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公开(公告)号：US09658053B2
公开(公告)日：2017-05-23
申请号：US14165997
申请日：2014-01-28
Applicant: Si-Ware Systems
Inventor： Mostafa Medhat , Bassem Mortada , Ahmed Othman El Shater , Muhammed Nagy , Mina Gad Seif , Bassam A. Saadany , Amr N. Hafez
CPC classification number: G01B9/02068 , G01B7/08 , G01B9/02071 , G01B2290/35 , G01J3/45 , G01J3/4532 , G01J3/4535 , G02B26/0841
Abstract: A Micro-Electro-Mechanical System (MEMS) interferometer provides for self-calibration of mirror positioning of a moveable mirror. The moveable mirror is coupled to a MEMS actuator having a variable capacitance. The MEMS interferometer includes a capacitive sensing circuit for determining the capacitance of the MEMS actuator at two or more known positions of the moveable mirror and a calibration module for using the actuator capacitances at the known positions to compensate for any drift in the capacitive sensing circuit.
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2.发明申请公开(公告)号：US20140139839A1
公开(公告)日：2014-05-22
申请号：US14165997
申请日：2014-01-28
Applicant: Si-Ware Systems
Inventor： Mostafa Medhat , Bassem Mortada , Ahmed Othman El Shater , Muhammed Nagy , Mina Gad Seif , Bassam A. Saadany , Amr N. Hafez
CPC classification number: G01B9/02068 , G01B7/08 , G01B9/02071 , G01B2290/35 , G01J3/45 , G01J3/4532 , G01J3/4535 , G02B26/0841
Abstract: A Micro-Electro-Mechanical System (MEMS) interferometer provides for self-calibration of mirror positioning of a moveable mirror. The moveable mirror is coupled to a MEMS actuator having a variable capacitance. The MEMS interferometer includes a capacitive sensing circuit for determining the capacitance of the MEMS actuator at two or more known positions of the moveable mirror and a calibration module for using the actuator capacitances at the known positions to compensate for any drift in the capacitive sensing circuit.
Abstract translation: 微机电系统（MEMS）干涉仪提供可移动镜的镜像定位的自校准。 可移动镜连接到具有可变电容的MEMS致动器。 MEMS干涉仪包括用于确定MEMS致动器在可移动反射镜的两个或更多个已知位置处的电容的电容感测电路，以及用于在已知位置处使用致动器电容的校准模块来补偿电容感测电路中的任何漂移。
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公开(公告)号：US09658107B2
公开(公告)日：2017-05-23
申请号：US15130876
申请日：2016-04-15
Applicant: Si-Ware Systems
Inventor： Momen Anwar , Mostafa Medhat , Bassem Mortada , Ahmed Othman El Shater , Mina Gad Seif , Muhammed Nagy , Bassam A. Saadany , Amr N. Hafez
CPC classification number: G01J3/4532 , G01B7/08 , G01B9/02068 , G01B9/02071 , G01B2290/35 , G01J3/45 , G01J3/4535 , G02B26/0841
Abstract: A Micro-Electro-Mechanical System (MEMS) apparatus provides for self-calibration of mirror positioning of a moveable mirror of an interferometer. At least one mirror in the MEMS apparatus includes a non-planar surface. The moveable mirror is coupled to a MEMS actuator having a variable capacitance. The MEMS apparatus includes a capacitive sensing circuit for determining the capacitance of the MEMS actuator at multiple reference positions of the moveable mirror corresponding to a center burst and one or more secondary bursts of an interferogram produced by the interferometer based on the non-planar surface. A calibration module uses the actuator capacitances at the reference positions to compensate for any drift in the capacitive sensing circuit.
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4.发明申请公开(公告)号：US20160231172A1
公开(公告)日：2016-08-11
申请号：US15130876
申请日：2016-04-15
Applicant: Si-Ware Systems
Inventor： Mostafa Medhat , Bassem Mortada , Ahmed Othman EI Shater , Muhammed Nagy , Mina Gad Seif , Bassam A. Saadany , Amr N. Hafez , Momen Anwar
CPC classification number: G01J3/4532 , G01B7/08 , G01B9/02068 , G01B9/02071 , G01B2290/35 , G01J3/45 , G01J3/4535 , G02B26/0841
Abstract: A Micro-Electro-Mechanical System (MEMS) apparatus provides for self-calibration of mirror positioning of a moveable mirror of an interferometer. At least one mirror in the MEMS apparatus includes a non-planar surface. The moveable mirror is coupled to a MEMS actuator having a variable capacitance. The MEMS apparatus includes a capacitive sensing circuit for determining the capacitance of the MEMS actuator at multiple reference positions of the moveable mirror corresponding to a center burst and one or more secondary bursts of an interferogram produced by the interferometer based on the non-planar surface. A calibration module uses the actuator capacitances at the reference positions to compensate for any drift in the capacitive sensing circuit.
Abstract translation: 微机电系统（MEMS）装置提供干涉仪可移动反射镜的镜像定位的自校准。 MEMS装置中的至少一个反射镜包括非平面表面。 可移动镜连接到具有可变电容的MEMS致动器。 MEMS装置包括电容感测电路，用于确定MEMS致动器在可移动镜的对应于中心脉冲串的多个参考位置处的电容，以及由干涉仪基于非平面表面产生的干涉图的一个或多个二次脉冲串。 校准模块使用参考位置处的致动器电容来补偿电容感测电路中的任何漂移。
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