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    Metal oxygen battery containing oxygen storage materials
    2.
    发明授权
    Metal oxygen battery containing oxygen storage materials 有权
    金属氧气电池含有储氧材料

    公开(公告)号：US09209503B2

    公开(公告)日：2015-12-08

    申请号：US12828396

    申请日：2010-07-01

    申请人： Andrew Robert Drews ,  Andrea Pulskamp ,  Jun Yang ,  Shinichi Hirano ,  Michael Alan Tamor

    发明人： Andrew Robert Drews ,  Andrea Pulskamp ,  Jun Yang ,  Shinichi Hirano ,  Michael Alan Tamor

    IPC分类号： H01M12/06 ,  H01M12/08

    CPC分类号： H01M12/06 ,  H01M12/08 ,  Y02E60/128

    摘要： In one embodiment, a metal oxygen battery is provided. The metal oxygen battery includes a battery housing including a first compartment and a second compartment. The first compartment includes a first electrode and an oxygen storage material in communication with the first electrode. The second compartment includes a second electrode and the second electrode includes a metal material (M). In another embodiment, the oxygen storage material is configured as a number of particles disposed within the first electrode. In certain instances, at least a portion of the number of particles are each contained within a selective transport member. In certain other instances, the selective transport member is oxygen permeable and electrolyte impermeable.

    摘要翻译： 在一个实施例中，提供了一种金属氧气电池。 金属氧气电池包括包括第一隔室和第二隔室的电池壳体。 第一隔室包括与第一电极连通的第一电极和氧气存储材料。 第二隔室包括第二电极，第二电极包括金属材料（M）。 在另一个实施例中，储氧材料被配置为设置在第一电极内的多个颗粒。 在某些情况下，颗粒数量的至少一部分各自包含在选择性传输构件内。 在某些其他情况下，选择性输送构件是透氧的和电解质不可渗透的。

    Processing apparatus with conveyer and controller to output request signal and stop instruction signal
    3.
    发明授权
    Processing apparatus with conveyer and controller to output request signal and stop instruction signal 有权
    具有输送机和控制器的处理装置输出请求信号和停止指令信号

    公开(公告)号：US09069350B2

    公开(公告)日：2015-06-30

    申请号：US11957568

    申请日：2007-12-17

    申请人： Shinichi Hirano

    发明人： Shinichi Hirano

    IPC分类号： G05B19/418 ,  G03F7/20 ,  H01L21/67 ,  H01L21/677

    CPC分类号： G05B19/41815 ,  G03F7/7075 ,  G05B2219/31261 ,  G05B2219/45031 ,  H01L21/67253 ,  H01L21/67259 ,  H01L21/67745 ,  Y02P90/08

    摘要： A processing apparatus includes a unit processing an object, a first conveyer to perform conveyance of the object between the unit and a station arranged between an external apparatus and the unit, the external apparatus including a second conveyer to hold the object with a hand thereof to perform conveyance of the object to or from the station, and a controller to output a request signal and a stop instruction signal. The request signal requests the external apparatus to perform the conveyance by the second conveyer, and is output before the processing apparatus becomes a state to allow the second conveyer to perform the conveyance, and the stop instruction signal instructs the external apparatus to stop the hand and is output based on a state of the processing apparatus after an output of the request signal and before the conveyance of the second conveyer.

    摘要翻译： 一种处理装置，包括处理物体的单元，第一输送机，用于在单元和布置在外部设备与单元之间的站之间执行物体的传送，外部设备包括第二输送器，用于将物体用手保持 执行对象到站或从站的传送，以及控制器输出请求信号和停止指令信号。 请求信号请求外部设备执行第二输送机的输送，并且在处理装置成为使第二输送机进行输送的状态之前输出，停止指示信号指示外部装置停止手， 在输出请求信号之后和第二输送机的输送之前基于处理装置的状态输出。

    Metal Oxygen Battery Containing Oxygen Storage Materials
    5.
    发明申请
    Metal Oxygen Battery Containing Oxygen Storage Materials 有权
    含氧储存材料的金属氧电池

    公开(公告)号：US20110165475A1

    公开(公告)日：2011-07-07

    申请号：US12828396

    申请日：2010-07-01

    申请人： Andrew Robert Drews ,  Andrea Pulskamp ,  Jun Yang ,  Shinichi Hirano ,  Michael Alan Tamor

    发明人： Andrew Robert Drews ,  Andrea Pulskamp ,  Jun Yang ,  Shinichi Hirano ,  Michael Alan Tamor

    IPC分类号： H01M8/22

    CPC分类号： H01M12/06 ,  H01M12/08 ,  Y02E60/128

    摘要： In one embodiment, a metal oxygen battery is provided. The metal oxygen battery includes a battery housing including a first compartment and a second compartment. The first compartment includes a first electrode and an oxygen storage material in communication with the first electrode. The second compartment includes a second electrode and the second electrode includes a metal material (M). In another embodiment, the oxygen storage material is configured as a number of particles disposed within the first electrode. In certain instances, at least a portion of the number of particles are each contained within a selective transport member. In certain other instances, the selective transport member is oxygen permeable and electrolyte impermeable.

