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公开(公告)号：US07225528B2
公开(公告)日：2007-06-05
申请号：US10972325
申请日：2004-10-26
申请人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa
发明人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa
CPC分类号： G11B5/855 , Y10T29/49021 , Y10T29/49032 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a magnetic recording medium that has a sufficiently flat surface and includes a recording layer having a concavo-convex pattern that provides favorable accuracy of recording and reproduction. The manufacturing method includes the steps of: forming a lower non-magnetic film over a recording layer having a concavo-convex pattern; and forming an upper non-magnetic film on the lower non-magnetic film to fill concave portions 34 of the concavo-convex pattern. A bias power is applied to an object to be processed at least in the step of forming the upper non-magnetic film, and no bias power or a smaller bias power than the bias power applied in the step of forming the upper non-magnetic film is applied in the formation of the lower non-magnetic film.
摘要翻译： 一种制造具有足够平坦表面的磁记录介质的方法，包括具有提供良好记录和再现精度的凹凸图案的记录层。 该制造方法包括以下步骤：在具有凹凸图案的记录层上形成下部非磁性膜; 并且在下部非磁性膜上形成上部非磁性膜以填充凹凸图案的凹部34。 至少在形成上部非磁性膜的步骤中，对要处理的物体施加偏置功率，并且与形成上部非磁性膜的步骤中施加的偏置功率相比，没有偏置功率或较小的偏置功率 用于形成较低的非磁性膜。
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2.发明申请Method of dry etching, method of manufacturing magnetic recording medium, and magnetic recording medium 失效干蚀刻方法，制造磁记录介质的方法和磁记录介质公开(公告)号：US20050284842A1
公开(公告)日：2005-12-29
申请号：US11156469
申请日：2005-06-21
申请人： Shuichi Okawa , Kazuhiro Hattori , Mikiharu Hibi , Mitsuru Takai
发明人： Shuichi Okawa , Kazuhiro Hattori , Mikiharu Hibi , Mitsuru Takai
IPC分类号： B44C1/22 , C03C15/00 , C03C25/68 , C23F1/00 , C23F4/00 , G11B5/65 , G11B5/73 , G11B5/74 , G11B5/82 , G11B5/855
摘要： The recording layer (to-be-etched layer), a main mask layer, and a sub mask layer are formed in this order over a substrate, and the sub mask layer is processed into a predetermined concavo-convex pattern. Next, parts of the main mask layer under the concave portions are removed by reactive ion etching using oxygen or ozone as the reactive gas. Parts of the recording layer under the concave portions are also removed by dry etching, whereby the recording layer is shaped into the concavo-convex pattern. The main mask layer is chiefly made of carbon. The sub mask layer is made of a material having an etching rate lower than that of carbon with respect to the reactive ion etching in the step of processing the main mask layer.
摘要翻译： 在衬底上依次形成记录层（被蚀刻层），主掩模层和副掩模层，并将子掩模层加工成预定的凹凸图案。 接下来，通过使用氧或臭氧作为反应气体的反应离子蚀刻除去凹部下方的主掩模层的一部分。 通过干法蚀刻除去凹部下面的记录层的部分，由此将记录层成形为凹凸图案。 主掩模层主要由碳制成。 在处理主掩模层的步骤中，子掩模层由相对于反应离子蚀刻的蚀刻速率低于碳的蚀刻速率的材料制成。
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3.发明授权公开(公告)号：US07538041B2
公开(公告)日：2009-05-26
申请号：US11206874
申请日：2005-08-19
申请人： Mitsuru Takai , Kazuhiro Hattori , Takahiro Suwa , Shuichi Okawa
发明人： Mitsuru Takai , Kazuhiro Hattori , Takahiro Suwa , Shuichi Okawa
IPC分类号： H01L21/302
CPC分类号： G11B5/855
摘要： A magnetic recording medium is provided in which a magnetic recording layer 5 is provided in a predetermined concavo-convex pattern on a substrate 1A, a concave portion in a concavo-convex pattern is filled with a non-magnetic material, and a non-magnetic layer 16 formed of the non-magnetic material positioned at the bottom surface of the concave portion in the non-magnetic materials is formed on a convex portion of the concavo-convex pattern while surface of the convex portion and the concave portion is substantially flattened, and a thickness of the non-magnetic layer 16 is 1 nm or less.
