公开(公告)号：US07539350B2

公开(公告)日：2009-05-26

申请号：US11360584

申请日：2006-02-24

申请人： Junji Oaki ,  Shinji Sugihara ,  Yuichi Nakatani

发明人： Junji Oaki ,  Shinji Sugihara ,  Yuichi Nakatani

IPC分类号： G06K9/40

CPC分类号： G06K9/748 ,  G06K9/03

摘要： An image correction method having a small number of setting parameters achieved by integrating shift (alignment) in unit of a sub-pixel and image correction. A relationship between an inspection reference pattern image and a pattern image under test is identified, a mathematical expression model which fits a pixel error, expansion and contraction/distortion noise, and sensing noise of the image is constructed, and the model is simulated to generate an estimation model image.

摘要翻译： 一种通过以子像素为单位整合移位（对齐）和图像校正而实现的少量设定参数的图像校正方法。 识别检查参考图案图像和被测图案图像之间的关系，构建适合像素误差，扩张和收缩/失真噪声以及图像感测噪声的数学表达式模型，并且模拟模型以产生 估计模型图像。

公开(公告)号：US07359546B2

公开(公告)日：2008-04-15

申请号：US11072317

申请日：2005-03-07

申请人： Shinji Sugihara ,  Ikunao Isomura ,  Junji Oaki ,  Toru Tojo

发明人： Shinji Sugihara ,  Ikunao Isomura ,  Junji Oaki ,  Toru Tojo

IPC分类号： G06K9/00

CPC分类号： G06T7/001 ,  G01R31/311 ,  G03F1/84 ,  G06T2207/30148

摘要： A defect inspection method comprises irradiating a sample including a pattern under inspection with light, acquiring measurement pattern data of the pattern based on intensity of light reflected by the sample, generating conversion data including pixel data corresponding to the measurement pattern data from design data of the sample, applying FIR filter process to the conversion data, reconstructing the conversion data by replacing pixel data having value not larger than first reference value with first pixel data, replacing pixel data having value larger than second reference value larger than first reference value with second pixel data having value larger than first pixel data, replacing pixel data having value larger than first reference value and less than second reference value with third pixel data having value between the value of first and second pixel data, the pixel data having larger value being replaced with third pixel data having higher value.

摘要翻译： 缺陷检查方法包括用光照射包括检查中的图案的样品，基于由样品反射的光的强度获取图案的测量图案数据，生成包括与来自样品的设计数据相对应的测量图案数据的像素数据的转换数据 将FIR滤波处理应用于转换数据，通过用第一像素数据替换具有不大于第一参考值的像素数据来重构转换数据，用第二像素替换具有大于第一参考值的值的大于第二参考值的像素数据 具有大于第一像素数据的数据的数据，替换具有大于第一参考值且小于第二参考值的像素数据，其中第三像素数据具有在第一和第二像素数据的值之间的值，具有较大值的像素数据被替换为 第三像素数据具有较高的值。

公开(公告)号：US20070064993A1

公开(公告)日：2007-03-22

申请号：US11360580

申请日：2006-02-24

申请人： Junji Oaki ,  Shinji Sugihara

发明人： Junji Oaki ,  Shinji Sugihara

IPC分类号： G06K9/00

CPC分类号： G06T7/001 ,  G06T2207/30164

摘要： An image correction device for use in a pattern inspection apparatus is disclosed, which has automatic adaptability to variations in density of a pattern image of a workpiece being tested. The device is operable to identify a two-dimensional (2D) linear predictive model from the pattern image of interest and determine the amount of eccentricity of a centroid position of this model. This amount is then used to switch between a corrected pattern image due to the 2D linear prediction modeling and a corrected image that is interpolated by bicubic interpolation techniques. A pattern inspection method using the image correction technique is also disclosed.

摘要翻译： 公开了一种用于图案检查装置的图像校正装置，其具有对被测工件的图案图像的密度变化的自动适应性。 该装置可操作以从感兴趣的图案图像中识别二维（2D）线性预测模型，并确定该模型的质心位置的偏心量。 然后，该量用于在2D线性预测建模的校正图案图像与通过双三次插值技术进行内插的校正图像之间切换。 还公开了使用图像校正技术的图案检查方法。

