed in the resist;second, the resist is heated so that the gas produced in the first process step is dissipated to the outside from the resist; andthird, the resist is irradiated with electron beams so that macromolecules are formed in the resist and the resist is cured.
摘要翻译： 一种固化抗蚀剂的方法，其中抗蚀剂快速且高效率地固化，而不用气体固化，这是通过用照射抗蚀剂照射固化的电子束照射而形成的，保留在其中并由此增加其热稳定性，这是通过 以下处理步骤：首先，用电子束照射抗蚀剂，并保持在气体在抗蚀剂中产生和释放的温度，但在抗蚀剂中不形成气泡; 第二，加热抗蚀剂，使得在第一工艺步骤中产生的气体从抗蚀剂消散到外部; 第三，用电子束照射抗蚀剂，使得在抗蚀剂中形成大分子，并且抗蚀剂固化。
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公开(公告)号：US4666398A
公开(公告)日：1987-05-19
申请号：US906087
申请日：1986-09-11
申请人： Katsuyoshi Kumazawa , Minoru Komori
发明人： Katsuyoshi Kumazawa , Minoru Komori
摘要： Large numbers of vent holes are respectively formed in inner and outer flame cylinders defining an annular combustion chamber to supply air thereto. A total opening area of the vent holes formed in the outer flame cylinder is greater than that of the vent holes formed in the inner flame cylinder. As a result, the heat capacity of the outer flame cylinder is smaller than that of the inner flame cylinder. During combustion, the outer flame cylinder is heated to red-hot. A plurality of projections are formed on the outer wall surface of the inner flame cylinder to allow complete combustion of a fuel vapor.
摘要翻译： 在内外火焰气瓶中分别形成有大量的通气孔，其限定了环形燃烧室以向其供应空气。 形成在外火焰筒中的通气孔的总开口面积大于形成在内火焰气缸中的通气孔的总开口面积。 结果，外火焰筒的热容量小于内火焰筒的热容量。 在燃烧期间，外部火焰筒被加热至红热。 在内火焰筒的外壁表面上形成有多个突起，以允许燃料蒸气完全燃烧。
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