摘要翻译： 提供一种磁记录介质，其中在基板1A上以预定的凹凸图案设置磁记录层5，凹凸图案的凹部填充有非磁性材料，并且非磁性 形成在非磁性材料的凹部的底面的非磁性材料形成的层16形成在凹凸图案的凸部上，同时凸部和凹部的表面基本平坦化， 非磁性层16的厚度为1nm以下。
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4.发明授权Method of dry etching, method of manufacturing magnetic recording medium, and magnetic recording medium 失效干蚀刻方法，制造磁记录介质的方法和磁记录介质公开(公告)号：US07488429B2
公开(公告)日：2009-02-10
申请号：US11156469
申请日：2005-06-21
申请人： Shuichi Okawa , Kazuhiro Hattori , Mikiharu Hibi , Mitsuru Takai
发明人： Shuichi Okawa , Kazuhiro Hattori , Mikiharu Hibi , Mitsuru Takai
摘要： The recording layer (to-be-etched layer), a main mask layer, and a sub mask layer are formed in this order over a substrate, and the sub mask layer is processed into a predetermined concavo-convex pattern. Next, parts of the main mask layer under the concave portions are removed by reactive ion etching using oxygen or ozone as the reactive gas. Parts of the recording layer under the concave portions are also removed by dry etching, whereby the recording layer is shaped into the concavo-convex pattern. The main mask layer is chiefly made of carbon. The sub mask layer is made of a material having an etching rate lower than that of carbon with respect to the reactive ion etching in the step of processing the main mask layer.
摘要翻译： 在衬底上依次形成记录层（被蚀刻层），主掩模层和副掩模层，并将子掩模层加工成预定的凹凸图案。 接下来，通过使用氧或臭氧作为反应气体的反应离子蚀刻除去凹部下方的主掩模层的一部分。 通过干法蚀刻除去凹部下面的记录层的部分，由此将记录层成形为凹凸图案。 主掩模层主要由碳制成。 在处理主掩模层的步骤中，子掩模层由相对于反应离子蚀刻的蚀刻速率低于碳的蚀刻速率的材料制成。
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5.发明授权公开(公告)号：US07470374B2
公开(公告)日：2008-12-30
申请号：US10535265
申请日：2004-07-28
申请人： Kazuhiro Hattori , Mitsuru Takai , Shuichi Okawa
发明人： Kazuhiro Hattori , Mitsuru Takai , Shuichi Okawa
IPC分类号： C23F1/00 , H01L21/306
CPC分类号： G11B5/855
摘要： A manufacturing method of a magnetic recording medium, and the like are provided, which can suppress misalignment of a processed shape of divided recording elements and magnetic degradation and can efficiently manufacture a magnetic recording medium having good magnetic characteristics. In the manufacturing method, ion beam etching is used as a dry etching technique for a continuous recording layer 20. Before dry etching of the continuous recording layer 20, a resist layer 26 is removed. As the material for a first mask layer covering the continuous recording layer, diamond like carbon is used.
摘要翻译： 提供了一种磁记录介质的制造方法等，其可以抑制分割的记录元件的加工形状的不对准和磁性劣化，并且可以有效地制造具有良好磁特性的磁记录介质。 在制造方法中，使用离子束蚀刻作为连续记录层20的干蚀刻技术。在连续记录层20的干蚀刻之前，去除抗蚀剂层26。 作为覆盖连续记录层的第一掩模层的材料，使用类金刚石碳。
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公开(公告)号：US20050196650A1
公开(公告)日：2005-09-08
申请号：US11065142
申请日：2005-02-24
申请人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa , Mikiharu Hibi
发明人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa , Mikiharu Hibi
CPC分类号： G11B5/855 , Y10T428/24355 , Y10T428/24479 , Y10T428/24488 , Y10T428/24537 , Y10T428/2457
摘要： A magnetic recording medium includes at least a disk substrate 1, a magnetic recording layer 5 formed with a predetermined concavo-convex pattern on the disk substrate 1, and a non-magnetic layer 6 formed in concave portions of the concavo-convex pattern. Convex shapes made of a non-magnetic material are formed on the magnetic recording layer 5 or the non-magnetic layer 6. Each convex shape is formed, for example, into a mountain-like shape whose upper surface width (W1 or W2) is made smaller than width W5 of each convex portion of the magnetic recording layer 5 or width W6 of each concave portion where the non-magnetic layer 6 is formed.
摘要翻译： 磁记录介质至少包括盘基板1，在盘基板1上形成有预定的凹凸图案的磁记录层5以及形成在凹凸图案的凹部中的非磁性层6。 在磁记录层5或非磁性层6上形成由非磁性材料形成的凸形。每个凸形形成为例如上表面宽度（W 1或W 2）的山形 ）被制成小于磁记录层5的每个凸部的宽度W 5或形成非磁性层6的每个凹部的宽度W 6。
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公开(公告)号：US20050086795A1
公开(公告)日：2005-04-28
申请号：US10972325
申请日：2004-10-26
申请人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa
发明人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa
CPC分类号： G11B5/855 , Y10T29/49021 , Y10T29/49032 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a magnetic recording medium that has a sufficiently flat surface and includes a recording layer having a concavo-convex pattern that provides favorable accuracy of recording and reproduction. The manufacturing method includes the steps of: forming a lower non-magnetic film over a recording layer having a concavo-convex pattern; and forming an upper non-magnetic film on the lower non-magnetic film to fill concave portions 34 of the concavo-convex pattern. A bias power is applied to an object to be processed at least in the step of forming the upper non-magnetic film, and no bias power or a smaller bias power than the bias power applied in the step of forming the upper non-magnetic film is applied in the formation of the lower non-magnetic film.
