公开(公告)号：US20100147793A1

公开(公告)日：2010-06-17

申请号：US12635083

申请日：2009-12-10

申请人： Tadanobu Nagami ,  Junichi Kobayashi ,  Takeshi Terada ,  Makoto Watanabe ,  Hiroyuki Abo ,  Mitsunori Toshishige ,  Yoshinori Tagawa ,  Shuji Koyama ,  Kenji Fujii ,  Masaki Ohsumi ,  Jun Yamamuro ,  Hiroyuki Murayama ,  Yoshinobu Urayama ,  Taichi Yonemoto

发明人： Tadanobu Nagami ,  Junichi Kobayashi ,  Takeshi Terada ,  Makoto Watanabe ,  Hiroyuki Abo ,  Mitsunori Toshishige ,  Yoshinori Tagawa ,  Shuji Koyama ,  Kenji Fujii ,  Masaki Ohsumi ,  Jun Yamamuro ,  Hiroyuki Murayama ,  Yoshinobu Urayama ,  Taichi Yonemoto

IPC分类号： G11B5/127

CPC分类号： B41J2/1603 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639 ,  Y10T29/49401

摘要： The present invention provides a method for producing a liquid discharge head including a silicon substrate having, on a first surface, energy generating elements, and a supply port penetrating the substrate from the first surface to a second surface, which is a rear surface of the first surface of the substrate. The method includes the steps of: preparing the silicon substrate having a sacrifice layer at a portion on the first surface where the ink supply port is to be formed and an etching mask layer having a plurality of openings on the second surface, the volume of a portion of the sacrifice layer at a position corresponding to a portion between two adjacent said openings being smaller than the volume of a portion of the sacrifice layer at a position corresponding to the opening; etching the silicon substrate from the plurality of openings and etching the sacrifice layer.

摘要翻译： 本发明提供了一种液体排出头的制造方法，该液体排出头包括硅基板，该第一表面在第一表面上具有能量产生元件和从第一表面穿过该基板的供给口， 基片的第一表面。 该方法包括以下步骤：在要形成供墨口的第一表面上的一部分制备具有牺牲层的硅衬底和在第二表面上具有多个开口的蚀刻掩模层， 牺牲层的与相邻的两个开口之间的部分相对应的位置处的部分比对应于开口的位置处的牺牲层的一部分的体积小; 从多个开口蚀刻硅衬底并蚀刻牺牲层。

公开(公告)号：US07300596B2

公开(公告)日：2007-11-27

申请号：US11481796

申请日：2006-07-07

申请人： Hiroyuki Murayama ,  Shuji Koyama ,  Yoshinori Tagawa ,  Kenji Fujii ,  Masaki Ohsumi ,  Yoshinobu Urayama ,  Jun Yamamuro ,  Tsuyoshi Takahashi ,  Masahisa Watanabe

发明人： Hiroyuki Murayama ,  Shuji Koyama ,  Yoshinori Tagawa ,  Kenji Fujii ,  Masaki Ohsumi ,  Yoshinobu Urayama ,  Jun Yamamuro ,  Tsuyoshi Takahashi ,  Masahisa Watanabe

IPC分类号： B41J2/05 ,  H01L21/00

CPC分类号： B41J2/1603 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2/1639 ,  B41J2/164 ,  B41J2/1645

摘要： The method of manufacturing a recording head has a flow path wall forming step of forming flow path walls on a substrate having energy generating elements formed thereon, an imbedded material depositing step of depositing an imbedded material between the flow path walls and on a top of each flow path wall, a flattening step of polishing a top of the deposited imbedded material, until the top of the flow path wall is exposed, and a step of forming an orifice plate on the tops of the polished imbedded material and the exposed flow path wall. In the step of forming the flow path walls, patterning of a close contact property improvement layer is simultaneously performed to improve a close contact property between the flow path wall and the substrate.

摘要翻译： 制造记录头的方法具有流路壁形成步骤，在其上形成有能量产生元件的基板上形成流路壁，嵌入材料沉积步骤，在流路壁之间和每个顶部上沉积嵌入材料 流动路径壁，抛光沉积的嵌入材料的顶部的平坦化步骤，直到流动路径壁的顶部被暴露，以及在抛光的嵌入材料的顶部上形成孔板的步骤和暴露的流动路径壁 。 在形成流路壁的步骤中，同时进行紧密接触性改善层的图案化，以改善流路壁和基板之间的紧密接触性。

公开(公告)号：US07901064B2

公开(公告)日：2011-03-08

申请号：US11625537

申请日：2007-01-22

申请人： Yoshinobu Urayama ,  Kenji Fujii ,  Masaki Ohsumi ,  Jun Yamamuro ,  Hiroyuki Murayama ,  Yoshinori Tagawa ,  Shuji Koyama

