公开(公告)号：US06859062B2

公开(公告)日：2005-02-22

申请号：US10069520

申请日：2001-07-05

申请人： Tatuhisa Fujii ,  Shogo Ishioka

发明人： Tatuhisa Fujii ,  Shogo Ishioka

IPC分类号： G01R31/02 ,  G01R31/00 ,  G02F1/13 ,  G02F1/133 ,  G02F1/1362 ,  G09F9/00 ,  G09G3/00

CPC分类号： G09G3/006 ,  G02F2001/136254

摘要： The present invention provides an inspection apparatus and inspection method capable of inspecting the shape of a board used in a liquid crystal panel with high fineness and efficiency. A computer 21 controls an X-electrode select section 22 and a Y-electrode select section 23 to drive liquid crystal driving electrodes 102 selectively. A FLASHSHOCK Sensor 1 is located at a position opposed to a board 100 in a non-contact manner. The FLASHSHOCK Sensor 1 is adapted to detect each potential variation caused in the liquid crystal electrodes 101-104 and then output the detected potential variation to the computer 21 as a detect signal. The computer 21 receives the detect signal from the FLASHSHOCK Sensor 1 to create image data, and detects disconnection, short-circuit, chipping or the like in the liquid crystal electrodes based on the created image data. Further, the computer 21 displays an image representing each shape of the liquid crystal electrodes on a display 21a.

摘要翻译： 本发明提供一种检查装置和检查方法，其能够以高细度和高效率检查液晶面板中使用的板的形状。 计算机21控制X电极选择部22和Y电极选择部23，以选择性地驱动液晶驱动电极102。 FLASHSHOCK传感器1以非接触的方式位于与板100相对的位置。 FLASHSHOCK传感器1适于检测在液晶电极101-104中引起的每个电位变化，然后将检测到的电位变化输出到计算机21作为检测信号。 计算机21接收来自FLASHSHOCK传感器1的检测信号以产生图像数据，并且基于所创建的图像数据检测液晶电极中的断开，短路，碎片等。 此外，计算机21在显示器21a上显示表示各种形状的液晶电极的图像。

公开(公告)号：US06734692B2

公开(公告)日：2004-05-11

申请号：US09926357

申请日：2001-10-22

申请人： Tatuhisa Fujii ,  Shogo Ishioka ,  Shuji Yamaoka

发明人： Tatuhisa Fujii ,  Shogo Ishioka ,  Shuji Yamaoka

IPC分类号： G01R3102

CPC分类号： G01R31/2812

摘要： It is an object of the present invention to finely inspect a dimension of a conductive pattern. A sensor element 12a includes an MOSFET. A diffusion layer of the MOSFET having a larger surface area serves as a passive element, and is placed opposes to the conductive pattern. The passive element is formed continuously with a source of the MOSFET to be electrically conductive thereto. A gate of the MOSFET is connected to a vertical select section 14, and a drain of the MOSFET is connected to a lateral select section 13. When a sensor element 12a is selected by a timing generating section 15, a signal is transmitted from the vertical select section 14 to the gate to turn on the MOSFET. In this moment, if an inspection signal is output from a probe 22, the potential in the conductive pattern 101 is varied. Thus, a current flows from the source to the drain and then the current is transmitted to a signal processing section 16 through the lateral select section 13. By analyzing the position of the sensor element which outputs a detect signal, the position of the conductive pattern 101 in a circuit board 100 may be discriminated.

摘要翻译： 本发明的目的是精细地检查导电图案的尺寸。传感器元件12a包括MOSFET。 具有较大表面积的MOSFET的扩散层用作无源元件，并被放置成与导电图案相对。 无源元件与MOSFET的源极连续形成以与其导电。 MOSFET的栅极连接到垂直选择部分14，并且MOSFET的漏极连接到横向选择部分13.当由定时产生部分15选择传感器元件12a时，信号从垂直方向 选择第14节到门以打开MOSFET。 此时，如果从探头22输出检查信号，导电图案101的电位变化。 因此，电流从源极流到漏极，然后通过横向选择部分13将电流传输到信号处理部分16.通过分析输出检测信号的传感器元件的位置，导电图案的位置 可以区分电路板100中的101。

公开(公告)号：US06710607B2

公开(公告)日：2004-03-23

申请号：US09926606

申请日：2001-11-26

申请人： Tatuhisa Fujii ,  Shogo Ishioka ,  Shuji Yamaoka

发明人： Tatuhisa Fujii ,  Shogo Ishioka ,  Shuji Yamaoka

IPC分类号： G01R3102

CPC分类号： G01R31/302 ,  G01R31/304 ,  G01R31/312

摘要： The present invention provides an inspection apparatus and method capable of intuitively obtaining inspection results of circuit wirings. An inspection system 20 comprises a sensor chip 1 including plural sensor elements, a computer 21, probes 22 for supplying an inspection signal to circuit wirings 101, and a selector 23 for switching the supply of the inspection signal to the probes 22. The computer 21 receives the detected signals from the sensor chip 1, and generates an image data to display an image of the circuit wirings as an inspection subject on a display 21a. This make it possible to check the shape of the specific circuit wiring and to detect defects such as disconnection, short-circuit, and chipping in the circuit wiring 101 based on the generated image data and the design image data representing the design circuit wiring.

