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    Near field optical probe and manufacturing method thereof
    2.
    发明授权
    Near field optical probe and manufacturing method thereof 失效
    近场光探针及其制造方法

    公开(公告)号：US06541755B1

    公开(公告)日：2003-04-01

    申请号：US09448152

    申请日：1999-11-24

    申请人： Shunsuke Fujita ,  Motoichi Ohtsu ,  Motonobu Kourogi

    发明人： Shunsuke Fujita ,  Motoichi Ohtsu ,  Motonobu Kourogi

    IPC分类号： H01J314

    CPC分类号： G01Q60/22

    摘要： In a near field optical probe, a through hole having an aperture is provided in a semiconductor photodetector including at least a first-conductive-type high-concentration impurity layer, a first-conductive-type low-concentration impurity layer and a second-conductivity impurity-introduced region.

    摘要翻译： 在近场光学探针中，具有孔径的通孔设置在至少包括第一导电型高浓度杂质层，第一导电型低浓度杂质层和第二导电型低浓度杂质层的半导体光电检测器中 杂质引入区域。

    Interference detecting apparatus and tomography apparatus
    4.
    发明授权
    Interference detecting apparatus and tomography apparatus 有权
    干涉检测装置及断层摄影装置

    公开(公告)号：US06493091B2

    公开(公告)日：2002-12-10

    申请号：US09784000

    申请日：2001-02-16

    申请人： Motonobu Kourogi ,  Motoichi Ohtsu

    发明人： Motonobu Kourogi ,  Motoichi Ohtsu

    IPC分类号： G01B902

    CPC分类号： G01B9/02008 ,  G01B9/02002 ,  G01N21/4795

    摘要： Measurement of an internal structure of a sample is performed using interference of light within a short time. Through a first optical frequency comb generator 5 using a first signal having a frequency f1 and generating reference light having a sideband every interval of the frequency f1 and a second optical frequency comb generator 6 using a second signal having a frequency f2 and generating object light having a sideband every interval of the frequency f2, and sweeping of emission timing between the reference light and the object light, by changing a phase difference or frequency difference between the first signal and second signal, and detecting a change in light intensity of the interference light due to the interference, operation of detecting the interference position is made at a high speed.

    摘要翻译： 样品的内部结构的测量使用光在短时间内的干扰来进行。 通过第一光频梳发生器5，使用具有频率f1的第一信号，并且产生具有频率f1的每个间隔的边带的参考光;以及使用具有频率f2的第二信号产生第二光频梳发生器6，并产生具有 频带f2的每个间隔的边带，以及通过改变第一信号和第二信号之间的相位差或频率差来扫描参考光和对象光之间的发射定时，以及检测干涉光的光强度的变化 由于干扰，高速地进行检测干扰位置的动作。

    Variable-aperture optical near-field probe
    5.
    发明授权
    Variable-aperture optical near-field probe 失效
    可变孔径光学近场探头

    公开(公告)号：US06340813B1

    公开(公告)日：2002-01-22

    申请号：US09496050

    申请日：2000-02-02

    申请人： Junji Tominaga ,  Takashi Nakano ,  Nobufumi Atoda ,  Motonobu Kourogi ,  Motoichi Ohtsu

    发明人： Junji Tominaga ,  Takashi Nakano ,  Nobufumi Atoda ,  Motonobu Kourogi ,  Motoichi Ohtsu

    IPC分类号： H01J314

    CPC分类号： G01Q60/22

    摘要： Disclosed is an improved optical near-field probe for optical near-field microscopy or optical near-field recording having an effective aperture diameter variable to comply with different applications. The improvement comprises attaching, to the aperture end opening of an optical fiber-based probe, a thin film made from a substance which is opaque but capable of being rendered transparent, such as antimony or photo-chromic compounds, by irradiation with light so that the center area only of the end opening becomes transparent and transmits the laser beam to serve as an effective aperture of a diameter variable depending on the intensity of the light.

    摘要翻译： 公开了一种用于光学近场显微镜或光学近场记录的改进的光学近场探测器，其具有有效孔径可变以符合不同的应用。 改进之处在于，通过光照射将由不透明但能够变得透明的物质（例如锑或光铬化合物）制成的薄膜附着到基于光纤的探针的孔径端开口上，使得 端部开口的中心区域变得透明，并且透射激光束以作为根据光的强度的直径变化的有效孔径。

    Photo-detection device and method
    6.
    发明授权
    Photo-detection device and method 失效
    光检测装置及方法

    公开(公告)号：US07586085B2

    公开(公告)日：2009-09-08

    申请号：US10563626

    申请日：2004-07-08

    申请人： Motoichi Ohtsu ,  Motonobu Kourogi ,  Shuji Mononobe ,  Takashi Yatsui ,  Koji Yamamoto ,  Toshiyuki Inokuchi ,  Masato Takada

    发明人： Motoichi Ohtsu ,  Motonobu Kourogi ,  Shuji Mononobe ,  Takashi Yatsui ,  Koji Yamamoto ,  Toshiyuki Inokuchi ,  Masato Takada

    IPC分类号： H01J3/14 ,  H01J37/00

    CPC分类号： G01Q60/22 ,  G01N21/55 ,  G02B21/002

    摘要： The broad range measurement exploiting the usual propagated light and the high resolution measurement mode exploiting near-field light are to be accomplished with a sole as-assembled optical probe. To this end, light radiated through an optical probe 13 having a light shielding coating layer 33 formed for defining a light radiating aperture D or light radiated at a core 31 of the optical probe 13 is propagated, as the optical probe 13 is moved in a direction towards and away from a surface for measurement 2a. The core of the optical probe is coated with a light shielding coating layer 33. In this manner, a spot of propagated light propagated through the core 31 or a spot of near-field light seeping from the light radiating aperture D is formed on the surface for measurement 2a, and light derived from the spot of light is detected.