发明人： Yoshinobu Urayama ,  Kenji Fujii ,  Masaki Ohsumi ,  Jun Yamamuro ,  Hiroyuki Murayama ,  Yoshinori Tagawa ,  Shuji Koyama

IPC分类号： B41J2/175 ,  B41J2/05 ,  B41J2/045

CPC分类号： B41J2/1603 ,  B41J2/14145 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2/1639 ,  B41J2/1645 ,  B41J2002/14403

摘要： An ink jet recording head includes: a substrate; a plurality of ink discharge ports formed to a front face side of the substrate, and a plurality of ink flow paths communicating with the ink discharge ports; an ink supply opening extending through the substrate and communicating with the plurality of ink flow paths; and a filter formed in an opening portion of the ink supply opening arranged in the front face side of the substrate, the filter being constituted of two or more stacked films having formed therein a plurality of opening portions. In this case, the stacked films are arranged with a spacing therebetween.

摘要翻译： 喷墨记录头包括：基板; 形成在所述基板的正面侧的多个排墨口以及与所述排墨口连通的多个墨流路; 供墨开口，延伸穿过基板并与多个墨流路连通; 以及形成在所述基板的正面侧的所述供墨口的开口部的过滤器，所述过滤器由形成有多个开口部的两层以上的层叠膜构成。 在这种情况下，堆叠的膜以它们之间的间隔布置。

公开(公告)号：US07891784B2

公开(公告)日：2011-02-22

申请号：US12019505

申请日：2008-01-24

申请人： Noriyasu Ozaki ,  Junichi Kobayashi ,  Shuji Koyama ,  Tadanobu Nagami ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hiroyuki Murayama ,  Masaki Ohsumi ,  Jun Yamamuro ,  Yoshinobu Urayama ,  Hiroyuki Abo ,  Takeshi Terada ,  Masahisa Watanabe ,  Taichi Yonemoto

发明人： Noriyasu Ozaki ,  Junichi Kobayashi ,  Shuji Koyama ,  Tadanobu Nagami ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hiroyuki Murayama ,  Masaki Ohsumi ,  Jun Yamamuro ,  Yoshinobu Urayama ,  Hiroyuki Abo ,  Takeshi Terada ,  Masahisa Watanabe ,  Taichi Yonemoto

IPC分类号： B41J2/045

CPC分类号： B41J2/14129 ,  B41J2202/11 ,  Y10T29/49401

摘要： A liquid ejection head and a method of forming the same. The liquid ejection head includes a substrate, an ejection port, a liquid channel, and a supply port. The substrate has, above one side thereof, an energy generating element configured to generate energy used to eject liquid. The ejection port, from which a liquid is ejected, is located at a position corresponding to the energy generating element. The liquid channel communicates with the ejection port and penetrates the substrate from the one side to another side of the substrate. The supply port communicates with the liquid channel. The substrate has a projecting layer extending inward of an inner peripheral portion of an opening in the supply port in the one side, and the projecting layer and the energy generating element are formed of the same material.

摘要翻译： 液体喷射头及其形成方法。 液体喷射头包括基板，喷射口，液体通道和供给口。 衬底在其一侧上具有被配置为产生用于喷射液体的能量的能量产生元件。 排出液体的喷射口位于与能量产生元件相对应的位置。 液体通道与喷射口连通并从衬底的一侧到另一侧穿透衬底。 供应口与液体通道连通。 基板具有从一侧的供给口的开口的内周部向内延伸的突出层，突出层和能量产生元件由相同的材料形成。

公开(公告)号：US08329047B2

公开(公告)日：2012-12-11

申请号：US12635083

申请日：2009-12-10

申请人： Tadanobu Nagami ,  Junichi Kobayashi ,  Takeshi Terada ,  Makoto Watanabe ,  Hiroyuki Abo ,  Mitsunori Toshishige ,  Yoshinori Tagawa ,  Shuji Koyama ,  Kenji Fujii ,  Masaki Ohsumi ,  Jun Yamamuro ,  Hiroyuki Murayama ,  Yoshinobu Urayama ,  Taichi Yonemoto

发明人： Tadanobu Nagami ,  Junichi Kobayashi ,  Takeshi Terada ,  Makoto Watanabe ,  Hiroyuki Abo ,  Mitsunori Toshishige ,  Yoshinori Tagawa ,  Shuji Koyama ,  Kenji Fujii ,  Masaki Ohsumi ,  Jun Yamamuro ,  Hiroyuki Murayama ,  Yoshinobu Urayama ,  Taichi Yonemoto

