Compact multi-pass gas cell for multi-gas spectral sensors

    公开(公告)号:US11150130B2

    公开(公告)日:2021-10-19

    申请号:US16808238

    申请日:2020-03-03

    Abstract: Aspects of the disclosure relate to a multi-pass gas cell that includes a set of two or more reflectors, an input collimating optical component, and an output focusing optical component. The input and output optical components are integrated with at least one of the two or more reflectors. For example, the input and output optical components may be integrated on opposite ends of a single one of the reflectors or may be integrated on the same end of a single reflector. The input and output optical components may further be integrated with different reflectors. In some examples, the set of reflectors and optical components may be fabricated within the same substrate.

    STRUCTURED SILICON-BASED THERMAL EMITTER
    6.
    发明申请
    STRUCTURED SILICON-BASED THERMAL EMITTER 有权
    结构硅基热发射体

    公开(公告)号:US20170012199A1

    公开(公告)日:2017-01-12

    申请号:US15203773

    申请日:2016-07-06

    Abstract: An optical radiation source produced from a disordered semiconductor material, such as black silicon, is provided. The optical radiation source includes a semiconductor substrate, a disordered semiconductor structure etched in the semiconductor substrate and a heating element disposed proximal to the disordered semiconductor structure and configured to heat the disordered semiconductor structure to a temperature at which the disordered semiconductor structure emits thermal infrared radiation.

    Abstract translation: 提供由诸如黑色硅的无序半导体材料产生的光辐射源。 光辐射源包括半导体衬底,在半导体衬底中蚀刻的无序半导体结构和设置在无序半导体结构附近的加热元件,其被配置为将无序半导体结构加热到无序半导体结构发射热红外辐射的温度 。

    OPTICAL FLUID ANALYZER
    7.
    发明申请

    公开(公告)号:US20220397518A1

    公开(公告)日:2022-12-15

    申请号:US17839102

    申请日:2022-06-13

    Abstract: Aspects relate to an optical fluid analyzer including a fluid cell configured to receive a sample fluid. The optical fluid analyzer further includes optical elements configured to seal the fluid cell on opposing sides thereof and to allow input light from a light source to be sent through the fluid cell and output light from the fluid cell to be input to a spectrometer. The optical fluid analyzer further includes a machine learning (ML) engine, such as an artificial intelligence (AI) engine, that is configured to generate a result defining at least one parameter of the fluid based on a spectrum produced by the spectrometer.

    COMPACT MULTI-PASS GAS CELL FOR MULTI-GAS SPECTRAL SENSORS

    公开(公告)号:US20200284654A1

    公开(公告)日:2020-09-10

    申请号:US16808238

    申请日:2020-03-03

    Abstract: Aspects of the disclosure relate to a multi-pass gas cell that includes a set of two or more reflectors, an input collimating optical component, and an output focusing optical component. The input and output optical components are integrated with at least one of the two or more reflectors. For example, the input and output optical components may be integrated on opposite ends of a single one of the reflectors or may be integrated on the same end of a single reflector. The input and output optical components may further be integrated with different reflectors. In some examples, the set of reflectors and optical components may be fabricated within the same substrate.

    SELF CALIBRATION FOR MIRROR POSITIONING IN OPTICAL MEMS INTERFEROMETERS
    10.
    发明申请
    SELF CALIBRATION FOR MIRROR POSITIONING IN OPTICAL MEMS INTERFEROMETERS 有权
    自动校准用于光学MEMS干涉仪中的镜像定位

    公开(公告)号:US20160231172A1

    公开(公告)日:2016-08-11

    申请号:US15130876

    申请日:2016-04-15

    Abstract: A Micro-Electro-Mechanical System (MEMS) apparatus provides for self-calibration of mirror positioning of a moveable mirror of an interferometer. At least one mirror in the MEMS apparatus includes a non-planar surface. The moveable mirror is coupled to a MEMS actuator having a variable capacitance. The MEMS apparatus includes a capacitive sensing circuit for determining the capacitance of the MEMS actuator at multiple reference positions of the moveable mirror corresponding to a center burst and one or more secondary bursts of an interferogram produced by the interferometer based on the non-planar surface. A calibration module uses the actuator capacitances at the reference positions to compensate for any drift in the capacitive sensing circuit.

    Abstract translation: 微机电系统(MEMS)装置提供干涉仪可移动反射镜的镜像定位的自校准。 MEMS装置中的至少一个反射镜包括非平面表面。 可移动镜连接到具有可变电容的MEMS致动器。 MEMS装置包括电容感测电路,用于确定MEMS致动器在可移动镜的对应于中心脉冲串的多个参考位置处的电容,以及由干涉仪基于非平面表面产生的干涉图的一个或多个二次脉冲串。 校准模块使用参考位置处的致动器电容来补偿电容感测电路中的任何漂移。

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