公开(公告)号：US07538888B2

公开(公告)日：2009-05-26

申请号：US11745749

申请日：2007-05-08

申请人： Shinichi Hara ,  Naoyuki Taketomi ,  Makoto Abbe

发明人： Shinichi Hara ,  Naoyuki Taketomi ,  Makoto Abbe

IPC分类号： G01B11/02

CPC分类号： G01S17/74 ,  G01S17/42 ,  G01S17/66

摘要： A method for estimating an absolute distance between a tracking laser interferometer and a retroreflector is provided. The tracking laser interferometer includes the retroreflector for reflecting and returning an incident measurement light in an incident direction and a two-axis rotating mechanism for rotationally moving in an exit direction of the measurement light so that optical axes of the measurement light and return light are collimated.

摘要翻译： 提供了用于估计跟踪激光干涉仪和后向反射器之间的绝对距离的方法。 跟踪激光干涉仪包括用于在入射方向上反射和返回入射测量光的后向反射器和用于在测量光的出射方向上旋转移动的两轴旋转机构，使得测量光和返回光的光轴被准直 。

公开(公告)号：US20070268494A1

公开(公告)日：2007-11-22

申请号：US11745749

申请日：2007-05-08

申请人： Shinichi Hara ,  Naoyuki Taketomi ,  Makoto Abbe

发明人： Shinichi Hara ,  Naoyuki Taketomi ,  Makoto Abbe

IPC分类号： G01B11/02

CPC分类号： G01S17/74 ,  G01S17/42 ,  G01S17/66

摘要： To provide a method for estimating an absolute distance L between a tracking laser interferometer and a retroreflector 70, the tracking laser interferometer including; the retroreflector 70 for reflecting and returning incident measurement light A in an incident direction; and a two-axis rotating mechanism 40 for rotationally moving in an exit direction of the measurement light A so that optical axes of the measurement light A and return light B are collimated, which outputs a measurement value according to an increase or decrease in the distance between the interferometer and the retroreflector 70, wherein the absolute distance L between the interferometer and the retroreflector 70 is estimated by performing arithmetic operation based on an angular position variation θ2 of the two-axis rotating mechanism 40 when a deviation amount d of the return light B from the retroreflector 70 relative to a predetermined position is given as a predetermined value d2. This enables an appropriate increase or decrease of the control amount of a tracking control according to a distance between the interferometer and the retroreflector without forcing an operator to perform a troublesome origin return operation and adding an expensive absolute distance sensor.

摘要翻译： 为了提供一种用于估计跟踪激光干涉仪和后向反射器70之间的绝对距离L的方法，所述跟踪激光干涉仪包括： 用于在入射方向上反射和返回入射测量光A的后向反射器70; 以及用于沿测量光A的出射方向旋转移动的双轴旋转机构40，使得测量光A和返回光B的光轴被准直，其根据距离的增减来输出测量值 在干涉仪和后向反射器70之间，其中通过基于两轴旋转机构40的角度位置变化θ2进行算术运算来估计干涉仪和后向反射器70之间的绝对距离L. 来自后向反射器70的返回光B相对于预定位置的偏差量d被给定为预定值d 2。 这使得能够根据干涉仪和后向反射器之间的距离适当地增加或减少跟踪控制的控制量，而不会强迫操作者执行麻烦的原点返回操作并添加昂贵的绝对距离传感器。

