Magnetic recording medium and method for producing the same
    7.
    发明授权
    Magnetic recording medium and method for producing the same 有权
    磁记录介质及其制造方法

    公开(公告)号:US08945364B2

    公开(公告)日:2015-02-03

    申请号:US12926393

    申请日:2010-11-15

    申请人: Shinji Uchida

    发明人: Shinji Uchida

    IPC分类号: C25D11/04 C25D11/16 G11B5/855

    摘要: A patterned magnetic recording medium, accessible by a magnetic recording head, including a plurality of tracks, a width direction of each track and that of the magnetic recording head being of a skew angle. The patterned magnetic recording medium includes a plurality of magnetic dots, each corresponding to a recording bit, formed on a non-magnetic material. The plurality of magnetic dots are arranged in a plurality of arrays, each array corresponding to one of the tracks. Every N adjacent magnetic dots of the array define a polygon, one side thereof being parallel to the corresponding track, and another side thereof being parallel to a direction corresponding to the skew angle of the corresponding track.

    摘要翻译: 一种可由磁记录头访问的图案化磁记录介质,包括多个磁道,每个磁道的宽度方向和磁记录头的宽度方向为偏斜角。 图案化磁记录介质包括形成在非磁性材料上的多个磁点,每个磁点对应于记录位。 多个磁点排列成多个阵列,每个阵列对应于一个轨道。 阵列的每N个相邻的磁点限定一个多边形,其一侧平行于相应的轨道,另一侧平行于对应于相应轨道的倾斜角度的方向。

    Optical-path conversion device and imaging apparatus
    8.
    发明授权
    Optical-path conversion device and imaging apparatus 有权
    光路转换装置和成像装置

    公开(公告)号:US08848276B2

    公开(公告)日:2014-09-30

    申请号:US13805432

    申请日:2011-07-06

    申请人: Shinji Uchida

    发明人: Shinji Uchida

    摘要: An optical-path conversion device includes: a plate-shaped phase modulation mask in which a plurality of phase modulation parts are discretely formed for providing phase modulation to light passing through, and a first light-transmission part is formed for transmitting the light; and a plate-shaped light-shielding member in which a plurality of light-shielding parts are discretely formed for blocking the light, and a second light-transmission part is formed for transmitting the light, in which the phase modulation mask and the light-shielding member overlap each other at least in part, when viewed in an incident direction of the light, and at least one of the phase modulation mask and the light-shielding member is movable in an intersection direction which intersects with the incident direction.

    摘要翻译: 光路转换装置包括:一个板状相位调制掩模,其中离散地形成多个相位调制部分,用于向通过的光提供相位调制,并且形成第一透光部分用于透射光; 以及其中分离地形成多个遮光部件以阻挡光的板状遮光部件,并且形成用于透射光的第二光透射部分,其中相位调制掩模和发光元件 屏蔽部件在从光的入射方向观察时至少部分地重叠,并且相位调制掩模和遮光部件中的至少一个能够在与入射方向相交的交叉方向上移动。

    EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
    9.
    发明申请
    EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD 审中-公开
    曝光装置和装置制造方法

    公开(公告)号:US20120326051A1

    公开(公告)日:2012-12-27

    申请号:US13516424

    申请日:2011-06-09

    申请人: Shinji Uchida

    发明人: Shinji Uchida

    IPC分类号: G21K5/00

    CPC分类号: G03F7/70716 G03F7/70858

    摘要: The present invention provides an exposure apparatus which forms a pattern on a substrate, the apparatus including an electron optical system configured to guide a charged particle beam onto the substrate, a stage configured to hold the substrate, an electromagnetic actuator configured to drive the stage, a magnetic shield which is placed in the stage so as to surround the electromagnetic actuator, a measurement member configured to measure a position of the stage, a coil member configured to generate a magnetic field on a path of the charged particle beam between the electron optical system and the substrate, and a control member configured to control the coil member so as to reduce a fluctuation of the magnetic field on the path, the magnetic field on the path fluctuating while the stage being driven by the electromagnetic actuator, based on the position of the stage measured by the measurement member.

    摘要翻译: 本发明提供了一种在基板上形成图案的曝光装置,该装置包括一个电子光学系统,该电子光学系统被配置为将带电粒子束引导到基板上,一个被配置为保持基板的台,配置成驱动该台的电磁致动器, 放置在舞台中以围绕电磁致动器的磁屏蔽,测量构件,被配置为测量舞台的位置;线圈构件,被配置为在电子光学器件之间的带电粒子束的路径上产生磁场 系统和基板,以及控制构件,其被配置为控制线圈构件,以便减少路径上的磁场的波动,基于位置,在由电磁致动器驱动的台阶的同时,路径上的磁场波动 由测量部件测量的阶段。

    Method for manufacturing magnetic recording media
    10.
    发明授权
    Method for manufacturing magnetic recording media 有权
    制造磁记录介质的方法

    公开(公告)号:US08034413B2

    公开(公告)日:2011-10-11

    申请号:US12268083

    申请日:2008-11-10

    申请人: Shinji Uchida

    发明人: Shinji Uchida

    IPC分类号: B05D3/00 G11B5/127

    CPC分类号: G11B5/8404

    摘要: A method for manufacturing discrete track media and patterned media is disclosed which enables a magnetic recording layer having excellent magnetic characteristics to be obtained without imparting damage to a crystal orientation control layer which is at the surface when forming the magnetic recording layer. The method for manufacturing magnetic recording media comprises a process of forming a soft magnetic layer on a substrate; a process of forming a first crystal orientation control layer on the soft magnetic layer; a process of providing a depression in at least a portion of the first crystal orientation control layer; a process of performing heat treatment of the first crystal orientation control layer; and a process of forming a magnetic recording layer on the first crystal orientation control layer.

    摘要翻译: 公开了用于制造离散轨道介质和图案化介质的方法,其能够获得具有优异磁特性的磁记录层,而不会对形成磁记录层时在表面处的晶体取向控制层造成损害。 磁记录介质的制造方法包括:在基板上形成软磁性层的工序; 在所述软磁性层上形成第一晶体取向控制层的工序; 在所述第一晶体取向控制层的至少一部分中设置凹陷的工序; 进行第一晶体取向控制层的热处理的工序; 以及在第一晶体取向控制层上形成磁记录层的工艺。