公开(公告)号：US08547547B2

公开(公告)日：2013-10-01

申请号：US13213116

申请日：2011-08-19

申请人： Shintaro Tamura ,  Masanori Fukawa ,  Ayumu Ishihara ,  Kenichi Shitara ,  Hiroshi Nakajima

发明人： Shintaro Tamura ,  Masanori Fukawa ,  Ayumu Ishihara ,  Kenichi Shitara ,  Hiroshi Nakajima

IPC分类号： G01N21/00

CPC分类号： G01N21/00 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/9506 ,  G01N2201/0833

摘要： The present invention is to provide an optical surface defect inspection apparatus or an optical surface defect inspection method that can improve a signal-to-noise ratio according to a multi-segmented cell method without performing autofocus operations, and can implement highly sensitive inspection. The present invention is an optical surface defect inspection apparatus or an optical surface defect inspection method in which an inspection beam is applied onto a test subject, an image of a scattered light from the surface of the test subject is formed on a photo-detector, and a defect on the surface of the test subject is inspected based on an output from the photo-detector. The photo-detector has an optical fiber bundle. One end thereof forms a circular light receiving surface to receive the scattered light. The other end thereof is connected to a plurality of light receiving devices. The optical fiber bundle is divided into a plurality of fan-shaped cells in the light receiving surface, and connected to the light emitting devices in units of the cells for performing the inspection based on the outputs of the plurality of cells.

摘要翻译： 本发明提供一种光学表面缺陷检查装置或光学表面缺陷检查方法，其可以在不进行自动对焦操作的情况下，根据多分段单元法提高信噪比，并且可以实现高度敏感的检查。 本发明是一种光学表面缺陷检查装置或光学表面缺陷检查方法，其中将检查光束施加到测试对象上，在光检测器上形成来自受检者表面的散射光的图像， 并且基于光电检测器的输出来检查测试对象的表面上的缺陷。 光检测器具有光纤束。 其一端形成圆形光接收表面以接收散射光。 其另一端连接到多个光接收装置。 光纤束在光接收表面被分成多个扇形单元，并且以基于多个单元的输出执行检查的单元为单位连接到发光器件。

公开(公告)号：US20120075625A1

公开(公告)日：2012-03-29

申请号：US13213116

申请日：2011-08-19

申请人： Shintaro TAMURA ,  Masanori Fukawa ,  Ayumu Ishihara ,  Kenichi Shitara ,  Hiroshi Nakajima

发明人： Shintaro TAMURA ,  Masanori Fukawa ,  Ayumu Ishihara ,  Kenichi Shitara ,  Hiroshi Nakajima

IPC分类号： G01N21/88

CPC分类号： G01N21/00 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/9506 ,  G01N2201/0833

摘要： The present invention is to provide an optical surface defect inspection apparatus or an optical surface defect inspection method that can improve a signal-to-noise ratio according to a multi-segmented cell method without performing autofocus operations, and can implement highly sensitive inspection. The present invention is an optical surface defect inspection apparatus or an optical surface defect inspection method in which an inspection beam is applied onto a test subject, an image of a scattered light from the surface of the test subject is formed on a photo-detector, and a defect on the surface of the test subject is inspected based on an output from the photo-detector. The photo-detector has an optical fiber bundle. One end thereof forms a circular light receiving surface to receive the scattered light. The other end thereof is connected to a plurality of light receiving devices. The optical fiber bundle is divided into a plurality of fan-shaped cells in the light receiving surface, and connected to the light emitting devices in units of the cells for performing the inspection based on the outputs of the plurality of cells.

摘要翻译： 本发明提供一种光学表面缺陷检查装置或光学表面缺陷检查方法，其可以在不进行自动对焦操作的情况下，根据多分段单元法提高信噪比，并且可以实现高度敏感的检查。 本发明是一种光学表面缺陷检查装置或光学表面缺陷检查方法，其中将检查光束施加到测试对象上，在光检测器上形成来自受检者表面的散射光的图像， 并且基于光电检测器的输出来检查测试对象的表面上的缺陷。 光检测器具有光纤束。 其一端形成圆形光接收表面以接收散射光。 其另一端连接到多个光接收装置。 光纤束在光接收表面被分成多个扇形单元，并且以基于多个单元的输出执行检查的单元为单位连接到发光器件。

公开(公告)号：US08295000B2

公开(公告)日：2012-10-23

申请号：US13012883

申请日：2011-01-25

申请人： Kenichi Shitara ,  Ayumu Ishihara

发明人： Kenichi Shitara ,  Ayumu Ishihara

IPC分类号： G11B27/36

CPC分类号： G11B19/04

摘要： In order to implement efficient read/write testing by firstly determining read/write test area-sampling positions based on position information relating to any defects detected during optical inspection, and then conducting read/write tests only upon areas neighboring the defects detected during the optical inspection, a magnetic disk to be inspected is retained on a spindle and moved under this state between an optical type of inspection apparatus and a read/write test apparatus, in which apparatus configuration the read/write test apparatus uses position information on any defects detected by the optical type of inspection apparatus and conducts read/write tests only upon neighboring areas of the defects detected by the optical type of inspection apparatus.