摘要翻译： 本发明提供一种能够直观地获得电路布线的检查结果的检查装置和方法。 检查系统20包括传感器芯片1，其包括多个传感器元件，计算机21，用于向电路布线101提供检查信号的探针22以及用于切换向检测器22提供检查信号的选择器23.计算机21 从传感器芯片1接收检测到的信号，并生成图像数据，以在显示器21a上显示作为检查对象的电路布线的图像。 由此，能够根据生成的图像数据和表示设计电路布线的设计图像数据，检查电路布线的形状，检测电路布线101中的断线，短路，切断等缺陷。

公开(公告)号：US06861863B2

公开(公告)日：2005-03-01

申请号：US09926347

申请日：2001-02-16

申请人： Shogo Ishioka ,  Tatuhisa Fujii

发明人： Shogo Ishioka ,  Tatuhisa Fujii

IPC分类号： G01R1/06 ,  G01R1/04 ,  G01R31/02 ,  G01R31/28 ,  G01R31/302 ,  H01L21/66 ,  H01R31/02

CPC分类号： G01R1/0433 ,  G01R1/0483 ,  G01R31/2886

摘要： An inspection apparatus is provided capable of adequately positioning an inspection chip to a conductive pattern as an inspection object. For connecting an electrode pad 1b of an inspection chip 1 with a lead 2a of a package 2, bump electrodes 3 and 4 are first provided at the inspection chip and at the package, respectively. Then, an anisotropic conductor 5 is provided to cover between the bump electrodes 3 and 4, and a conductor film 6 is provided on the anisotropic conductor 5 to extend between the bump electrodes 3 and 4. The anisotropic conductor 5 is thermo-compression bonded to provide an electrical connection between the conductor film 6 and the bump electrodes 3 and 4. This structure may provide a desirable surface of the inspection chip 1 having a sufficiently reduced thickness.

摘要翻译： 提供一种能够将检查芯片适当地定位到作为检查对象的导电图案的检查装置。 为了将检查芯片1的电极焊盘1b与封装2的引线2a连接起来，首先在检查芯片和封装处设置凸起电极3和4。 然后，提供各向异性导体5以覆盖凸起电极3和4之间，并且在各向异性导体5上设置导体膜6以在凸起电极3和4之间延伸。各向异性导体5被热压接合到 在导体膜6和凸起电极3和4之间提供电连接。该结构可以提供具有足够减小的厚度的检查芯片1的期望表面。

公开(公告)号：US06992493B2

公开(公告)日：2006-01-31

申请号：US10478496

申请日：2002-05-23

申请人： Shuji Yamaoka ,  Shogo Ishioka

发明人： Shuji Yamaoka ,  Shogo Ishioka

IPC分类号： G01R27/26

CPC分类号： G01B7/003

摘要： Disclosed is an apparatus and method for detecting positional displacement of a board. A board 20 having a surface formed with a conductive pattern 25 is transferred in a direction A while supplying an AC signal from a power supply section 3 to the surface of the board. The level of positional displacement of the board is detected in accordance with the transfer speed of the board and the difference between the timings of the intermediate signal levels generated when the AC signal is sensed by a pair of position sensors 1, 2 opposed to the leading edge of the board. The present invention allows positional displacement of the board to be detected in a simple non-contact structure while maintaining a high degree of accuracy without variation over time.

摘要翻译： 公开了一种用于检测板的位置偏移的装置和方法。 具有形成有导电图案25的表面的板20沿着方向A传送，同时从电源部3向板的表面提供AC信号。 根据电路板的传送速度来检测电路板的位置偏移水平，并且当由与一个位置传感器1,2对置的一对位置传感器1,2感测到AC信号时产生的中间信号电平的定时之间的差异 边缘的板子。 本发明允许在简单的非接触结构中进行待检测的板的位置位移，同时保持高精度而不随时间变化。