公开(公告)号：US20080049211A1

公开(公告)日：2008-02-28

申请号：US11842489

申请日：2007-08-21

申请人： Yasushi Ueshima ,  Naoyuki Taketomi ,  Makoto Abbe

发明人： Yasushi Ueshima ,  Naoyuki Taketomi ,  Makoto Abbe

IPC分类号： G01C3/08

CPC分类号： G01B9/02072 ,  G01B9/02049 ,  G01B2290/15 ,  G01S7/497

摘要： An optical-axis deflection type laser interferometer includes a reference ball serving as a measurement reference, a retroreflecting means disposed at an object to be measured, a laser interferometer length measuring apparatus that outputs a measurement value according to an increase or a decrease in distance between the apparatus and the retroreflecting means, and a rotational mechanism that rotates a beam projected from the laser interferometer length measuring apparatus around the reference ball. The thus structured laser interferometer measures a distance between the laser interferometer and the retroreflecting means that makes an optical axis of an outgoing beam projected from the laser interferometer length measuring apparatus mounted on the rotational mechanism and an optical axis of a return beam returned to the laser interferometer length measuring apparatus parallel to each other, based on center coordinates of the reference ball. The laser interferometer is characterized by additionally including a displacement gauge that measures an error caused by a relative motion between the reference ball and the laser interferometer length measuring apparatus, and a rectilinear movement mechanism that displaces these in a direction of an optical axis of a measurement beam with respect to the reference ball while maintaining a relative positional relationship between the laser interferometer length measuring apparatus and the displacement gauge. With this structure, it becomes possible to calibrate the displacement gauge used to correct an error in the direction of the optical axis resulting from the motion accuracy of the two-axis rotational mechanism with respect to the reference ball of the optical-axis deflection type laser interferometer, without preparing a special calibrating device, on the operating instrument. As a result, traceability is secured.

公开(公告)号：US07408650B2

公开(公告)日：2008-08-05

申请号：US11842489

申请日：2007-08-21

申请人： Yasushi Ueshima ,  Naoyuki Taketomi ,  Makoto Abbe

发明人： Yasushi Ueshima ,  Naoyuki Taketomi ,  Makoto Abbe

IPC分类号： G01B11/02

CPC分类号： G01B9/02072 ,  G01B9/02049 ,  G01B2290/15 ,  G01S7/497

摘要： An optical-axis deflection type laser interferometer includes a reference ball serving as a measurement reference, a retroreflecting means disposed at an object to be measured, a laser interferometer length measuring apparatus outputting a measurement value between the apparatus and the retroreflecting means, and a rotational mechanism that rotates a beam projected from the laser interferometer length measuring apparatus around the reference ball. The laser interferometer additionally includes a displacement gauge that measures an error caused by a relative motion between the reference ball and the laser interferometer length measuring apparatus, and a rectilinear movement mechanism that displaces these in a direction of an optical axis of a measurement beam with respect to the reference ball while maintaining a relative positional relationship between the laser interferometer length measuring apparatus and the displacement gauge. With this structure, calibrating the displacement gauge without preparing a special calibrating device becomes possible, thereby securing traceability thereby securing traceability.

摘要翻译： 光轴偏转型激光干涉仪包括用作测量基准的参考球，设置在待测物体处的回射装置，输出装置与回射装置之间的测量值的激光干涉仪长度测量装置，以及旋转 将从激光干涉仪长度测量装置投射的光束旋转到参考球周围的机构。 激光干涉仪还包括测量由参考球和激光干涉仪长度测量装置之间的相对运动引起的误差的位移计，以及直线运动机构，其在测量光束的光轴的方向上相对于 并保持激光干涉仪长度测量装置与位移计之间的相对位置关系。 利用这种结构，可以在不准备特殊的校准装置的情况下校准位移计，从而确保可追溯性，从而确保可追溯性。

