Use of multi-layer thin films as stress sensors

    公开(公告)号:US07059201B2

    公开(公告)日:2006-06-13

    申请号:US09747304

    申请日:2000-12-20

    IPC分类号: G01D7/00

    CPC分类号: G06K9/0002 G01L1/125

    摘要: The present invention provides a pressure sensing device that includes at least one TMR sensor, and preferably an array of TMR sensors, with each TMR sensor having an insulating spacer layer interposed between a pinned and a free ferromagnetic layer. In an unbiased state, the magnetization vector of each of the ferromagnetic layers is preferably parallel to each other. Upon application of a small voltage, the magnetization vectors remain unchanged. Upon application of stress, the magnetization vector of the free magnetic layer will rotate, thus causing a corresponding and proportionally related change in the resistance of the sensor. This change in resistance can be sensed and used to calculate the stress applied thereto.

    Fingerprint image capture device with a passive sensor array
    2.
    发明授权
    Fingerprint image capture device with a passive sensor array 失效
    具有无源传感器阵列的指纹图像捕获设备

    公开(公告)号:US06672174B2

    公开(公告)日:2004-01-06

    申请号:US09912066

    申请日:2001-07-23

    IPC分类号: G01D700

    摘要: A fingerprint-sensing device with a sensor array that does not use active switching elements is fabricated on a base. Sensor support integrated circuits, which contain processing and addressing circuitry, are separately fabricated and subsequently mounted on the base, establishing electrical connections with an interconnect structure within the base, and are thus not integrated with the sensor array. The sensor support integrated circuits can be covered by a bezel structure and the sensor array by a covering material. In addition, a connection cable can be provided to connect the sensor array and the sensor support integrated circuits with a power source and to other external devices and to convey signals generated by the sensor array to the external devices.

    摘要翻译: 具有不使用有源开关元件的传感器阵列的指纹感测装置制造在基座上。 包含处理和寻址电路的传感器支持集成电路被单独制造并随后安装在基座上,与基座内的互连结构建立电连接,并且因此不与传感器阵列集成。 传感器支持集成电路可以通过边框结构覆盖,传感器阵列可以通过覆盖材料覆盖。 此外,可以提供连接电缆以将传感器阵列和传感器支撑集成电路与电源和其它​​外部设备连接,并将由传感器阵列产生的信号传送到外部设备。

    Method for manufacturing sensing devices to image textured surfaces
    3.
    发明授权
    Method for manufacturing sensing devices to image textured surfaces 失效
    用于制造用于对纹理表面进行成像的感测装置的方法

    公开(公告)号:US07290323B2

    公开(公告)日:2007-11-06

    申请号:US10714825

    申请日:2003-11-14

    IPC分类号: G01R3/00

    摘要: A fingerprint-sensing device with a sensor array that does not use active switching elements is fabricated on a base. Sensor support integrated circuits, which contain processing and addressing circuitry, are separately fabricated and subsequently mounted on the base, establishing electrical connections with an interconnect structure within the base, and are thus not integrated with the sensor array. The sensor support integrated circuits can be covered by a bezel structure and the sensor array by a covering material. In addition, a connection cable can be provided to connect the sensor array and the sensor support integrated circuits with a power source and to other external devices and to convey signals generated by the sensor array to the external devices.

    摘要翻译: 具有不使用有源开关元件的传感器阵列的指纹感测装置制造在基座上。 包含处理和寻址电路的传感器支持集成电路被单独制造并随后安装在基座上,与基座内的互连结构建立电连接,并且因此不与传感器阵列集成。 传感器支持集成电路可以通过边框结构覆盖,传感器阵列可以通过覆盖材料覆盖。 此外,可以提供连接电缆以将传感器阵列和传感器支撑集成电路与电源和其它​​外部设备连接,并将由传感器阵列产生的信号传送到外部设备。

    Fingerprint sensors using membrane switch arrays
    4.
    发明授权
    Fingerprint sensors using membrane switch arrays 有权
    指纹传感器采用薄膜开关阵列

    公开(公告)号:US07638350B2

    公开(公告)日:2009-12-29

    申请号:US11120525

    申请日:2005-05-02

    IPC分类号: H01L21/00

    摘要: A method of making an integrated texture sensor for sensing a texture is described. In one embodiment, the method is directed to a sensor that that is protected from external contaminating particulates and will self-equalize using air from outside the sensor. Further combinations of such protection among various membrane switches, in combination with various types of membranes, is described. In another embodiment, a method of making a skin-texture sensor for sensing a skin texture having a plurality of ridges and a plurality of valleys is described, such that when completed, applying a ridge of the texture to a membrane switch will cause flexure of the membrane resulting in a contact between the lower electrode and the upper electrode, the contact establishing an electrical communication between said one of the row lines and said one of the column lines, whereas disposing a valley of the texture over said each membrane switch will not result in the contact between the lower electrode and the upper electrode.