IPC分类号： G01D15/00

CPC分类号： B41J2/1603 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639 ,  Y10T29/49401

摘要： The present invention provides a method for producing a liquid discharge head including a silicon substrate having, on a first surface, energy generating elements, and a supply port penetrating the substrate from the first surface to a second surface, which is a rear surface of the first surface of the substrate. The method includes the steps of: preparing the silicon substrate having a sacrifice layer at a portion on the first surface where the ink supply port is to be formed and an etching mask layer having a plurality of openings on the second surface, the volume of a portion of the sacrifice layer at a position corresponding to a portion between two adjacent said openings being smaller than the volume of a portion of the sacrifice layer at a position corresponding to the opening; etching the silicon substrate from the plurality of openings and etching the sacrifice layer.

摘要翻译： 本发明提供了一种液体排出头的制造方法，该液体排出头包括硅基板，该第一表面在第一表面上具有能量产生元件和从第一表面穿过该基板的供给口， 基片的第一表面。 该方法包括以下步骤：在要形成供墨口的第一表面上的一部分制备具有牺牲层的硅衬底和在第二表面上具有多个开口的蚀刻掩模层， 牺牲层的与相邻的两个开口之间的部分相对应的位置处的部分比对应于开口的位置处的牺牲层的一部分的体积小; 从多个开口蚀刻硅衬底并蚀刻牺牲层。

公开(公告)号：US08128204B2

公开(公告)日：2012-03-06

申请号：US13009709

申请日：2011-01-19

申请人： Noriyasu Ozaki ,  Junichi Kobayashi ,  Shuji Koyama ,  Tadanobu Nagami ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hiroyuki Murayama ,  Masaki Ohsumi ,  Jun Yamamuro ,  Yoshinobu Urayama ,  Hiroyuki Abo ,  Takeshi Terada ,  Masahisa Watanabe ,  Taichi Yonemoto

发明人： Noriyasu Ozaki ,  Junichi Kobayashi ,  Shuji Koyama ,  Tadanobu Nagami ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hiroyuki Murayama ,  Masaki Ohsumi ,  Jun Yamamuro ,  Yoshinobu Urayama ,  Hiroyuki Abo ,  Takeshi Terada ,  Masahisa Watanabe ,  Taichi Yonemoto

IPC分类号： B41J2/05 ,  B41J2/04 ,  G11B5/127 ,  B21D53/76

CPC分类号： B41J2/14129 ,  B41J2202/11 ,  Y10T29/49401

摘要： A liquid ejection head and a method of forming the same. The liquid ejection head includes a substrate, an ejection port, a liquid channel, and a supply port. The substrate has, above one side thereof, an energy generating element configured to generate energy used to eject liquid. The ejection port, from which a liquid is ejected, is located at a position corresponding to the energy generating element. The liquid channel communicates with the ejection port and penetrates the substrate from the one side to another side of the substrate. The supply port communicates with the liquid channel. The substrate has a projecting layer extending inward of an inner peripheral portion of an opening in the supply port in the one side, and the projecting layer and the energy generating element are formed of the same material.

摘要翻译： 液体喷射头及其形成方法。 液体喷射头包括基板，喷射口，液体通道和供给口。 衬底在其一侧上具有被配置为产生用于喷射液体的能量的能量产生元件。 排出液体的喷射口位于与能量产生元件相对应的位置。 液体通道与喷射口连通并从衬底的一侧到另一侧穿透衬底。 供应口与液体通道连通。 基板具有从一侧的供给口的开口的内周部向内延伸的突出层，突出层和能量产生元件由相同的材料形成。

公开(公告)号：US07930824B2

公开(公告)日：2011-04-26

申请号：US12411901

申请日：2009-03-26

申请人： Masaki Ohsumi ,  Shuji Koyama ,  Yoshinori Tagawa ,  Hiroyuki Murayama ,  Kenji Fujii ,  Yoshinobu Urayama ,  Jun Yamamuro

发明人： Masaki Ohsumi ,  Shuji Koyama ,  Yoshinori Tagawa ,  Hiroyuki Murayama ,  Kenji Fujii ,  Yoshinobu Urayama ,  Jun Yamamuro

IPC分类号： B23P17/00 ,  B21D53/00 ,  G01D15/00 ,  G11B5/127 ,  B41J2/05

CPC分类号： B41J2/1603 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1634 ,  B41J2/1639 ,  B41J2/1645 ,  Y10T29/494 ,  Y10T29/49401

摘要： A method of manufacturing an ink jet recording head includes the steps of: forming an adhesive layers and the side walls of a flow path on a substrate; pasting a dry film, which is a part of a flow path forming member, on the side walls; and forming discharge ports in the layer.

