公开(公告)号：US20120075625A1

公开(公告)日：2012-03-29

申请号：US13213116

申请日：2011-08-19

申请人： Shintaro TAMURA ,  Masanori Fukawa ,  Ayumu Ishihara ,  Kenichi Shitara ,  Hiroshi Nakajima

发明人： Shintaro TAMURA ,  Masanori Fukawa ,  Ayumu Ishihara ,  Kenichi Shitara ,  Hiroshi Nakajima

IPC分类号： G01N21/88

CPC分类号： G01N21/00 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/9506 ,  G01N2201/0833

摘要： The present invention is to provide an optical surface defect inspection apparatus or an optical surface defect inspection method that can improve a signal-to-noise ratio according to a multi-segmented cell method without performing autofocus operations, and can implement highly sensitive inspection. The present invention is an optical surface defect inspection apparatus or an optical surface defect inspection method in which an inspection beam is applied onto a test subject, an image of a scattered light from the surface of the test subject is formed on a photo-detector, and a defect on the surface of the test subject is inspected based on an output from the photo-detector. The photo-detector has an optical fiber bundle. One end thereof forms a circular light receiving surface to receive the scattered light. The other end thereof is connected to a plurality of light receiving devices. The optical fiber bundle is divided into a plurality of fan-shaped cells in the light receiving surface, and connected to the light emitting devices in units of the cells for performing the inspection based on the outputs of the plurality of cells.

摘要翻译： 本发明提供一种光学表面缺陷检查装置或光学表面缺陷检查方法，其可以在不进行自动对焦操作的情况下，根据多分段单元法提高信噪比，并且可以实现高度敏感的检查。 本发明是一种光学表面缺陷检查装置或光学表面缺陷检查方法，其中将检查光束施加到测试对象上，在光检测器上形成来自受检者表面的散射光的图像， 并且基于光电检测器的输出来检查测试对象的表面上的缺陷。 光检测器具有光纤束。 其一端形成圆形光接收表面以接收散射光。 其另一端连接到多个光接收装置。 光纤束在光接收表面被分成多个扇形单元，并且以基于多个单元的输出执行检查的单元为单位连接到发光器件。

公开(公告)号：US08547547B2

公开(公告)日：2013-10-01

申请号：US13213116

申请日：2011-08-19

申请人： Shintaro Tamura ,  Masanori Fukawa ,  Ayumu Ishihara ,  Kenichi Shitara ,  Hiroshi Nakajima

发明人： Shintaro Tamura ,  Masanori Fukawa ,  Ayumu Ishihara ,  Kenichi Shitara ,  Hiroshi Nakajima

IPC分类号： G01N21/00

CPC分类号： G01N21/00 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/9506 ,  G01N2201/0833

摘要： The present invention is to provide an optical surface defect inspection apparatus or an optical surface defect inspection method that can improve a signal-to-noise ratio according to a multi-segmented cell method without performing autofocus operations, and can implement highly sensitive inspection. The present invention is an optical surface defect inspection apparatus or an optical surface defect inspection method in which an inspection beam is applied onto a test subject, an image of a scattered light from the surface of the test subject is formed on a photo-detector, and a defect on the surface of the test subject is inspected based on an output from the photo-detector. The photo-detector has an optical fiber bundle. One end thereof forms a circular light receiving surface to receive the scattered light. The other end thereof is connected to a plurality of light receiving devices. The optical fiber bundle is divided into a plurality of fan-shaped cells in the light receiving surface, and connected to the light emitting devices in units of the cells for performing the inspection based on the outputs of the plurality of cells.

摘要翻译： 本发明提供一种光学表面缺陷检查装置或光学表面缺陷检查方法，其可以在不进行自动对焦操作的情况下，根据多分段单元法提高信噪比，并且可以实现高度敏感的检查。 本发明是一种光学表面缺陷检查装置或光学表面缺陷检查方法，其中将检查光束施加到测试对象上，在光检测器上形成来自受检者表面的散射光的图像， 并且基于光电检测器的输出来检查测试对象的表面上的缺陷。 光检测器具有光纤束。 其一端形成圆形光接收表面以接收散射光。 其另一端连接到多个光接收装置。 光纤束在光接收表面被分成多个扇形单元，并且以基于多个单元的输出执行检查的单元为单位连接到发光器件。

公开(公告)号：US08295000B2

公开(公告)日：2012-10-23

申请号：US13012883

申请日：2011-01-25

申请人： Kenichi Shitara ,  Ayumu Ishihara

发明人： Kenichi Shitara ,  Ayumu Ishihara

IPC分类号： G11B27/36

CPC分类号： G11B19/04

摘要： In order to implement efficient read/write testing by firstly determining read/write test area-sampling positions based on position information relating to any defects detected during optical inspection, and then conducting read/write tests only upon areas neighboring the defects detected during the optical inspection, a magnetic disk to be inspected is retained on a spindle and moved under this state between an optical type of inspection apparatus and a read/write test apparatus, in which apparatus configuration the read/write test apparatus uses position information on any defects detected by the optical type of inspection apparatus and conducts read/write tests only upon neighboring areas of the defects detected by the optical type of inspection apparatus.