    摘要翻译: 描述了一种用于感测纹理的综合纹理传感器的方法。 在一个实施例中,该方法涉及一种传感器,其被保护免受外部污染的微粒,并且将使用来自传感器外部的空气进行自平衡。 描述了各种膜开关之间的这种保护的进一步组合以及各种膜的组合。 在另一个实施例中,描述了制造用于感测具有多个脊和多个谷的皮肤纹理的皮肤纹理传感器的方法,使得当完成时,将纹理脊施加到膜开关将导致弯曲 所述膜导致下电极和上电极之间的接触,所述触点在所述行线和所述列线之一中建立电连通,而在所述每个薄膜开关上设置纹理谷将不会 导致下电极和上电极之间的接触。

    Fingerprint sensors using membrane switch arrays
    5.
    发明授权
    Fingerprint sensors using membrane switch arrays 有权
    指纹传感器采用薄膜开关阵列

    公开(公告)号:US06889565B2

    公开(公告)日:2005-05-10

    申请号:US10038505

    申请日:2001-12-20

    摘要: A sensor for identifying fingerprints or other skin textures includes an array of cells each including a membrane switch. Each switch includes a fixed lower electrode disposed on a chip substrate, and a flexible membrane disposed over the lower electrode and capable of flexing downward to establish electrical contact between the lower electrode and an upper electrode. The upper electrode can form the membrane itself or a layer of the membrane, or can be attached to other membrane layers. Switches situated underneath skin ridges change state (e.g. are closed) by the applied pressure, while switches underneath skin valleys remain in their quiescent state (e.g. open). Adjacent switch chambers are connected by fluid tunnels which allow the passage of air between the chambers. Each chamber is substantially closed to the exterior of the sensor, such that particles from the environment cannot contaminate the switch contact surface defined between the switch electrodes. The cells are preferably not hermetically sealed, such that the pressure within the chamber interiors can stay equal to the external (atmospheric) pressure in varying environmental conditions. The membrane design of the cells according to the preferred embodiment allows improved sensor robustness, enhanced resistance to impact forces, decreased vulnerability to particle contamination, and reduced inter-cell crosstalk.

    摘要翻译: 用于识别指纹或其他皮肤纹理的传感器包括每个包括薄膜开关的单元阵列。 每个开关包括设置在芯片基板上的固定下电极和设置在下电极上并能够向下弯曲以在下电极和上电极之间建立电接触的柔性膜。 上电极可以形成膜本身或膜的一层,或者可以附着到其它膜层。 位于皮肤脊下方的开关通过施加的压力改变状态(例如,闭合),而皮肤谷下方的开关保持其静止状态(例如打开)。 相邻开关室通过流体通道连接,允许空气在室之间通过。 每个室基本上关闭到传感器的外部,使得来自环境的颗粒不会污染限定在开关电极之间的开关接触表面。 电池优选不是气密密封的,使得腔室内部的压力可以在变化的环境条件下保持等于外部(大气压)的压力。 根据优选实施例的电池的膜设计允许改进的传感器鲁棒性,增强的对冲击力的抵抗力,降低的对颗粒污染的脆弱性以及减小的电池间串扰。

    Flexible imaging pressure sensor
    6.
    发明授权
    Flexible imaging pressure sensor 有权
    灵活的成像压力传感器

    公开(公告)号:US07373843B2

    公开(公告)日:2008-05-20

    申请号:US11145534

    申请日:2005-06-02

    IPC分类号: G01D7/00

    摘要: A sensor for a textured surface (e.g., a fingerprint) is provided. The sensor includes a flexible substrate and a flexible membrane supported above the substrate by one or more spacers. The sensor also includes multiple pressure sensor elements responsive to a separation between parts of the membrane and corresponding parts of the substrate. The membrane is conformable to the textured surface being sensed, so the variation in separation between substrate and membrane is representative of the textured surface being sensed. A preferred sensor array arrangement has a set of parallel substrate electrodes on the substrate facing the membrane and a set of parallel membrane electrodes on the membrane facing the substrate, where the substrate and membrane electrodes are perpendicular. The sensor array is preferably an entirely passive structure including no active electrical devices, to reduce cost. Row and column addressing circuitry can be provided as separate units (e.g., ASIC chips) to be hybrid integrated with the sensor array.