公开(公告)号：US06943559B2

公开(公告)日：2005-09-13

申请号：US10480106

申请日：2002-06-06

申请人： Shuji Yamaoka ,  Shogo Ishioka

发明人： Shuji Yamaoka ,  Shogo Ishioka

IPC分类号： G01R31/02 ,  G01R31/304 ,  G01R31/312 ,  H05K3/00 ,  H01H31/02 ,  G01R27/26

CPC分类号： G01R31/304 ,  G01R31/312

摘要： Disclosed is an circuit-pattern inspection apparatus comprising a power supply element 30 adapted to be capacitively coupled with a parallel array of conductive patterns 20 to supply an inspection signal to one end of each of the conductible patterns, an open sensor 40 adapted to be capacitively coupled with all of the other ends of the conductive patterns to detect the inspection signal, and a short sensor 50 arranged at a position displaced from the power supply element 30 and adapted to be capacitively coupled with two lines of the conductive patterns to detect the inspection signal. The quality of the conductive pattern is inspected such that the presence of disconnection is determined when the detect signal from the open sensor 40 is largely reduced, and the presence of short is determined when the detect signal from the short sensor 50 largely rises and then falls. The circuit-pattern inspection apparatus can detect defects in a circuit board reliably and readily.

摘要翻译： 公开了一种电路图案检查装置，其包括电源元件30，电源元件30适于与导电图案20的并行阵列电容耦合，以向每个可导电图案的一端提供检查信号，开放式传感器40适于电容化 与传导图案的所有另一端耦合以检测检查信号;以及短传感器50，布置在从电源元件30偏离的位置处，并适于与两条导电图案电容耦合以检测检查 信号。 检查导电图案的质量，使得当来自开路传感器40的检测信号被大大减小时确定断开的存在，并且当来自短传感器50的检测信号大大上升然后下降时确定短路的存在 。 电路图案检查装置可以可靠且容易地检测电路板中的缺陷。

公开(公告)号：US07088107B2

公开(公告)日：2006-08-08

申请号：US10536996

申请日：2003-11-28

申请人： Shuji Yamaoka ,  Hiroshi Hamori ,  Shogo Ishioka

发明人： Shuji Yamaoka ,  Hiroshi Hamori ,  Shogo Ishioka

IPC分类号： G01R31/02

CPC分类号： G01R31/2808

摘要： Disclosed is a circuit pattern inspection apparatus for inspecting a conductive pattern of a circuit board which includes first and second comb-shaped conductive patterns (15a, 15b) each having a plurality of terminal portions arranged substantially parallel to each other and a base portion connecting respective anchor ends of the terminal portions together, wherein the terminal portions of the first comb-shaped conductive pattern are alternately arranged with respect to the terminal portions of said second comb-shaped conductive pattern, and the first second comb-shaped conductive patterns (15a, 15b) are adapted, respectively, to be supplied with an AC inspection signal, and grounded. The circuit pattern inspection apparatus having first and second detection means (20, 30) each having a detection electrode for detecting a signal from the first and second comb-shaped conductive patterns, and a scalar robot (80) operable to move each of the first and second detection means (20, 30) across common ones of the terminal portions, while allowing them be capacitively coupled with the terminal portions.

摘要翻译： 公开了一种电路图案检查装置，用于检查电路板的导电图案，其包括第一和第二梳状导电图案（15a，15b），每个梳状导电图案具有彼此大致平行的多个端子部分， 将所述端子部的各个锚定端部连接在一起，其中，所述第一梳状导电图案的端子部分相对于所述第二梳状导电图案的端子部分交替布置，并且所述第一第二梳状导电图案 15a，15b）分别适于提供交流检测信号并接地。 电路图案检查装置具有第一和第二检测装置（20,30），每个检测装置具有用于检测来自第一和第二梳状导电图案的信号的检测电极，以及标量机器人（80），其可操作以使第一和第二梳状导电图案中的每一个移动 和第二检测装置（20,30），同时允许它们与端子部分电容耦合。

公开(公告)号：US07049826B2

公开(公告)日：2006-05-23

申请号：US10129097

申请日：2001-09-10

申请人： Koji Okano ,  Shogo Ishioka

发明人： Koji Okano ,  Shogo Ishioka

IPC分类号： G01R31/228

CPC分类号： G01R31/312 ,  G01R31/2812

摘要： The present invention discloses a technique for inspecting a branched circuit wiring having branch portions branched halfway therefrom by using a less number of non-contact sensors. An inspection method for inspecting a branched circuit wiring having three or more ends, including the steps of: supplying an inspection signal to one end of the branched circuit wiring; disposing one or more non-contact sensors for detecting the inspection signal while being in non-contact with the branched circuit wiring over the remaining ends other than one end of the branched circuit wiring; and determining if any disconnection is caused in the branched circuit wiring, based on the inspection signal detected by the one or more non-contact sensors. The disposing step includes the step of arranging at least one of the one or more non-contact sensors to cover the remaining ends.

