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公开(公告)号:US20230271199A1
公开(公告)日:2023-08-31
申请号:US18313639
申请日:2023-05-08
CPC分类号: B04B13/00 , B01L3/502715 , B01L3/50273 , B04B5/02 , G01N21/07 , G01N35/00069 , G01N35/04 , B01L2200/0647 , B01L2200/143 , B01L2300/0803 , B01L2400/0409 , G01N2035/0491 , G01N2201/06113 , G01N2201/1087
摘要: Provided are methods and apparatuses for controlling a position of a target point on a processing result relative to a focus point of a focusing sensor system for determining properties of the processing result. The method includes the steps of determining an initial focus point of the focusing sensor system, controlling rotation of the cartridge and disc, checking whether the initial focus point of the focusing sensor system corresponds to the target point on the processing result, comparing (x, y) target positions in captured images with the initial focus point of the focusing sensor system, adjusting rotation of the cartridge and disc such that the focus point of the focusing sensor system corresponds to the target point on the processing result, and detecting and examining signals received from the focusing sensor system for determining properties of the processing result.