    摘要翻译: 提供用于纹理表面的传感器(例如,指纹)。 传感器包括柔性基板和通过一个或多个间隔件支撑在基板上方的柔性膜。 传感器还包括多个压力传感器元件,其响应于膜的部分与基底的相应部分之间的分离。 该膜适应于被感测的纹理表面,因此基底和膜之间的间隔的变化代表被感测的纹理表面。 优选的传感器阵列布置在面向膜的基板上具有一组平行的基板电极,并且在膜上面对衬底的一组平行膜电极,其中基板和膜电极垂直。 传感器阵列优选是不包括有源电气装置的完全无源结构,以降低成本。 行和列寻址电路可以作为与传感器阵列混合集成的分离单元(例如,ASIC芯片)提供。

    Use of multi-layer thin films as stress sensor
    7.
    发明授权
    Use of multi-layer thin films as stress sensor 失效
    使用多层薄膜作为应力传感器

    公开(公告)号:US06694822B1

    公开(公告)日:2004-02-24

    申请号:US09502406

    申请日:2000-02-10

    IPC分类号: G01L100

    CPC分类号: G01L1/125 B82Y25/00

    摘要: The present invention provides a pressure sensing device that includes at least one GMR sensor, and preferably an array of GMR sensors, with each GMR sensor having a conducting spacer layer interposed between two ferromagnetic layers. In an unbiased state, the magnetization vector of each of the ferromagnetic layers is preferably parallel to each other. Upon application of a current, however, the magnetization vector of each ferromagnetic layer is changed, preferably to an antiparallel position, in which state the sensor is used to then sense stress applied thereto. Upon application of stress, the magnetization vectors of both free magnetic layers will rotate, thus causing a corresponding and proportionally related change in the resistance of the sensor. This change in resistance can be sensed and used to calculate the stress applied thereto.

    摘要翻译: 本发明提供了一种压力感测装置,其包括至少一个GMR传感器,并且优选地是GMR传感器阵列,每个GMR传感器具有介于两个铁磁层之间的导电间隔层。 在非偏置状态下,每个铁磁层的磁化矢量优选彼此平行。 然而,当施加电流时,每个铁磁层的磁化矢量被改变,优选地改变为反平行位置,在该状态下,传感器用于感测施加到其上的应力。 施加应力时,两个自由磁性层的磁化矢量将旋转,从而导致传感器电阻的相应且成比例的相关变化。 电阻的这种变化可被感测并用于计算施加到其上的应力。

    Carbon overcoat with electrically conductive adhesive layer for magnetic
head sliders
    8.
    发明授权
    Carbon overcoat with electrically conductive adhesive layer for magnetic head sliders 失效
    碳涂层,带有用于磁头滑块的导电粘合剂层

    公开(公告)号:US5654850A

    公开(公告)日:1997-08-05

    申请号:US286935

    申请日:1994-08-08

    摘要: A slider of the type for use with a rotatable magnetic disk is disclosed. The slider has two ends and a bottom surface which includes an air bearing surface. An adhesive layer and continuous coating of carbon is located on the air bearing surface. A method of sputter depositing this continuous layer of carbon upon the air bearing surface of the slider is also provided. The continuous layer of carbon is crown-shaped and deposited using the sputtering technique. The carbon is directed from a source at the air bearing surface of a slider. A mask is placed between the source and slider so that the carbon is deposited in a crown shape. When the slider is viewed from front to rear the maximum depth of the coating is less than about 6 to 10 nm, while at the ends of the slider the coating depth is near 0 nm. The resistivity of the protective carbon layer is controlled for the additional benefit of protection from damages by electrostatic discharge.

    摘要翻译: 公开了一种与可旋转磁盘一起使用的滑块。 滑块具有两个端部和包括空气支承表面的底面。 粘合剂层和连续的碳涂层位于空气轴承表面上。 还提供了一种在滑块的空气支承表面上溅射沉积该连续碳层的方法。 连续的碳层是冠状的并且使用溅射技术沉积。 碳从滑块的空气支承表面处的源被引导。 将掩模放置在源和滑块之间,使得碳沉积成冠状。 当从前到后观察滑块时,涂层的最大深度小于约6至10nm,而在滑块的端部,涂层深度接近0nm。 控制保护层的电阻率可以防止静电放电造成的损害。

    Method and apparatus for protection of contour sensing devices
    9.
    发明授权
    Method and apparatus for protection of contour sensing devices 失效
    用于保护轮廓感测装置的方法和装置

    公开(公告)号:US07316167B2

    公开(公告)日:2008-01-08

    申请号:US11090315

    申请日:2005-03-25

    IPC分类号: G01D7/00

    摘要: A sheet film protective covering for different types of contour sensing devices is described. In a preferred embodiment, this covering is a mylar sheet film that is coated with a layer of a conductive material. The bottom surface of the mylar film is also preferably coated with a layer of an adhesive. The sheet film covering preferably is contiguous and serves the purpose, among other things, to protect the underlying surface of the pressure-sensing device from contaminants and from electrostatic discharge, as well provide force concentration during use.

    摘要翻译: 描述了用于不同类型轮廓感测装置的薄膜保护罩。 在优选的实施方案中,该覆盖物是涂覆有导电材料层的聚酯薄膜片。 聚酯薄膜的底表面也优选涂覆有一层粘合剂。 薄膜覆盖物优选是连续的,并且用于除其他之外,保护压力感测装置的下面的表面免受污染物和静电放电的影响,并且在使用期间提供力集中。