摘要翻译： 本发明公开了一种通过使用较少数量的非接触式传感器检查具有分支部分的分支电路布线的技术。 一种用于检查具有三个或更多端的分支电路布线的检查方法，包括以下步骤：向分支电路布线的一端提供检查信号; 配置一个或多个非接触式传感器，用于检测检查信号，同时在除了分支电路布线的一端之外的其余端上与分支电路布线不接触; 并且基于由所述一个或多个非接触式传感器检测到的检查信号，确定在所述分支电路布线中是否引起断线。 所述布置步骤包括布置所述一个或多个非接触式传感器中的至少一个来覆盖剩余端部的步骤。

公开(公告)号：US06995566B2

公开(公告)日：2006-02-07

申请号：US10478351

申请日：2002-05-23

申请人： Shuji Yamaoka ,  Shogo Ishioka

发明人： Shuji Yamaoka ,  Shogo Ishioka

IPC分类号： G01R31/28

CPC分类号： G01R31/312 ,  G01R31/2812 ,  G01R31/304

摘要： Disclosed is a circuit-pattern inspection apparatus for inspecting a comb-shaped pattern 20 having an edge region formed as a plurality of finger pattern segments and a base region formed as an integral connection pattern segment, and a plurality of discrete patterns 30 each disposed between the adjacent finger pattern segments in a non-connecting manner and being not in connecting with the remaining discrete patterns. The inspection apparatus comprises means for supplying an AC signal alternately to either one of the finger pattern segments and both the finger pattern segments and the discrete patterns while maintaining the other at a ground potential, and sensors 131, 132, 133 for detecting the AC signal disposed in the edge region. The inspection apparatus can reliably detect the presence of defects in a circuit board without any difficulties.

摘要翻译： 公开了一种电路图案检查装置，用于检查具有形成为多个指形图案区段的边缘区域和形成为整体连接图案区段的基部区域的梳状图案20，以及多个离散图案30，其分别设置在 相邻的指形图案段以不连接的方式分段，并且不与剩余的离散图案连接。 所述检查装置包括：将交流信号交替地提供给所述手指图案段和所述指形图案段和所述离散图案中的任一个同时保持另一个处于接地电位的装置;以及用于检测所述AC信号的传感器131,132,133 设置在边缘区域。 检查装置可以在没有任何困难的情况下可靠地检测电路板中的缺陷的存在。

公开(公告)号：US06952104B2

公开(公告)日：2005-10-04

申请号：US10461875

申请日：2003-06-16

申请人： Shuji Yamaoka ,  Shogo Ishioka

发明人： Shuji Yamaoka ,  Shogo Ishioka

IPC分类号： G01R31/02 ,  G01R31/28 ,  H05K3/00 ,  H01H31/02 ,  G01R27/26

CPC分类号： G01R31/2812

摘要： An inspection apparatus and method are disclosed. The inspection apparatus comprises a probe 30 having a width equal to or less than that of the layout pitch of conductive patterns 15 to be inspected, and a sensor section 20 having an area capable of covering the layout region of the conductive patterns. The probe 30 is adapted to be scanningly moved across an inspection-signal supply region including respective portions of the conductive patterns. The sensor section 20 is positioned opposed to the conductive patterns 15. An AC inspection signal is fed from an AC power source 35 to the probe 30 to form a capacitive coupling between one electrode or the conductive pattern, and the other electrode or the sensor section 20, and a detected signal from the sensor section 20 is amplified through an amplifier 25 to check the detected signal. Then, it is determined if each of the conductive patterns supplied with the inspection signal includes a short-circuit, according to whether the level of the detected signal is different from a signal level in a normal state. The present invention can provide an inspection apparatus and method capable of readily detecting a short-circuit possibly existing in various conductive patterns, in a simple control.

摘要翻译： 公开了一种检查装置和方法。 检查装置包括具有等于或小于要检查的导电图案15的布局间距的宽度的探针30和具有能够覆盖导电图案的布局区域的区域的传感器部分20。 探头30适于扫描地移动穿过包括导电图案的相应部分的检查信号供应区域。 传感器部分20定位成与导电图案15相对.AC检测信号从AC电源35馈送到探针30，以形成一个电极或导电图案之间的电容耦合，另一个电极或传感器部分 20，并且来自传感器部分20的检测信号通过放大器25被放大以检查检测到的信号。 然后，根据检测信号的电平是否与正常状态下的信号电平不同，确定提供有检查信号的每个导电图案是否包括短路。 本发明可以提供一种在简单的控制下能够容易地检测出可能存在于各种导电图案中的短路的检查装置和方法。