摘要翻译： 为了实现高效的读/写测试，首先根据与光学检测期间检测到的任何缺陷相关的位置信息确定读/写测试区域采样位置，然后仅在与光学期间检测到的缺陷相邻的区域进行读/写测试 检查中，要检查的磁盘被保持在主轴上并且在该状态下在光学类型的检查装置和读/写测试装置之间移动，其中读/写测试装置使用检测到的任何缺陷的位置信息 通过光学类型的检查装置，仅对由光学型检查装置检测到的缺陷的相邻区域进行读/写测试。

公开(公告)号：US08502966B2

公开(公告)日：2013-08-06

申请号：US13646066

申请日：2012-10-05

申请人： Kenichi Shitara ,  Hiroshi Nakajima

发明人： Kenichi Shitara ,  Hiroshi Nakajima

IPC分类号： G01N21/00

CPC分类号： G01N21/9501 ,  G01N21/47

摘要： The present invention provides an apparatus and method which enable detecting a microscopic defect sensitively by efficiently collecting and detecting scattering light from a defect in a wider region without enlarging the apparatus. In the apparatus for inspecting a defect on a surface of a sample, including illumination means which irradiates a surface of a sample with laser, reflected light detection means which detects reflected light from the sample, and signal processing means which processes a detected signal and detecting a defect on the sample, the reflected light detection means is configured to include a scattering light detection unit which collects scattering light components of the reflected light from the sample by excluding specularly reflected light components by using an aspheric flannel lens and detecting the scattering light components.

摘要翻译： 本发明提供了一种能够通过在不扩大设备的情况下有效地收集和检测来自较宽区域的缺陷的散射光而敏感地检测微观缺陷的装置和方法。 在用于检查样品表面上的缺陷的装置中，包括用激光照射样品表面的照射装置，检测来自样品的反射光的反射光检测装置和处理检测信号的信号处理装置， 反射光检测装置被配置为包括：散射光检测单元，其通过使用非球面法兰绒透镜排除镜面反射光分量并且检测散射光分量来收集来自样品的反射光的散射光分量 。

公开(公告)号：US08294888B2

公开(公告)日：2012-10-23

申请号：US12855873

申请日：2010-08-13

申请人： Kenichi Shitara ,  Hiroshi Nakajima

发明人： Kenichi Shitara ,  Hiroshi Nakajima

IPC分类号： G01N21/00

CPC分类号： G01N21/9501 ,  G01N21/47

摘要： The present invention provides an apparatus and method which enable detecting a microscopic defect sensitively by efficiently collecting and detecting scattering light from a defect in a wider region without enlarging the apparatus. In the apparatus for inspecting a defect on a surface of a sample, including illumination means which irradiates a surface of a sample with laser, reflected light detection means which detects reflected light from the sample, and signal processing means which processes a detected signal and detecting a defect on the sample, the reflected light detection means is configured to include a scattering light detection unit which collects scattering light components of the reflected light from the sample by excluding specularly reflected light components by using an aspheric flannel lens and detecting the scattering light components.

摘要翻译： 本发明提供了一种能够通过在不扩大设备的情况下有效地收集和检测来自较宽区域的缺陷的散射光而敏感地检测微观缺陷的装置和方法。 在用于检查样品表面上的缺陷的装置中，包括用激光照射样品表面的照射装置，检测来自样品的反射光的反射光检测装置和处理检测信号的信号处理装置， 反射光检测装置被配置为包括：散射光检测单元，其通过使用非球面法兰绒透镜排除镜面反射光分量并且检测散射光分量来收集来自样品的反射光的散射光分量 。

公开(公告)号：US08488116B2

公开(公告)日：2013-07-16

申请号：US13646072

申请日：2012-10-05

申请人： Kenichi Shitara ,  Hiroshi Nakajima

发明人： Kenichi Shitara ,  Hiroshi Nakajima

IPC分类号： G01N21/00

CPC分类号： G01N21/9501 ,  G01N21/47

摘要： The present invention provides an apparatus and method which enable detecting a microscopic defect sensitively by efficiently collecting and detecting scattering light from a defect in a wider region without enlarging the apparatus. In the apparatus for inspecting a defect on a surface of a sample, including illumination means which irradiates a surface of a sample with laser, reflected light detection means which detects reflected light from the sample, and signal processing means which processes a detected signal and detecting a defect on the sample, the reflected light detection means is configured to include a scattering light detection unit which collects scattering light components of the reflected light from the sample by excluding specularly reflected light components by using an aspheric flannel lens and detecting the scattering light components.

公开(公告)号：US06473258B1

公开(公告)日：2002-10-29

申请号：US09662626

申请日：2000-09-15

申请人： Kenichi Shitara ,  Kazuo Honma

发明人： Kenichi Shitara ,  Kazuo Honma

IPC分类号： G11B502

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G11B5/012 ,  G11B23/0007 ,  G11B2005/3996

摘要： A magnetic disk read/write circuit comprises a core having a pair of coils wound such that signals supplied to the coils becomes opposite in phase and a read circuit having a first input terminal connected to one of terminals of a read head through one of the coils to receive a read signal from the read head and a second input terminal connected to the other terminal of the read head through the other coil to receive the read signal from the read head or a write circuit in which the read head is a write head, the signal at the first input terminal is a signal at the first output terminal and the signal at the second input terminal is a signal at a second input terminal.

