公开(公告)号：US20070059460A1

公开(公告)日：2007-03-15

申请号：US11234012

申请日：2005-09-09

申请人： Stephen Abney ,  Anthony Vesci ,  Joseph Sommers ,  Marc Schweitzer ,  Scott Dickerson ,  Jennifer Tiller

发明人： Stephen Abney ,  Anthony Vesci ,  Joseph Sommers ,  Marc Schweitzer ,  Scott Dickerson ,  Jennifer Tiller

IPC分类号： B31B45/00

CPC分类号： C23C14/564 ,  B21D22/16 ,  B21J5/12 ,  C23C16/4404 ,  H01J37/32009 ,  Y10T428/13

摘要： A method of fabricating a component for a substrate processing chamber involves providing a preform having internal and external surfaces, and providing a mandrel having a textured surface with a pattern of textured features comprising protrusions and depressions. The internal surface of the preform component is contacted with the textured surface of mandrel, and a pressure is applied to the external surface of the preform. The pressure is sufficiently high to plastically deform the preform over the textured surface of the mandrel to form a component having a textured internal surface comprising the pattern of textured feature that are shaped and sized to adhere process residues generated in the processing of substrates.

摘要翻译： 制造用于衬底处理室的部件的方法包括提供具有内部和外部表面的预成型件，并且提供具有纹理表面的心轴，其具有包括凸起和凹陷的纹理特征图案。 预成型件部件的内表面与芯棒的纹理表面接触，并且将压力施加到预成型件的外表面。 压力足够高以使预成型件在心轴的纹理表面上塑性变形，以形成具有纹理化内表面的部件，该内表面包括纹理特征图案，其形状和尺寸适于粘附在基底加工中产生的工艺残留物。

公开(公告)号：US07762114B2

公开(公告)日：2010-07-27

申请号：US11234012

申请日：2005-09-09

申请人： Stephen Abney ,  Anthony Vesci ,  Joseph F. Sommers ,  Marc O'Donnell Schweitzer ,  Scott Dickerson ,  Jennifer Watia Tiller

发明人： Stephen Abney ,  Anthony Vesci ,  Joseph F. Sommers ,  Marc O'Donnell Schweitzer ,  Scott Dickerson ,  Jennifer Watia Tiller

IPC分类号： B21D22/16 ,  B21D17/02

CPC分类号： C23C14/564 ,  B21D22/16 ,  B21J5/12 ,  C23C16/4404 ,  H01J37/32009 ,  Y10T428/13

摘要： A method of fabricating a component for a substrate processing chamber involves providing a preform having internal and external surfaces, and providing a mandrel having a textured surface with a pattern of textured features comprising protrusions and depressions. The internal surface of the preform component is contacted with the textured surface of mandrel, and a pressure is applied to the external surface of the preform. The pressure is sufficiently high to plastically deform the preform over the textured surface of the mandrel to form a component having a textured internal surface comprising the pattern of textured feature that are shaped and sized to adhere process residues generated in the processing of substrates.

摘要翻译： 制造用于衬底处理室的部件的方法包括提供具有内部和外部表面的预成型件，并且提供具有纹理表面的心轴，其具有包括凸起和凹陷的纹理特征图案。 预成型件部件的内表面与芯棒的纹理表面接触，并且将压力施加到预成型件的外表面。 压力足够高以使预成型件在心轴的纹理表面上塑性变形，以形成具有纹理化内表面的部件，该内表面包括纹理特征图案，其形状和尺寸适于粘附在基底加工中产生的工艺残留物。