摘要:
At least one exemplary embodiment is directed to an optical element holding apparatus including a force generating actuator configured to deform the optical element, a measuring device configured to measure a position of the optical element, and a displacement causing actuator configured to position the optical element based on the measured position.
摘要:
A mirror apparatus including a reflecting mirror reflecting light, partition walls, the walls and the reflecting mirror defining a plurality of air chambers, and a regulator regulating air pressure in at least one of the air chambers. With this configuration, the front surface of the reflecting mirror is deformed into a smooth shape so as to correct optical aberration.
摘要:
At least one exemplary embodiment is directed to an optical element holding apparatus including a force generating actuator configured to deform the optical element, a measuring device configured to measure a position of the optical element, and a displacement causing actuator configured to position the optical element based on the measured position.
摘要:
An optical unit including a plate, an optical element, a fixing device for partially fixing the optical element against the plate, and a deforming device, located between the plate and the optical element, for applying a deforming force to the optical element to change a surface shape of the optical element. The deforming device includes poles for contacting a back face of the optical element, and actuators for driving the poles against the plate.
摘要:
A mirror apparatus including a reflecting mirror reflecting light, partition walls, the walls and the reflecting mirror defining a plurality of air chambers, and a regulator regulating air pressure in at least one of the air chambers. With this configuration, the front surface of the reflecting mirror is deformed into a smooth shape so as to correct optical aberration.
摘要:
An optical unit includes a plate having a fixed position, an optical element having a specific optical action, a fixing device for partially fixing the optical element, and a deforming device, located between the plate and the optical element, for applying a deforming force to the optical element to asymmetrically change a surface shape of the optical element.
摘要:
A patterned magnetic recording medium, accessible by a magnetic recording head, including a plurality of tracks, a width direction of each track and that of the magnetic recording head being of a skew angle. The patterned magnetic recording medium includes a plurality of magnetic dots, each corresponding to a recording bit, formed on a non-magnetic material. The plurality of magnetic dots are arranged in a plurality of arrays, each array corresponding to one of the tracks. Every N adjacent magnetic dots of the array define a polygon, one side thereof being parallel to the corresponding track, and another side thereof being parallel to a direction corresponding to the skew angle of the corresponding track.
摘要:
An optical-path conversion device includes: a plate-shaped phase modulation mask in which a plurality of phase modulation parts are discretely formed for providing phase modulation to light passing through, and a first light-transmission part is formed for transmitting the light; and a plate-shaped light-shielding member in which a plurality of light-shielding parts are discretely formed for blocking the light, and a second light-transmission part is formed for transmitting the light, in which the phase modulation mask and the light-shielding member overlap each other at least in part, when viewed in an incident direction of the light, and at least one of the phase modulation mask and the light-shielding member is movable in an intersection direction which intersects with the incident direction.
摘要:
The present invention provides an exposure apparatus which forms a pattern on a substrate, the apparatus including an electron optical system configured to guide a charged particle beam onto the substrate, a stage configured to hold the substrate, an electromagnetic actuator configured to drive the stage, a magnetic shield which is placed in the stage so as to surround the electromagnetic actuator, a measurement member configured to measure a position of the stage, a coil member configured to generate a magnetic field on a path of the charged particle beam between the electron optical system and the substrate, and a control member configured to control the coil member so as to reduce a fluctuation of the magnetic field on the path, the magnetic field on the path fluctuating while the stage being driven by the electromagnetic actuator, based on the position of the stage measured by the measurement member.
摘要:
A method for manufacturing discrete track media and patterned media is disclosed which enables a magnetic recording layer having excellent magnetic characteristics to be obtained without imparting damage to a crystal orientation control layer which is at the surface when forming the magnetic recording layer. The method for manufacturing magnetic recording media comprises a process of forming a soft magnetic layer on a substrate; a process of forming a first crystal orientation control layer on the soft magnetic layer; a process of providing a depression in at least a portion of the first crystal orientation control layer; a process of performing heat treatment of the first crystal orientation control layer; and a process of forming a magnetic recording layer on the first crystal orientation control layer.