摘要翻译： 为了实现高效的读/写测试，首先根据与光学检测期间检测到的任何缺陷相关的位置信息确定读/写测试区域采样位置，然后仅在与光学期间检测到的缺陷相邻的区域进行读/写测试 检查中，要检查的磁盘被保持在主轴上并且在该状态下在光学类型的检查装置和读/写测试装置之间移动，其中读/写测试装置使用检测到的任何缺陷的位置信息 通过光学类型的检查装置，仅对由光学型检查装置检测到的缺陷的相邻区域进行读/写测试。

公开(公告)号：US08208356B2

公开(公告)日：2012-06-26

申请号：US12975405

申请日：2010-12-22

申请人： Ayumu Ishihara ,  Hiroshi Nakajima

发明人： Ayumu Ishihara ,  Hiroshi Nakajima

IPC分类号： G11B7/00 ,  G01N21/00

CPC分类号： G11B20/18 ,  G11B2020/1826 ,  G11B2220/2516

摘要： An apparatus for optically checking magnetic disk defects that makes possible more accurate determination of positions of minute defects by illuminating an area greater than a checkup area with an illuminating beam having a Gaussian distribution is to be provided. The apparatus is configured of a specular reflection detecting device including a detector having a detecting face including an array of multiple pixels, and a processing device that figures out the position of each defect by using, in addition to the output signal from each of the pixels of the detector that detected a specular reflection from the checkup area, also output signals of some pixels out of the multiple pixels having detected the specular reflection from the checkup area of one turn before and the checkup area of one turn after, both adjoining in the radial direction, and determines the type of the defect.

摘要翻译： 提供一种用于光学检查磁盘缺陷的装置，其能够通过用具有高斯分布的照明光束照射大于检查区域的区域来更精确地确定微小缺陷的位置。 该装置由包括具有包括多个像素的阵列的检测面的检测器的镜面反射检测装置构成，以及处理装置，除了来自每个像素的输出信号之外，还使用除去每个缺陷的位置 检测到来自检验区域的镜面反射的检测器的输出信号也输出从已经检测到来自前一轮的检查区域的检测区域的检测区域的多个像素中的一些像素的输出信号以及一匝之后的检验区域 径向，并确定缺陷的类型。

公开(公告)号：US08169868B2

公开(公告)日：2012-05-01

申请号：US12715891

申请日：2010-03-02

申请人： Ayumu Ishihara

发明人： Ayumu Ishihara

IPC分类号： G11B20/18

CPC分类号： G11B20/18 ,  G11B20/10037 ,  G11B2020/1281 ,  G11B2220/2516

摘要： An optical defect detection method for patterned media includes: irradiating a laser beam onto a patterned medium and obtaining reflected light by reflection very close to a sample; outputting the reflected light as an analog electrical signal from an optical receiver; converting the analog signal to a digital signal; obtaining a surface profile in a track direction by sampling the analog signal; obtaining a servo area profile by setting a slice for detecting servo area; calculating an average value in a track width direction based on plural servo area profiles; generating a master servo area profile based on the average value; obtaining a difference between the master servo area profile and the specific servo area profile; and detecting the presence of a defect including surface roughness, process fluctuation, and adhesion of foreign matters, from a differential waveform.

摘要翻译： 用于图案化介质的光学缺陷检测方法包括：将激光束照射到图案化介质上，并通过非常接近样品的反射获得反射光; 从光接收器输出作为模拟电信号的反射光; 将模拟信号转换成数字信号; 通过对模拟信号进行采样来获得在轨道方向上的表面轮廓; 通过设置用于检测伺服区域的切片来获得伺服区域轮廓; 基于多个伺服区域轮廓来计算轨道宽度方向上的平均值; 基于平均值产生主伺服区域轮廓; 获得主伺服区域轮廓和特定伺服区域轮廓之间的差异; 并且从差分波形检测包括表面粗糙度，工艺波动和异物附着的缺陷的存在。