公开(公告)号：US20170138790A1

公开(公告)日：2017-05-18

申请号：US15321756

申请日：2015-06-29

Applicant: Spectral Engines Oy

Inventor： Jarkko Antila ,  Uula Kantojärvi ,  Altti Akujärvi ,  Mikko Tuohiniemi ,  Jussi Mäkynen

IPC: G01J3/02 ,  G01J3/45 ,  G01J3/26

CPC classification number: G01J3/0297 ,  G01J3/0227 ,  G01J3/0264 ,  G01J3/027 ,  G01J3/0286 ,  G01J3/26 ,  G01J3/28 ,  G01J3/45 ,  G01J2003/2879 ,  G02B26/001

Abstract: A method for determining spectral calibration data (λcal(Sd), Sd,cal(λ)) of a Fabry-Perot interferometer (100) comprises: forming a plurality of filtered spectral peaks (P′1, P′2) by filtering input light (LB1) with a Fabry-Perot etalon (50) such that a first filtered peak (P′1) corresponds to a first transmittance peak (P1) of the etalon (50), and such that a second filtered peak (P′2) corresponds to a second transmittance peak (P1) of the etalon (50), using the Fabry-Perot interferometer (100) for measuring a spectral intensity distribution (M(Sd)) of the filtered spectral peaks (P′1, P′2), wherein the spectral intensity distribution (M(Sd)) is measured by varying the mirror gap (dFP) of the Fabry-Perot interferometer (100), and by providing a control signal (Sd) indicative of the mirror gap (dFP), and determining the spectral calibration data (λcal(Sd), Sd,cal(λ)) by matching the measured spectral intensity distribution (M(Sd)) with the spectral transmittance (TE(λ)) of the etalon (50).