摘要翻译： 一种制造喷墨记录头的方法包括以下步骤：在基底上形成粘合层和流路的侧壁; 在侧壁上粘贴作为流路形成构件的一部分的干膜; 并在该层中形成排出口。

公开(公告)号：US07735961B2

公开(公告)日：2010-06-15

申请号：US11551084

申请日：2006-10-19

申请人： Shuji Koyama ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hiroyuki Murayama ,  Masaki Ohsumi ,  Jun Yamamuro ,  Yoshinobu Urayama

发明人： Shuji Koyama ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hiroyuki Murayama ,  Masaki Ohsumi ,  Jun Yamamuro ,  Yoshinobu Urayama

IPC分类号： B41J2/205

CPC分类号： B41J2/1433 ,  B41J2/162 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1637 ,  B41J2/1645

摘要： A liquid discharge head including an energy generating element configured to generate energy required for discharging a liquid, a substrate having the energy generating element formed thereon, and an orifice member provided on the substrate and including a plurality of discharge ports facilitating discharging the liquid and a plurality of flow paths communicating respectively with the plurality of discharge ports. The orifice member is constituted by a first resin forming a portion connected to at least the substrate and a second resin connected to the first resin and forming the plurality of discharge ports, and the first resin includes a silane material in a larger amount than the second resin.

摘要翻译： 一种液体排出头，包括被配置为产生排出液体所需的能量的能量产生元件，其上形成有能量产生元件的基板和设置在该基板上的孔部件，并且包括多个排出口以排出液体， 多个流路与多个排出口分别连通。 孔部件由形成至少与基板连接的部分的第一树脂和与第一树脂连接并形成多个排出口的第二树脂构成，第一树脂包括比第二树脂更大量的硅烷材料 树脂。

公开(公告)号：US20070178248A1

公开(公告)日：2007-08-02

申请号：US11669535

申请日：2007-01-31

申请人： Masaki OHSUMI ,  Shuji Koyama ,  Yoshinori Tagawa ,  Hiroyuki Murayama ,  Kenji Fujii ,  Yoshinobu Urayama ,  Jun Yamamuro

发明人： Masaki OHSUMI ,  Shuji Koyama ,  Yoshinori Tagawa ,  Hiroyuki Murayama ,  Kenji Fujii ,  Yoshinobu Urayama ,  Jun Yamamuro

IPC分类号： B05D3/00 ,  C08J7/18 ,  G21H5/00

CPC分类号： B41J2/1603 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1634 ,  B41J2/1639 ,  B41J2/1645 ,  Y10T29/494 ,  Y10T29/49401

摘要： A method of manufacturing an ink jet recording head includes the steps of: forming an adhesive layers and the side walls of a flow path on a substrate; pasting a dry film, which is a part of a flow path forming member, on the side walls; and forming discharge ports in the layer.

摘要翻译： 一种制造喷墨记录头的方法包括以下步骤：在基底上形成粘合层和流路的侧壁; 在侧壁上粘贴作为流路形成构件的一部分的干膜; 并在该层中形成排出口。

公开(公告)号：US20070091147A1

公开(公告)日：2007-04-26

申请号：US11551084

申请日：2006-10-19

申请人： Shuji Koyama ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hiroyuki Murayama ,  Masaki Ohsumi ,  Jun Yamamuro ,  Yoshinobu Urayama

发明人： Shuji Koyama ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hiroyuki Murayama ,  Masaki Ohsumi ,  Jun Yamamuro ,  Yoshinobu Urayama

IPC分类号： B41J2/05

CPC分类号： B41J2/1433 ,  B41J2/162 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1637 ,  B41J2/1645

摘要： A liquid discharge head including an energy generating element configured to generate energy required for discharging a liquid, a substrate having the energy generating element formed thereon, and an orifice member provided on the substrate and including a plurality of discharge ports facilitating discharging the liquid and a plurality of flow paths communicating respectively with the plurality of discharge ports. The orifice member is constituted by a first resin forming a portion connected to at least the substrate and a second resin connected to the first resin and forming the plurality of discharge ports, and the first resin includes a silane material in a larger amount than the second resin.

摘要翻译： 一种液体排出头，包括被配置为产生排出液体所需的能量的能量产生元件，其上形成有能量产生元件的基板和设置在该基板上的孔部件，并且包括多个排出口以排出液体， 多个流路与多个排出口分别连通。 孔部件由形成至少与基板连接的部分的第一树脂和与第一树脂连接并形成多个排出口的第二树脂构成，第一树脂包括比第二树脂更大量的硅烷材料 树脂。