摘要翻译： 一种制造具有足够平坦表面的磁记录介质的方法，包括具有提供良好记录和再现精度的凹凸图案的记录层。 该制造方法包括以下步骤：在具有凹凸图案的记录层上形成下部非磁性膜; 并且在下部非磁性膜上形成上部非磁性膜以填充凹凸图案的凹部34。 至少在形成上部非磁性膜的步骤中，对要处理的物体施加偏置功率，并且与形成上部非磁性膜的步骤中施加的偏置功率相比，没有偏置功率或较小的偏置功率 用于形成较低的非磁性膜。
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8.发明授权Mask forming method, mask forming functional layer, dry etching method, and method of manufacturing an information recording medium 失效掩模形成方法，掩模形成功能层，干蚀刻方法和信息记录介质的制造方法公开(公告)号：US07531103B2
公开(公告)日：2009-05-12
申请号：US10947289
申请日：2004-09-23
IPC分类号： B44C1/22
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/855 , Y10T428/24802
摘要： A mask forming method forms an A mask forming functional layer with an amorphous structure so as to cover an etched body, forms a B mask forming functional layer so as to cover the formed A mask forming functional layer, forms a convex/concave pattern in the formed B mask forming functional layer by carrying out a predetermined process to form a B mask on the A mask forming functional layer, and forms an A mask on the etched body by forming a convex/concave pattern in the A mask forming functional layer by dry etching the A mask forming functional layer using the B mask. By doing so, a convex/concave pattern with extremely small pattern fluctuations can be formed in the A mask forming functional layer.
摘要翻译： 掩模形成方法形成具有非晶结构的A掩模形成功能层以覆盖蚀刻体，形成B掩模形成功能层，以覆盖所形成的A掩模形成功能层，在其中形成凸/凹图案 通过在A掩模形成功能层上进行预定处理以形成B掩模形成B掩模形成功能层，并且通过在A掩模形成功能层中通过干燥形成凸/凹图案在蚀刻体上形成A掩模 使用B掩模蚀刻形成A掩模的功能层。 通过这样做，可以在A掩模形成功能层中形成具有极小图案波动的凸/凹图案。
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公开(公告)号：US07480924B2
公开(公告)日：2009-01-20
申请号：US11056976
申请日：2005-02-14
IPC分类号： G11B7/09
CPC分类号： B82Y10/00 , G11B5/012 , G11B5/65 , G11B5/74 , G11B5/743 , G11B5/855 , G11B2005/0002 , G11B2005/0005 , G11B2005/001 , G11B2005/0021 , G11B2005/0029
摘要： A magnetic recording and reproducing device includes: a magnetic recording medium in which a magnetic recording layer is formed in a concavo-convex pattern so that tracks are formed by convex portions of a predetermined track width and arranged in parallel in the track width direction; a heating head for heating the magnetic recording medium to partially reduce coercivity of the tracks; a recording head for applying a recording magnetic field to a heated portion of the magnetic recording medium to record magnetic data on the tracks; and a reproducing head for detecting a reproducing magnetic field of the tracks. In this configuration, an effective recording area has an effective recording width that is equal to or more than the track width, and equal to or less than a sum of the track width and a doubled value of width of concave portions between the tracks.
摘要翻译： 磁记录和再现装置包括：磁记录介质，其中磁记录层形成为凹凸图案，使得轨道由预定轨道宽度的凸部形成并沿轨道宽度方向平行布置; 用于加热磁记录介质以部分地降低轨道的矫顽力的加热头; 记录头，用于将记录磁场施加到磁记录介质的加热部分，以将磁数据记录在轨道上; 以及用于检测轨道的再现磁场的再现头。 在该配置中，有效记录区域具有等于或大于轨道宽度的有效记录宽度，并且等于或小于轨道宽度和轨迹之间的凹部宽度的双倍值之和。
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10.发明申请公开(公告)号：US20060063042A1
公开(公告)日：2006-03-23
申请号：US11206874
申请日：2005-08-19
申请人： Mitsuru Takai , Kazuhiro Hattori , Takahiro Suwa , Shuichi Okawa
发明人： Mitsuru Takai , Kazuhiro Hattori , Takahiro Suwa , Shuichi Okawa
IPC分类号： G11B5/706
CPC分类号： G11B5/855
摘要： A magnetic recording medium is provided in which a magnetic recording layer 5 is provided in a predetermined concavo-convex pattern on a substrate 1A, a concave portion in a concavo-convex pattern is filled with a non-magnetic material, and a non-magnetic layer 16 formed of the non-magnetic material positioned at the bottom surface of the concave portion in the non-magnetic materials is formed on a convex portion of the concavo-convex pattern while surface of the convex portion and the concave portion is substantially flattened, and a thickness of the non-magnetic layer 16 is 1 nm or less.
摘要翻译： 提供一种磁记录介质，其中在基板1A上以预定的凹凸图案设置磁记录层5，凹凸图案的凹部填充有非磁性材料， 形成在非磁性材料的凹部的底面的非磁性材料形成的磁性层16形成在凹凸图案的凸部上，凸部和凹部的表面基本平坦化 ，非磁性层16的厚度为1nm以下。
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