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公开(公告)号：US5018145A
公开(公告)日：1991-05-21
申请号：US401228
申请日：1989-08-31
申请人： Shuji Kikuchi , Yoshio Ouchida , Ryohei Kamiya
发明人： Shuji Kikuchi , Yoshio Ouchida , Ryohei Kamiya
IPC分类号： G01R31/3183 , G01R31/319
CPC分类号： G01R31/31921
摘要： To speed up the pattern generator which is a bottleneck for speedup of an LSI tester, a continuous address control information for generating addresses for continuous pattern memory read is generated at a speed 1/N (N is an optional number larger than 1) times the operation speed of the continuous address generator, and the address controller is divided into a 1st and a 2nd address controller. The two controllers are connected via a buffer memory to ensure the normal operation when the correspondence between address control instructions and patterns to be continuously read is not 1:N. Continuous address information generated by the 1st address controller is stored in the buffer memory. The second address controller, which actually generates continuous addresses, receives the continuous address information from the buffer memory, outputs the addresses to the pattern memory at a speed N times of the operation speed of the 1st address controller, and receives the next continuous address information from the buffer memory once again when the continuous address generation is finished to repeat the operation mentioned above.
摘要翻译： 为了加速作为LSI测试器的加速的瓶颈的模式发生器，以连续模式存储器读取的地址的连续地址控制信息以N（N是大于1的任意数量）倍的速度产生， 连续地址发生器的运行速度，地址控制器分为第一和第二地址控制器。 当地址控制指令和连续读取的模式之间的对应关系不是1：N时，两个控制器通过缓冲存储器连接，以确保正常操作。 由第一地址控制器生成的连续地址信息存储在缓冲存储器中。 实际生成连续地址的第二地址控制器从缓冲存储器接收连续的地址信息，以第一地址控制器的操作速度的N倍的速度将地址输出到模式存储器，并且接收下一个连续的地址信息 当连续地址生成完成时，再次从缓冲存储器重复上述操作。
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公开(公告)号：US08212325B2
公开(公告)日：2012-07-03
申请号：US12737170
申请日：2009-06-23
IPC分类号： H01L29/84
CPC分类号： H03H3/0076 , H03H9/2473 , H03H2009/02496
摘要： An electrostatic vibrator has a vibrating plate including beam-shaped vibrating parts each fixed at opposite ends thereof and configured for electrostatic actuation to perform flexural vibration, and temperature compensation parts connected to the vibrating parts. A silicon oxide film covers each of the vibrating parts but not the temperature compensation parts. A substrate is mounted in parallel relation to the vibrating plate. An oxide layer is disposed between the substrate to the vibrating plate. Electrodes are formed on the substrate and arranged on opposite sides of each of the vibrating parts.
摘要翻译： 静电振动器具有振动板，该振动板包括各自固定在其相对两端的波形振动部件，并被构造成用于进行静电致动以进行弯曲振动，以及温度补偿部件连接到振动部件。 氧化硅膜覆盖每个振动部分，但不覆盖温度补偿部分。 基板与振动板平行地安装。 氧化层设置在基板与振动板之间。 电极形成在基板上并布置在每个振动部分的相对侧上。
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公开(公告)号：US20110127621A1
公开(公告)日：2011-06-02
申请号：US12737170
申请日：2009-06-23
IPC分类号： H01L29/84
CPC分类号： H03H3/0076 , H03H9/2473 , H03H2009/02496
摘要： A silicon oxide film 113 is formed on the vibrating parts 102 and 103 of an MEMS-type electrostatically-actuated flexural vibrator. At least one structure where no oxide film is formed is provided near the vibrating parts 102 and 103. By employing a structure in which both ends of the structure and both ends of the vibrating parts 102 and 103 are integrally formed, a compressive stress is applied to the vibrating parts 102 and 103. As a result, the frequency temperature characteristics can be improved.
摘要翻译： 在MEMS型静电致动弯曲振动器的振动部件102和103上形成氧化硅膜113。 在振动部件102和103附近设置至少一个没有形成氧化膜的结构。通过采用其结构的两端和振动部件102和103的两端一体形成的结构，施加压缩应力 到振动部102和103.结果，可以提高频率温度特性。
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