公开(公告)号：US20060240180A1

公开(公告)日：2006-10-26

申请号：US11474316

申请日：2006-06-26

申请人： Shuji Yamada ,  Tadayasu Meguro ,  Satoshi Takezawa

发明人： Shuji Yamada ,  Tadayasu Meguro ,  Satoshi Takezawa

IPC分类号： B05D5/12

CPC分类号： H01J1/316

摘要： A substrate for electron source formation on which a plurality of electron-emitting devices are arranged, comprising a layer where SiO2 is made a main component on the substrate, wherein an etching rate of the SiO2 layer at room temperature in 0.4 wt % of hydrogen fluoride ammonium solution (NH4-HF2) is 150 nm/min or less reducing the time-dependent change of an electron emission characteristic of an electron-emitting device in low cost, sharply improving the increasing speed of a device current If and the uniformity of final arrival values of If sharply reducing the dispersion of the electron emission characteristic, and an electron source and an image-forming apparatus that each use-the substrate.

摘要翻译： 一种用于形成电子源的衬底，其上布置有多个电子发射器件，包括在衬底上形成SiO 2主要成分的层，其中SiO < 2 H 4 SO 4在室温下在0.4重量％的氟化氢铵溶液（NH 4 -HF 2 2）中的浓度为150nm /分钟以下， 电子发射器件的电子发射特性依赖性变化，大大提高器件电流If的增加速度和最终到达值的均匀性，如果急剧减小电子发射特性的分散，以及电子源 以及各自使用的图像形成装置 - 基板。

公开(公告)号：US07067236B2

公开(公告)日：2006-06-27

申请号：US10619575

申请日：2003-07-16

申请人： Shuji Yamada ,  Takahiro Hachisu ,  Tadayasu Meguro

发明人： Shuji Yamada ,  Takahiro Hachisu ,  Tadayasu Meguro

IPC分类号： G03C5/00

CPC分类号： G03F7/0035 ,  G02F1/136286 ,  G03F7/2022 ,  G03F7/2024 ,  H01J9/027

摘要： The present invention provides a method of manufacturing a member pattern having a patterned member on a substrate, the method including: a first exposure step of exposing a desired region of a negative type photosensitive material applied to the substrate to light from a first direction; a second exposure step of exposing the desired region of the negative type photosensitive material to light from a second direction opposite to the first direction; a development step of performing development after the exposure steps to form a precursor pattern of the member; and a step of baking the precursor pattern.

摘要翻译： 本发明提供一种制造在衬底上具有图案化构件的构件图案的方法，该方法包括：将施加到衬底的负型感光材料的期望区域从第一方向曝光的第一曝光步骤; 第二曝光步骤，将负型感光材料的期望区域从与第一方向相反的第二方向曝光; 在曝光步骤之后进行显影以形成该构件的前体图案的显影步骤; 以及烘烤前体图案的步骤。

公开(公告)号：US07095168B2

公开(公告)日：2006-08-22

申请号：US09845286

申请日：2001-05-01

申请人： Tadayasu Meguro ,  Kazuya Ishiwata ,  Shuji Yamada ,  Fumikazu Kobayashi

发明人： Tadayasu Meguro ,  Kazuya Ishiwata ,  Shuji Yamada ,  Fumikazu Kobayashi

IPC分类号： H01J1/62

CPC分类号： H01J9/027 ,  H01J1/316

摘要： An electron source forming substrate comprises an insulating material film provided on a substrate surface, where an electron-emitting device is arranged. The insulating material film contains a metallic oxide and has a vacancy, so that the vacancy suppresses diffusion of Na from a substrate thereunder, thereby electron-emitting characteristic is maintained stable without adverse effect due to Na even after long time operation.

公开(公告)号：US06815884B2

公开(公告)日：2004-11-09

申请号：US09847420

申请日：2001-05-03

申请人： Shuji Yamada ,  Kazuya Ishiwata ,  Tadayasu Meguro

发明人： Shuji Yamada ,  Kazuya Ishiwata ,  Tadayasu Meguro

IPC分类号： H01J162

CPC分类号： H01J1/3048 ,  H01J9/022 ,  H01J2201/30446 ,  H01J2329/00

摘要： An electron source forming substrate wherein an insulating material film is disposed on the surface of the substrate at which surface an electron-emitting device is arranged. The insulating material film contains a plurality of metallic oxide particles having an average particle size within the range of 6 nm to 60 nm as expressed in a median value, and suppresses undesirable diffusion of Na from the substrate, thereby makes stable an electron-emitting characteristics, without an adverse effect due to the Na diffusion, even elapsing longer time.

摘要翻译： 一种电子源形成基板，其中绝缘材料膜设置在基板的表面上，在该表面上布置电子发射器件。 绝缘材料膜含有以中值表示的平均粒径在6nm〜60nm的范围内的多个金属氧化物粒子，并抑制不希望的Na从衬底的扩散，从而使电子发射特性稳定 ，由于Na扩散而没有不利影响，甚至经过更长的时间。

公开(公告)号：US06803707B2

公开(公告)日：2004-10-12

申请号：US09846364

申请日：2001-05-02

申请人： Kazuya Ishiwata ,  Shuji Yamada ,  Tadayasu Meguro

发明人： Kazuya Ishiwata ,  Shuji Yamada ,  Tadayasu Meguro

IPC分类号： H01J1304

CPC分类号： H01J9/027

摘要： Disclosed is an electron source forming substrate provided with an insulating material layer provided on the surface of a substrate, at which surface an electron-emitting device is disposed, wherein the insulating material layer has a plurality of partially exposed metal oxide particles on its surface. Also disclosed are an electron source including a substrate and an electron-emitting device arranged on the substrate, wherein the substrate is an electron source forming substrate as described above, and an image display apparatus including an envelope, an electron-emitting device arranged in the envelope, and an image display member adapted to display images through application of electrons from the electron-emitting device, wherein a substrate on which the electron-emitting device is arranged is an electron source forming substrate as described above.

摘要翻译： 公开了一种电子源形成基板，其设置有设置在基板的表面上的绝缘材料层，在该表面设置有电子发射器件，其中绝缘材料层在其表面上具有多个部分暴露的金属氧化物颗粒。 还公开了包括基板和布置在基板上的电子发射器件的电子源，其中基板是如上所述的电子源形成基板，以及包括外壳的图像显示装置，布置在该基板中的电子发射器件 信封和图像显示构件，其适于通过施加来自电子发射器件的电子来显示图像，其中其上布置有电子发射器件的衬底是如上所述的电子源形成衬底。