SHAPE MEASURING SYSTEM
    3.
    发明公开

    公开(公告)号:US20240019244A1

    公开(公告)日:2024-01-18

    申请号:US18247563

    申请日:2021-10-08

    摘要: Shape measuring systems are disclosed. In one example, a shape measuring system includes a light source part with a light source, a waveform control lens, and a scan mechanism. It also includes light receiving parts that each include a light receiving lens on which reflected light reflected by the measurement target among measurement light from the light source part is incident, an EVS, which is an asynchronous imaging device that is a light receiving element, an event issuing part that detects an event on the basis of output data from the EVS and outputs event data, and a transmitting part that outputs the event data to the signal processing part. A signal processing part includes an unwanted signal removing part that removes an unwanted signal resulting from incidence of secondary reflected light, and a three-dimensional calculating part that calculates a three-dimensional shape of the measurement target.