公开(公告)号：US20060018530A1

公开(公告)日：2006-01-26

申请号：US11175360

申请日：2005-07-07

申请人： Junji Oaki ,  Shinji Sugihara ,  Ikunao Isomura ,  Toru Tojo

发明人： Junji Oaki ,  Shinji Sugihara ,  Ikunao Isomura ,  Toru Tojo

IPC分类号： G06K9/00

CPC分类号： G06T7/001 ,  G06T2207/30148

摘要： The present invention is to allow rapid detection of such a defect as buried in a pixel positional deviation, expansion/contraction noise or sensing noise on an image. A relationship between an inspection reference pattern image and a pattern image to be inspected is identified during inspection to construct a mathematical model obtained by absorbing (applying fitting on) a pixel positional deviation, expansion/contraction noise or sensing noise on an image, and a defect is detected by comparing a new inspection reference pattern image (model image) obtained by simulating the mathematical model and a pattern image to be inspected.

公开(公告)号：US07590277B2

公开(公告)日：2009-09-15

申请号：US11175360

申请日：2005-07-07

申请人： Junji Oaki ,  Shinji Sugihara ,  Ikunao Isomura ,  Toru Tojo

发明人： Junji Oaki ,  Shinji Sugihara ,  Ikunao Isomura ,  Toru Tojo

IPC分类号： G06K9/00

CPC分类号： G06T7/001 ,  G06T2207/30148

摘要： The present invention is to allow rapid detection of such a defect as buried in a pixel positional deviation, expansion/contraction noise or sensing noise on an image. A relationship between an inspection reference pattern image and a pattern image to be inspected is identified during inspection to construct a mathematical model obtained by absorbing (applying fitting on) a pixel positional deviation, expansion/contraction noise or sensing noise on an image, and a defect is detected by comparing a new inspection reference pattern image (model image) obtained by simulating the mathematical model and a pattern image to be inspected.

摘要翻译： 本发明可以快速检测像图像中的像素位置偏差，扩张/收缩噪声或感测噪声那样的缺陷。 在检查中识别出检查基准图案图像与待检查图案图像之间的关系，构成通过吸收（贴合）图像上的像素位置偏差，扩张/收缩噪声或感测噪声而获得的数学模型，以及 通过比较通过模拟数学模型获得的新的检查参考图案图像（模型图像）和待检查的图案图像来检测缺陷。

公开(公告)号：US07565032B2

公开(公告)日：2009-07-21

申请号：US11360679

申请日：2006-02-24

申请人： Junji Oaki ,  Shinji Sugihara

发明人： Junji Oaki ,  Shinji Sugihara

IPC分类号： G06K9/32

CPC分类号： G03F1/84 ,  G03F7/70625 ,  G06T7/0004 ,  G06T2207/30148

摘要： An image correction device for use in a pattern inspection apparatus is disclosed, which has automatic adaptability to variations in density of a pattern image of a workpiece being tested. The device is operable to identify a two-dimensional (2D) linear predictive model parameters from the pattern image of interest and determine the value of a total sum of these identified parameters. This value is then used to switch between a corrected pattern image due to the 2D linear prediction modeling and a corrected image that is interpolated by bicubic interpolation techniques. A pattern inspection method using the image correction technique is also disclosed.

摘要翻译： 公开了一种用于图案检查装置的图像校正装置，其具有对被测工件的图案图像的密度变化的自动适应性。 该装置可操作以从感兴趣的图案图像中识别二维（2D）线性预测模型参数，并确定这些识别的参数的总和的值。 然后，该值用于在2D线性预测建模的校正图案图像与通过双三次插值技术内插的校正图像之间切换。 还公开了使用图像校正技术的图案检查方法。

公开(公告)号：US20060215900A1

公开(公告)日：2006-09-28

申请号：US11360584

申请日：2006-02-24

申请人： Junji Oaki ,  Shinji Sugihara ,  Yuichi Nakatani

发明人： Junji Oaki ,  Shinji Sugihara ,  Yuichi Nakatani

IPC分类号： G06K9/00

CPC分类号： G06K9/748 ,  G06K9/03

摘要： An image correction method having a small number of setting parameters achieved by integrating shift (alignment) in unit of a sub-pixel and image correction. A relationship between an inspection reference pattern image and a pattern image under test is identified, a mathematical expression model which fits a pixel error, expansion and contraction/distortion noise, and sensing noise of the image is constructed, and the model is simulated to generate an estimation model image.