摘要翻译： 磁盘读/写电路包括具有卷绕的一对线圈的芯，使得提供给线圈的信号相位相反，并且读电路具有通过一个线圈连接到读头的一个端子的第一输入端 从读取头接收读取信号和通过另一个线圈连接到读取头的另一个端子的第二输入端子，以从读取头接收读取信号或其中读取头是写入头的写入电路， 第一输入端的信号是第一输出端的信号，第二输入端的信号是第二输入端的信号。

公开(公告)号：US08031421B2

公开(公告)日：2011-10-04

申请号：US12788481

申请日：2010-05-27

申请人： Kenichi Shitara ,  Sumihiro Maeda

发明人： Kenichi Shitara ,  Sumihiro Maeda

IPC分类号： G11B27/36

CPC分类号： G11B27/36 ,  G11B5/09 ,  G11B5/455 ,  G11B5/5547

摘要： The present invention provides a method for measuring an optimum seeking time and an inspection apparatus using this method capable of measuring and setting an optimum seeking time for inspection of a magnetic disk or magnetic head. The method samples average level differences of sector-wise read signals in positive and negative domains for one round of track and detects a minimum value H and a minimum value L among these differences. The method recalculates the seeking time while changing the settling time. After writing and reading test data, calculates a deviation DEV of average levels DEV=(H−L)/(H+L). The method is adapted to obtain a minimum one of the values of settling time having measured when the deviation DEV of average levels is equal to or less than a predetermined value as an optimum settling time or an optimum seeking time.

摘要翻译： 本发明提供了一种用于测量最佳寻找时间的方法和使用该方法的检查装置，该方法能够测量和设置用于检查磁盘或磁头的最佳寻找时间。 该方法对一轮轨道的正域和负域中的扇区读信号的平均电平差进行采样，并检测这些差中的最小值H和最小值L. 该方法在改变建立时间的同时重新计算寻找时间。 在写入和读取测试数据之后，计算平均电平DEV =（H-L）/（H + L）的偏差DEV。 该方法适于获得当平均电平的偏差DEV等于或小于预定值作为最佳建立时间或最佳寻找时间时测量的建立时间值中的最小值。

公开(公告)号：US06552535B2

公开(公告)日：2003-04-22

申请号：US09962089

申请日：2001-09-26

申请人： Toshiharu Funaki ,  Shinji Honma ,  Kenichi Shitara ,  Hideki Mochiduki

发明人： Toshiharu Funaki ,  Shinji Honma ,  Kenichi Shitara ,  Hideki Mochiduki

IPC分类号： G01R3312

CPC分类号： G11B27/36 ,  G01R33/1207 ,  G11B5/012 ,  G11B20/182 ,  G11B2005/001 ,  G11B2220/20

摘要： A magnetic disk certifier includes a defect detector circuit comprising a low-pass filter for extracting a low frequency component of the read-out signal, the low frequency component containing a signal component of the error, a signal generator circuit for generating a signal having a predetermined frequency lower than the frequency of the read-out signal, a synthesizer circuit for synthesizing an output signal of the low-pass filter and the signal outputted from the signal generator circuit and a comparator for generating an error signal by comparing the synthesized signal from the synthesizer circuit with a predetermined reference level.

摘要翻译： 磁盘验证器包括缺陷检测器电路，其包括用于提取读出信号的低频分量的低通滤波器，包含误差的信号分量的低频分量，用于产生具有 预定频率低于读出信号的频率，用于合成低通滤波器的输出信号的合成器电路和从信号发生器电路输出的信号;以及比较器，用于通过比较来自 合成器电路具有预定的参考电平。

公开(公告)号：US08089714B2

公开(公告)日：2012-01-03

申请号：US12830008

申请日：2010-07-02

申请人： Kenichi Shitara ,  Takao Ishii

发明人： Kenichi Shitara ,  Takao Ishii

IPC分类号： G11B27/36

CPC分类号： G11B27/36 ,  G11B5/455 ,  G11B5/4555 ,  G11B2220/2516

摘要： An object of the present invention is to provide a deterioration detection method of a head and a magnetic disk inspection apparatus in which the number of times of exchanging the head due to deterioration is decreased to improve the throughput of an inspection. In the present invention, a resistance value detecting circuit that is directly coupled to both terminals of an MR head is provided to measure the resistance value of the MR head, and the measured value is compared with the initial value of the exchanged head, so that it is possible to recognize a deterioration state of each head irrespective of a magnetic disk as a measurement target.

摘要翻译： 本发明的目的是提供一种磁头和磁盘检查装置的劣化检测方法，其中由于劣化而使头部更换次数减少，以提高检查的生产量。 在本发明中，提供直接耦合到MR磁头的两端的电阻值检测电路，以测量MR磁头的电阻值，并将测量值与交换的磁头的初始值进行比较，使得 可以识别每个头的劣化状态，而不管作为测量对象的磁盘。