    摘要翻译： 利用普通传播光的宽范围测量和利用近场光的高分辨率测量模式将通过唯一的组装的光学探针来实现。 为此，通过具有形成为限定发光孔径D的光屏蔽被覆层33的光学探头13照射的光或者在光学探针13的芯31处照射的光被传播，因为光学探针13被移动到 朝向和远离用于测量的表面2a的方向。 光探头的芯部涂覆有遮光涂层33.以这种方式，通过芯31传播的传播光斑或从光辐射孔D渗透的近场光斑被形成在表面上 用于测量2a，并且检测从光斑导出的光。

    Optical fiber probe, optical detection device, and optical detection method
    7.
    发明授权
    Optical fiber probe, optical detection device, and optical detection method 失效
    光纤探头，光学检测装置和光学检测方法

    公开(公告)号：US07586084B2

    公开(公告)日：2009-09-08

    申请号：US11547032

    申请日：2006-02-02

    申请人： Izumi Itoh ,  Masato Takada ,  Taroh Terashi ,  Motoichi Ohtsu ,  Takashi Yatsui ,  Motonobu Kourogi

    发明人： Izumi Itoh ,  Masato Takada ,  Taroh Terashi ,  Motoichi Ohtsu ,  Takashi Yatsui ,  Motonobu Kourogi

    IPC分类号： G02B6/26

    CPC分类号： G01Q60/22

    摘要： An optical detection device image is disclosed that allows fast measurements using near-field light at high resolution and high efficiency but without necessity of position alignment of an optical fiber probe. The optical detection device includes an optical fiber probe having a core for propagating light with an optical probe being formed at a front end of the core; a movement control unit to move the optical fiber probe to approach or depart from a sample; and a detection unit to detect light from the sample surface, wherein on the front end surface of the core of the optical probe, there are a first exit section on a peripheral side for emitting propagating light and a second exit section for seeping out the near-field light, the first exit section and the second exit section are formed in a concentric manner, and the tilt angle of the first exit section is different from the tilt angle of the second exit section.

    摘要翻译： 公开了一种光学检测装置图像，其允许使用高分辨率和高效率的近场光进行快速测量，但不需要光纤探针的位置对准。 光学检测装置包括光纤探针，其具有用于传播光的芯，光纤探针形成在芯的前端; 移动控制单元，用于移动光纤探针以接近或离开样本; 以及检测单元，用于检测来自所述样品表面的光，其中在所述光学探针的所述芯的前端表面上，在用于发射传播光的外围侧上具有第一出射部分，以及用于渗出所述近端的第二出射部分 第一出口部和第二出口部以同心方式形成，第一出口部的倾斜角度与第二出口部的倾斜角度不同。

    Optical Fiber Probe, Optical Detection Device, And Optical Detection Method
    10.
    发明申请
    Optical Fiber Probe, Optical Detection Device, And Optical Detection Method 失效
    光纤探头，光学检测装置和光学检测方法

    公开(公告)号：US20080073518A1

    公开(公告)日：2008-03-27

    申请号：US11547032

    申请日：2006-02-02

    申请人： Izumi Itoh ,  Masato Takada ,  Taroh Terashi ,  Motoichi Ohtsu ,  Takashi Yatsui ,  Motonobu Kourogi

    发明人： Izumi Itoh ,  Masato Takada ,  Taroh Terashi ,  Motoichi Ohtsu ,  Takashi Yatsui ,  Motonobu Kourogi

    IPC分类号： G01N23/00

    CPC分类号： G01Q60/22

    摘要： An optical detection device image is disclosed that allows fast measurements using near-field light at high resolution and high efficiency but without necessity of position alignment of an optical fiber probe. The optical detection device includes an optical fiber probe having a core for propagating light with an optical probe being formed at a front end of the core; a movement control unit to move the optical fiber probe to approach or depart from a sample; and a detection unit to detect light from the sample surface, wherein on the front end surface of the core of the optical probe, there are a first exit section on a peripheral side for emitting propagating light and a second exit section for seeping out the near-field light, the first exit section and the second exit section are formed in a concentric manner, and the tilt angle of the first exit section is different from the tilt angle of the second exit section.

    摘要翻译： 公开了一种光学检测装置图像，其允许使用高分辨率和高效率的近场光进行快速测量，但不需要光纤探针的位置对准。 光学检测装置包括光纤探针，其具有用于传播光的芯，光纤探针形成在芯的前端; 移动控制单元，用于移动光纤探针以接近或离开样本; 以及检测单元，用于检测来自所述样品表面的光，其中在所述光学探针的所述芯的前端表面上，在用于发射传播光的外围侧上具有第一出射部分，以及用于渗出所述近端的第二出射部分 第一出口部和第二出口部以同心方式形成，第一出口部的倾斜角度与第二出口部的倾斜角度不同。