公开(公告)号：US07599070B2

公开(公告)日：2009-10-06

申请号：US12031335

申请日：2008-02-14

申请人： Naoyuki Taketomi ,  Makoto Abbe

发明人： Naoyuki Taketomi ,  Makoto Abbe

IPC分类号： G01B9/02 ,  G01B11/02

CPC分类号： G01S7/4811 ,  G01S17/42 ,  G01S17/66 ,  G01S17/74

摘要： An optical axis polarization type laser interferometer including a reference sphere which forms a reference of measurement, a retro-reflecting means disposed at a measurement object, a laser interference measuring apparatus for outputting a measurement value corresponding to an increase or a decrease in the distance to and from the retro-reflecting means; and a two-axis turning mechanism for turning an emission beam of the corresponding laser interference measuring apparatus centering around the reference sphere, which measures, with the center coordinates of the reference sphere used as the reference, the distance to and from the retro-reflecting means where the optical axes of the emission beam from the laser interference measuring apparatus mounted on the two-axis turning mechanism and a return beam become parallel to each other, wherein the fixing portion of the first axis turning mechanism installed at the base part of the apparatus is disposed at the inner circumference thereof, the reference sphere is placed at the fixing portion thereof, and at the same time, the moving portion of the first axis turning mechanism is placed at the outer circumference of the fixing portion, and the second axis turning mechanism is mounted on the moving portion thereof. Therefore, complexities in mechanism design can be simplified to a large extent with respect to the first axis turning mechanism that composes the two-axis turning mechanism.

摘要翻译： 一种光轴偏振型激光干涉仪，包括形成测量基准的参考球体，设置在测量对象物上的回射装置，激光干涉测量装置，用于输出对应于距离的增加或减小的测量值至 和来自反光装置; 以及用于以相对于作为基准的基准球的中心坐标为基准的以参考球为中心的相应的激光干涉测量装置的发射光束进行转动的两轴转动机构， 意味着来自安装在双轴转动机构上的激光干涉测量装置的发射光束的光轴和返回光束彼此平行，其中安装在第一轴转动机构的基部的第一轴转动机构的固定部分 装置设置在其内周，参考球放置在其固定部分处，同时第一轴转动机构的移动部分位于固定部分的外周，第二轴线 转动机构安装在其运动部分上。 因此，相对于构成双轴转动机构的第一轴转动机构，机构设计的复杂性可以在很大程度上简化。

公开(公告)号：US20080198387A1

公开(公告)日：2008-08-21

申请号：US12031335

申请日：2008-02-14

申请人： Naoyuki Taketomi ,  Makoto Abbe

发明人： Naoyuki Taketomi ,  Makoto Abbe

IPC分类号： G01B9/02

CPC分类号： G01S7/4811 ,  G01S17/42 ,  G01S17/66 ,  G01S17/74

摘要： An optical axis polarization type laser interferometer including a reference sphere which forms a reference of measurement, a retro-reflecting means disposed at a measurement object, a laser interference measuring apparatus for outputting a measurement value corresponding to an increase or a decrease in the distance to and from the retro-reflecting means; and a two-axis turning mechanism for turning an emission beam of the corresponding laser interference measuring apparatus centering around the reference sphere, which measures, with the center coordinates of the reference sphere used as the reference, the distance to and from the retro-reflecting means where the optical axes of the emission beam from the laser interference measuring apparatus mounted on the two-axis turning mechanism and a return beam become parallel to each other, wherein the fixing portion of the first axis turning mechanism installed at the base part of the apparatus is disposed at the inner circumference thereof, the reference sphere is placed at the fixing portion thereof, and at the same time, the moving portion of the first axis turning mechanism is placed at the outer circumference of the fixing portion, and the second axis turning mechanism is mounted on the moving portion thereof. Therefore, complexities in mechanism design can be simplified to a large extent with respect to the first axis turning mechanism that composes the two-axis turning mechanism.

摘要翻译： 一种光轴偏振型激光干涉仪，包括形成测量基准的参考球体，设置在测量对象物上的回射装置，激光干涉测量装置，用于输出对应于距离的增加或减小的测量值至 和来自反光装置; 以及用于以相对于作为基准的基准球的中心坐标为基准的以参考球为中心的相应的激光干涉测量装置的发射光束进行转动的两轴转动机构， 意味着来自安装在双轴转动机构上的激光干涉测量装置的发射光束的光轴和返回光束彼此平行，其中安装在第一轴转动机构的基部的第一轴转动机构的固定部分 装置设置在其内周，参考球放置在其固定部分处，同时第一轴转动机构的移动部分位于固定部分的外周，第二轴线 转动机构安装在其运动部分上。 因此，相对于构成双轴转动机构的第一轴转动机构，机构设计的复杂性可以在很大程度上简化。