    摘要翻译： 在一个实施例中，提供了一种金属氧气电池。 金属氧气电池包括包括第一隔室和第二隔室的电池壳体。 第一隔室包括与第一电极连通的第一电极和氧气存储材料。 第二隔室包括第二电极，第二电极包括金属材料（M）。 在另一个实施例中，储氧材料被配置为设置在第一电极内的多个颗粒。 在某些情况下，颗粒数量的至少一部分各自包含在选择性传输构件内。 在某些其他情况下，选择性输送构件是透氧的和电解质不可渗透的。

    EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE
    8.
    发明申请
    EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE 有权
    曝光装置及其制造方法

    公开(公告)号：US20110116070A1

    公开(公告)日：2011-05-19

    申请号：US12940681

    申请日：2010-11-05

    申请人： Shinichi Hirano

    发明人： Shinichi Hirano

    IPC分类号： G03B27/58

    CPC分类号： G03F7/70775 ,  G03F7/70725 ,  G03F7/7075 ,  H01L21/67748

    摘要： An exposure apparatus comprises: a substrate stage movable from a first position to a second position; a conveyance arm movable from a third position to the second position; an elevating member transferring the substrate to the arm at the second position; and a controller. The controller judges whether the stage reaches a fourth position that shifts to a front side from the second position by a predetermined interval for avoiding a collision between the substrate and the arm and a collision between the elevating member and the substrate when the elevating operation ends. If the controller judges that the stage does not reach the fourth position, the controller controls the movements of the stage and the arm, and the elevation of the elevating member so that the arm starts to move toward the second position before the end of the elevating operation.

    摘要翻译： 曝光装置包括：可从第一位置移动到第二位置的基板台; 输送臂，其可从第三位置移动到所述第二位置; 升降构件，在所述第二位置将所述基板传递到所述臂; 和控制器。 当升降动作结束时，控制器判断阶段是否到达从第二位置向前侧偏移预定间隔的第四位置，以避免基板和臂之间的碰撞以及升降构件与基板之间的碰撞。 如果控制器判断舞台没有到达第四位置，则控制器控制舞台和手臂的运动以及升降构件的高度，使得手臂在升降结束之前开始向第二位置移动 操作。

    PROCESSING APPARATUS
    9.
    发明申请
    PROCESSING APPARATUS 有权
    加工设备

    公开(公告)号：US20080143996A1

    公开(公告)日：2008-06-19

    申请号：US11957568

    申请日：2007-12-17

    申请人： Shinichi Hirano

    发明人： Shinichi Hirano

    IPC分类号： G03B27/58 ,  G03B27/42 ,  H01L21/677 ,  G06F7/00 ,  G05B19/00

    CPC分类号： G05B19/41815 ,  G03F7/7075 ,  G05B2219/31261 ,  G05B2219/45031 ,  H01L21/67253 ,  H01L21/67259 ,  H01L21/67745 ,  Y02P90/08

    摘要： A processing apparatus comprises a unit processing an object, a first conveyer to perform conveyance of the object between the unit and a station arranged between an external apparatus and the unit, the external apparatus including a second conveyer to hold the object with a hand thereof to perform conveyance of the object to or from the station, and a controller to output a request signal and a stop instruction signal. The request signal requests the external apparatus to perform the conveyance by the second conveyer, and is output before the processing apparatus becomes a state to allow the second conveyer to perform the conveyance, and the stop instruction signal instructs the external apparatus to stop the hand and is output based on a state of the processing apparatus after an output of the request signal and before the conveyance of the second conveyer.

    摘要翻译： 一种处理装置，包括处理物体的单元，第一输送机，用于在单元和布置在外部设备与单元之间的站之间执行物体的传送，该外部设备包括用手将物体夹持的第二输送器 执行对象到站或从站的传送，以及控制器输出请求信号和停止指令信号。 请求信号请求外部设备执行第二输送机的输送，并且在处理装置成为使第二输送机进行输送的状态之前输出，停止指示信号指示外部装置停止手， 在输出请求信号之后和第二输送机的输送之前基于处理装置的状态输出。

    EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
    10.
    发明申请
    EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD 有权
    曝光装置和装置制造方法

    公开(公告)号：US20080106721A1

    公开(公告)日：2008-05-08

    申请号：US11935814

    申请日：2007-11-06

    申请人： Shinichi Hirano

    发明人： Shinichi Hirano

    IPC分类号： G03B27/72

    CPC分类号： G03B27/72 ,  G03F7/70558

    摘要： An exposure apparatus which illuminates a reticle with illumination light from a light source and projects light from the reticle onto a substrate to expose the substrate to light is disclosed. The apparatus comprises a shutter located on a path of the illumination light, a detector configured to detect a dose to the substrate, and a controller configured to control operation of the shutter. In a first exposure mode which uses illumination light with a first light intensity, the controller controls an open time of the shutter based on an output from the detector, and to store the open time. In a second exposure mode which uses illumination light with a second light intensity higher than the first light intensity, the controller controls a speed of the shutter based on the stored open time.

    摘要翻译： 公开了一种曝光装置，其利用来自光源的照明光照亮标线板，并将来自光掩模的光投射到基板上以将基板曝光。 该装置包括位于照明光路径上的快门，被配置为检测对基板的剂量的检测器以及被配置为控制快门的操作的控制器。 在使用具有第一光强度的照明光的第一曝光模式中，控制器基于来自检测器的输出来控制快门的打开时间并存储打开时间。 在使用具有比第一光强度高的第二光强度的照明光的第二曝光模式下，控制器基于所存储的打开时间来控制快门的速度。