公开(公告)号：US20050232477A1

公开(公告)日：2005-10-20

申请号：US11072317

申请日：2005-03-07

申请人： Shinji Sugihara ,  Ikunao Isomura ,  Junji Oaki ,  Toru Tojo

发明人： Shinji Sugihara ,  Ikunao Isomura ,  Junji Oaki ,  Toru Tojo

IPC分类号： G01B11/24 ,  G01N21/956 ,  G01R31/311 ,  G03F1/84 ,  G06K9/00 ,  G06T1/00 ,  G06T5/20 ,  G06T7/00 ,  H01L21/027 ,  H01L21/66

CPC分类号： G06T7/001 ,  G01R31/311 ,  G03F1/84 ,  G06T2207/30148

摘要： A defect inspection method comprises irradiating a sample including a pattern under inspection with light, acquiring measurement pattern data of the pattern based on intensity of light reflected by the sample, generating conversion data including pixel data corresponding to the measurement pattern data from design data of the sample, applying FIR filter process to the conversion data, reconstructing the conversion data by replacing pixel data having value not larger than first reference value with first pixel data, replacing pixel data having value larger than second reference value larger than first reference value with second pixel data having value larger than first pixel data, replacing pixel data having value larger than first reference value and less than second reference value with third pixel data having value between the value of first and second pixel data, the pixel data having larger value being replaced with third pixel data having higher value.

摘要翻译： 缺陷检查方法包括用光照射包括检查中的图案的样品，基于由样品反射的光的强度获取图案的测量图案数据，生成包括与来自样品的设计数据相对应的测量图案数据的像素数据的转换数据 将FIR滤波处理应用于转换数据，通过用第一像素数据替换具有不大于第一参考值的像素数据来重构转换数据，用第二像素替换具有大于第一参考值的值的大于第二参考值的像素数据 具有大于第一像素数据的数据的数据，替换具有大于第一参考值且小于第二参考值的像素数据，其中第三像素数据具有在第一和第二像素数据的值之间的值，具有较大值的像素数据被替换为 第三像素数据具有较高的值。

公开(公告)号：US07787686B2

公开(公告)日：2010-08-31

申请号：US12482836

申请日：2009-06-11

申请人： Junji Oaki ,  Shinji Sugihara

发明人： Junji Oaki ,  Shinji Sugihara

IPC分类号： G06K9/00

CPC分类号： G03F1/84 ,  G03F7/70625 ,  G06T7/0004 ,  G06T2207/30148

摘要： An image correction device for use in a pattern inspection apparatus is disclosed, which has automatic adaptability to variations in density of a pattern image of a workpiece being tested. The device is operable to identify a two-dimensional (2D) linear predictive model parameters from the pattern image of interest and determine the value of a total sum of these identified parameters. This value is then used to switch between a corrected pattern image due to the 2D linear prediction modeling and a corrected image that is interpolated by bicubic interpolation techniques. A pattern inspection method using the image correction technique is also disclosed.

摘要翻译： 公开了一种用于图案检查装置的图像校正装置，其具有对被测工件的图案图像的密度变化的自动适应性。 该装置可操作以从感兴趣的图案图像中识别二维（2D）线性预测模型参数，并确定这些识别的参数的总和的值。 然后，该值用于在2D线性预测建模的校正图案图像与通过双三次插值技术内插的校正图像之间切换。 还公开了使用图像校正技术的图案检查方法。

公开(公告)号：US20090245619A1

公开(公告)日：2009-10-01

申请号：US12482836

申请日：2009-06-11

申请人： Junji Oaki ,  Shinji Sugihara

发明人： Junji Oaki ,  Shinji Sugihara

IPC分类号： G06K9/00

CPC分类号： G03F1/84 ,  G03F7/70625 ,  G06T7/0004 ,  G06T2207/30148

摘要： An image correction device for use in a pattern inspection apparatus is disclosed, which has automatic adaptability to variations in density of a pattern image of a workpiece being tested. The device is operable to identify a two-dimensional (2D) linear predictive model parameters from the pattern image of interest and determine the value of a total sum of these identified parameters. This value is then used to switch between a corrected pattern image due to the 2D linear prediction modeling and a corrected image that is interpolated by bicubic interpolation techniques. A pattern inspection method using the image correction technique is also disclosed.

摘要翻译： 公开了一种用于图案检查装置的图像校正装置，其具有对被测工件的图案图像的密度变化的自动适应性。 该装置可操作以从感兴趣的图案图像中识别二维（2D）线性预测模型参数，并确定这些识别的参数的总和的值。 然后，该值用于在2D线性预测建模的校正图案图像与通过双三次插值技术内插的校正图像之间切换。 还公开了使用图像校正技术的图案检查方法。