公开(公告)号：US07388674B2

公开(公告)日：2008-06-17

申请号：US11458533

申请日：2006-07-19

申请人： Shinichirou Yanaka ,  Makoto Abe ,  Shinichi Hara ,  Naoyuki Taketomi

发明人： Shinichirou Yanaka ,  Makoto Abe ,  Shinichi Hara ,  Naoyuki Taketomi

IPC分类号： G01B9/06

CPC分类号： G01S17/36 ,  G01B11/03 ,  G01S7/4812 ,  G01S7/497 ,  G01S17/42 ,  G01S17/66

摘要： A laser tracking interferometer directs a laser beam to a retroreflector serving as an object to be measured to sense a displacement of the retroreflector using interference with a laser beam back reflected from the retroreflector. The laser tracking interferometer includes: a reference sphere; a carriage that rotates about a center of the reference sphere; a laser interferometer; a displacement gage for providing a displacement signal corresponding to a relative displacement between the reference sphere and the displacement gage; a data processing apparatus for computing a displacement of the retroreflector; a position sensitive detector for providing a position signal corresponding to deviation of a laser beam; and a controller for controlling rotation of the carriage based on the position signal so that the amount of deviation becomes zero.

摘要翻译： 激光跟踪干涉仪将激光束引导到用作被测量对象的后向反射器，以使用与从后向反射器反射的激光束的干涉来感测回射器的位移。 激光跟踪干涉仪包括：参考球; 围绕参考球的中心旋转的托架; 激光干涉仪; 用于提供对应于参考球和位移计之间的相对位移的位移信号的位移计; 用于计算后向反射器的位移的数据处理装置; 位置敏感检测器，用于提供对应于激光束偏离的位置信号; 以及控制器，用于基于位置信号控制滑架的旋转，使得偏差量变为零。

公开(公告)号：US20070024861A1

公开(公告)日：2007-02-01

申请号：US11458533

申请日：2006-07-19

申请人： Shinichirou Yanaka ,  Makoto Abe ,  Shinichi Hara ,  Naoyuki Taketomi

发明人： Shinichirou Yanaka ,  Makoto Abe ,  Shinichi Hara ,  Naoyuki Taketomi

IPC分类号： G01B11/02

CPC分类号： G01S17/36 ,  G01B11/03 ,  G01S7/4812 ,  G01S7/497 ,  G01S17/42 ,  G01S17/66

摘要： A laser tracking interferometer; a carriage rotatable about a center of the reference sphere; a laser interferometer that provides a retroreflector displacement signal, and a displacement gage that provides a displacement signal. A data processing apparatus computes displacement of the retroreflector with respect to the reference sphere. A position sensitive detector provides a position signal corresponding to the amount of deviation of a laser beam when the laser beam is reflected off the retroreflector back into the laser interferometer and deviated in a direction orthogonal to its optical axis. A controller controls rotation of the carriage based on the position signal from the position detector so that the amount of deviation becomes zero.

摘要翻译： 激光跟踪干涉仪; 可围绕参考球的中心旋转的托架; 提供后向反射器位移信号的激光干涉仪和提供位移信号的位移计。 数据处理装置计算回射器相对于参考球的位移。 当激光束从后向反射器反射回激光干涉仪并偏离与其光轴正交的方向时，位置敏感检测器提供对应于激光束偏离量的位置信号。 控制器基于来自位置检测器的位置信号控制滑架的旋转，使得偏差量变为零。

