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公开(公告)号：US20070059460A1
公开(公告)日：2007-03-15
申请号：US11234012
申请日：2005-09-09
申请人： Stephen Abney , Anthony Vesci , Joseph Sommers , Marc Schweitzer , Scott Dickerson , Jennifer Tiller
发明人： Stephen Abney , Anthony Vesci , Joseph Sommers , Marc Schweitzer , Scott Dickerson , Jennifer Tiller
IPC分类号： B31B45/00
CPC分类号： C23C14/564 , B21D22/16 , B21J5/12 , C23C16/4404 , H01J37/32009 , Y10T428/13
摘要： A method of fabricating a component for a substrate processing chamber involves providing a preform having internal and external surfaces, and providing a mandrel having a textured surface with a pattern of textured features comprising protrusions and depressions. The internal surface of the preform component is contacted with the textured surface of mandrel, and a pressure is applied to the external surface of the preform. The pressure is sufficiently high to plastically deform the preform over the textured surface of the mandrel to form a component having a textured internal surface comprising the pattern of textured feature that are shaped and sized to adhere process residues generated in the processing of substrates.
摘要翻译： 制造用于衬底处理室的部件的方法包括提供具有内部和外部表面的预成型件，并且提供具有纹理表面的心轴，其具有包括凸起和凹陷的纹理特征图案。 预成型件部件的内表面与芯棒的纹理表面接触，并且将压力施加到预成型件的外表面。 压力足够高以使预成型件在心轴的纹理表面上塑性变形，以形成具有纹理化内表面的部件，该内表面包括纹理特征图案，其形状和尺寸适于粘附在基底加工中产生的工艺残留物。
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公开(公告)号：US07762114B2
公开(公告)日：2010-07-27
申请号：US11234012
申请日：2005-09-09
申请人： Stephen Abney , Anthony Vesci , Joseph F. Sommers , Marc O'Donnell Schweitzer , Scott Dickerson , Jennifer Watia Tiller
发明人： Stephen Abney , Anthony Vesci , Joseph F. Sommers , Marc O'Donnell Schweitzer , Scott Dickerson , Jennifer Watia Tiller
CPC分类号： C23C14/564 , B21D22/16 , B21J5/12 , C23C16/4404 , H01J37/32009 , Y10T428/13
摘要： A method of fabricating a component for a substrate processing chamber involves providing a preform having internal and external surfaces, and providing a mandrel having a textured surface with a pattern of textured features comprising protrusions and depressions. The internal surface of the preform component is contacted with the textured surface of mandrel, and a pressure is applied to the external surface of the preform. The pressure is sufficiently high to plastically deform the preform over the textured surface of the mandrel to form a component having a textured internal surface comprising the pattern of textured feature that are shaped and sized to adhere process residues generated in the processing of substrates.
摘要翻译： 制造用于衬底处理室的部件的方法包括提供具有内部和外部表面的预成型件，并且提供具有纹理表面的心轴，其具有包括凸起和凹陷的纹理特征图案。 预成型件部件的内表面与芯棒的纹理表面接触，并且将压力施加到预成型件的外表面。 压力足够高以使预成型件在心轴的纹理表面上塑性变形，以形成具有纹理化内表面的部件，该内表面包括纹理特征图案，其形状和尺寸适于粘附在基底加工中产生的工艺残留物。
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公开(公告)号：US07297247B2
公开(公告)日：2007-11-20
申请号：US10431399
申请日：2003-05-06
CPC分类号： C23C14/3414
摘要： A method of fabricating a sputtering target for sputter depositing material onto a substrate in a sputtering chamber is described. In one embodiment of the method, a preform having a surface is formed and a layer of sputtering material is electroplated onto the surface of the preform to form the target. The method can be applied to form a sputtering target having a non-planar surface.
摘要翻译： 描述了一种制造溅射靶的方法，溅射靶用于溅射沉积溅射室中的衬底上的材料。 在该方法的一个实施例中，形成具有表面的预成型件，并且将溅射材料层电镀到预型件的表面上以形成靶。 该方法可以应用于形成具有非平面表面的溅射靶。
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公开(公告)号：US20070246346A1
公开(公告)日：2007-10-25
申请号：US11764133
申请日：2007-06-15
CPC分类号： C23C14/3414
摘要： A sputtering target comprising an inverted annular trough encircling a central cylindrical well, and additionally comprising a plurality of electroplated layers of sputtering material is described. The sputtering material comprises at least one of aluminum, copper, tantalum, titanium and tungsten.
摘要翻译： 描述了一种溅射靶，其包括环形中心圆柱形阱的倒置环形槽，并且另外包括多个溅射材料的电镀层。 溅射材料包括铝，铜，钽，钛和钨中的至少一种。
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公开(公告)号：US20100116823A1
公开(公告)日：2010-05-13
申请号：US12267191
申请日：2008-11-07
CPC分类号： B21D26/021 , B21D26/029 , B23K31/02 , B23K2101/14 , B23K2103/04 , B23K2103/05 , B23K2103/10 , Y10T29/49371 , Y10T29/49375
摘要： A method and apparatus for providing a fluid channel on a surface that is subject to extreme temperatures is described. The embodiments described herein provide a fluid channel wherein the surface that is subject to the extreme temperatures forms one side of the fluid channel.