公开(公告)号：US20080316497A1

公开(公告)日：2008-12-25

申请号：US12141487

申请日：2008-06-18

申请人： Naoyuki Taketomi ,  Sinichirou Yanaka

发明人： Naoyuki Taketomi ,  Sinichirou Yanaka

IPC分类号： G01B11/02

CPC分类号： G01C15/002 ,  G01B2290/15 ,  G01S17/66

摘要： A tracking type laser interferometer that detects displacement of a retroreflector 300 being an object to be measured by utilizing interference of a laser beam 102 irradiated onto the retroreflector 300 and reflected by the retroreflector 300 in the returning direction, and carries out tracking by means of a two-axis turning mechanism 240 using displacement in the position of the optical axis of the laser beam 102; the same tracking type laser interferometer, includes; a light irradiator 600 that emits a fan-shaped laser light 602 that is fan-shaped including the optical axis of the laser beam 102, is interlocked with turning movements of the two-axis turning mechanism 240 around an axis orthogonal to the center axis of the corresponding fan shape; and a light receptor 620 that has a specific positional relationship with the retroreflector 300 or the light irradiator 600 and receives the fan-shaped laser light. Thereby, tracking can be automatically reset when the tracking is disabled due to a reason such as interruption of laser light or initial adjustment work can be automated when commencing measurement.

摘要翻译： 一种跟踪型激光干涉仪，其通过利用照射在后向反射器300上的反射镜300的反射光和反射镜300反射的激光束102的返回方向的干涉来检测作为待测物体的后向反射镜300的位移，并通过 使用位于激光束102的光轴位置的二轴转动机构240; 相同的跟踪型激光干涉仪，包括; 发射包括激光束102的光轴的扇形的扇形激光器602的光照射器600与两轴转动机构240的旋转运动相互联动， 相应的风扇形状; 以及与后向反射器300或光照射器600具有特定位置关系并接收扇形激光的光接收器620。 因此，当由于诸如激光中断的原因而禁用跟踪时，跟踪可以自动复位，或者在开始测量时可以自动进行初始调整工作。

公开(公告)号：US07872733B2

公开(公告)日：2011-01-18

申请号：US12141487

申请日：2008-06-18

申请人： Naoyuki Taketomi ,  Sinichirou Yanaka

发明人： Naoyuki Taketomi ,  Sinichirou Yanaka

IPC分类号： G01C3/08

CPC分类号： G01C15/002 ,  G01B2290/15 ,  G01S17/66

摘要： A tracking type laser interferometer that detects displacement of a retroreflector 300 being an object to be measured by utilizing interference of a laser beam 102 irradiated onto the retroreflector 300 and reflected by the retroreflector 300 in the returning direction, and carries out tracking by means of a two-axis turning mechanism 240 using displacement in the position of the optical axis of the laser beam 102; the same tracking type laser interferometer, includes; a light irradiator 600 that emits a fan-shaped laser light 602 that is fan-shaped including the optical axis of the laser beam 102, is interlocked with turning movements of the two-axis turning mechanism 240 around an axis orthogonal to the center axis of the corresponding fan shape; and a light receptor 620 that has a specific positional relationship with the retroreflector 300 or the light irradiator 600 and receives the fan-shaped laser light. Thereby, tracking can be automatically reset when the tracking is disabled due to a reason such as interruption of laser light or initial adjustment work can be automated when commencing measurement.

摘要翻译： 一种跟踪型激光干涉仪，其通过利用照射在后向反射器300上的反射镜300的反射光和反射镜300反射的激光束102的返回方向的干涉来检测作为待测物体的后向反射镜300的位移，并通过 使用位于激光束102的光轴位置的二轴转动机构240; 相同的跟踪型激光干涉仪，包括; 发射包括激光束102的光轴的扇形的扇形激光器602的光照射器600与两轴转动机构240的旋转运动相互联动， 相应的风扇形状; 以及与后向反射器300或光照射器600具有特定位置关系并接收扇形激光的光接收器620。 因此，当由于诸如激光中断的原因而禁用跟踪时，跟踪可以自动复位，或者在开始测量时可以自动进行初始调整工作。