摘要翻译： 描述了在经受极端温度的表面上提供流体通道的方法和装置。 本文所述的实施例提供了流体通道，其中经受极端温度的表面形成流体通道的一侧。
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公开(公告)号：US07846310B2
公开(公告)日：2010-12-07
申请号：US11610075
申请日：2006-12-13
申请人： Andrew Gillard , Anthony Vesci , Keith A. Miller
发明人： Andrew Gillard , Anthony Vesci , Keith A. Miller
IPC分类号： C23C14/35
CPC分类号： H01J37/3266 , H01F7/128 , H01F7/20 , H01F27/16 , H01J37/32623 , H01J37/3458 , H01J37/347 , Y10T29/4902
摘要： A electromagnet array structure including multiple electromagnetic coils captured in a rigid encapsulant, for example, of cured epoxy resin, to form a unitary free-standing structure which can be placed around the walls of a plasma processing chamber. A liquid cooling coil may also be captured in the encapsulant between the electromagnetic coils. The structure may additionally include water fittings, locating pins, through tubes for chamber bolts, and lifting brackets.
摘要翻译： 一种电磁体阵列结构，其包括捕获在例如固化环氧树脂的刚性密封剂中的多个电磁线圈，以形成可放置在等离子体处理室的壁周围的整体式独立结构。 液体冷却盘管也可以被捕获在电磁线圈之间的密封剂中。 该结构还可以包括水配件，定位销，通过用于室螺栓的管和提升支架。
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公开(公告)号：US5864449A
公开(公告)日：1999-01-26
申请号：US918662
申请日：1997-08-22
IPC分类号： G11B21/22
CPC分类号： G11B21/22
摘要： A limit stop for magnetic storage disk drive systems comprising a spring portion and a mount portion. The spring portion is a single piece molded structure that is preloaded against a precision machined surface on the mount portion during assembly. The preloaded spring feature provides good energy absorption characteristics to reduce the limit stop deflection during actuator contact. The precision machined surface on the mount portion accurately determines the limit stop position, thereby reducing tolerance requirements on the spring portion.
摘要翻译： 一种包括弹簧部分和安装部分的磁存储盘驱动系统的限位装置。 弹簧部分是单件模制结构，其在组装期间相对于安装部分上的精密加工表面预加载。 预加载的弹簧特征提供了良好的能量吸收特性，以减少执行器接触期间的极限停止偏转。 安装部分上的精密加工表面精确地确定了极限停止位置，从而降低了对弹簧部分的公差要求。
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公开(公告)号：US06278585B1
公开(公告)日：2001-08-21
申请号：US09294451
申请日：1999-04-19
IPC分类号： G11B555
CPC分类号： G11B5/4853 , G11B5/484 , G11B5/486 , G11B21/16
摘要： A suspension system comprises an actuator arm and two suspensions. Each suspension has a load beam and a laminated member comprised of a support layer, an electrically insulating layer, and an electrically conducting layer. The laminated members are etched to form electrical lines for each suspension. The laminate member of each suspension is bent along the side of the arm such that they overlap one another in order to reduce the required space.
摘要翻译： 悬架系统包括致动器臂和两个悬架。 每个悬架具有负载梁和由支撑层，电绝缘层和导电层组成的层叠构件。 蚀刻层压构件以形成每个悬架的电线。 每个悬架的层压构件沿着臂的侧面弯曲，使得它们彼此重叠，以便减少所需的空间。
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公开(公告)号：US4089007A
公开(公告)日：1978-05-09
申请号：US689702
申请日：1976-05-24
申请人： Francis J. Perry , Anthony Vesci
发明人： Francis J. Perry , Anthony Vesci
CPC分类号： G05D16/2013 , B41J2/175 , Y10T137/2562 , Y10T137/7761
摘要： A high pressure fluid source is connected to a primary orifice and a valved orifice of a binarily activated pressure regulator. The primary orifice alone supplies the fluid at a pressure below the minimum desired, and both orifices together supply the fluid at a pressure greater than the maximum desired. A sensor at the output is adjusted to open the binary valve when the minimum pressure is reached, and close the valve when the maximum pressure is reached, thus cycling between the two conditions.
摘要翻译： 高压流体源连接到初级孔口和二次启动的压力调节器的阀口。 单独的主孔口以低于所需最低压力的压力提供流体，并且两个孔口一起在大于所需最大压力的位置供应流体。 在达到最小压力时，调节输出端的传感器打开二元阀，并在达到最大压力时关闭阀门，从而在两个条件之间循环。
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公开(公告)号：US20080141939A1
公开(公告)日：2008-06-19
申请号：US11610075
申请日：2006-12-13
申请人： Andrew Gillard , Anthony Vesci , Keith A. Miller
发明人： Andrew Gillard , Anthony Vesci , Keith A. Miller
IPC分类号： C23C16/513 , H01F41/04 , H01F7/20
CPC分类号： H01J37/3266 , H01F7/128 , H01F7/20 , H01F27/16 , H01J37/32623 , H01J37/3458 , H01J37/347 , Y10T29/4902
摘要： A electromagnet array structure including multiple electromagnetic coils captured in a rigid encapsulant, for example, of cured epoxy resin, to form a unitary free-standing structure which can be placed around the walls of a plasma processing chamber. A liquid cooling coil may also be captured in the encapsulant between the electromagnetic coils. The structure may additionally include water fittings, locating pins, through tubes for chamber bolts, and lifting brackets.
摘要翻译： 一种电磁体阵列结构，其包括捕获在例如固化环氧树脂的刚性密封剂中的多个电磁线圈，以形成可放置在等离子体处理室的壁周围的整体式独立结构。 液体冷却盘管也可以被捕获在电磁线圈之间的密封剂中。 该结构还可以包括水配件，定位销，通过用于室螺栓的管和提升支架。
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