公开(公告)号：US20050275101A1

公开(公告)日：2005-12-15

申请号：US11143953

申请日：2005-06-03

申请人： Stephen Burgess ,  Andrew Price ,  Nicholas Rimmer ,  John MacNeil

发明人： Stephen Burgess ,  Andrew Price ,  Nicholas Rimmer ,  John MacNeil

IPC分类号： C23C16/34 ,  H01L21/285 ,  H01L21/4763 ,  H01L21/768 ,  H01L23/52

CPC分类号： H01L21/28556 ,  C23C16/34 ,  H01L21/76843 ,  H01L21/76862 ,  Y10S257/915

摘要： A modified TDEAT (tetrakisdiethylamino titanium) based MOCVD precursor for deposition of thin amorphous TiN:Si diffusion barrier layers. The TDEAT is doped with 10 at % Si using TDMAS (trisdimethlyaminosilane); the two liquids are found to form a stable solution when mixed together. Deposition occurs via pyrolysis of the vaporised precursor and NH3 on a heated substrate surface. Experimental results show that we have modified the precursor in such a way to reduce gas phase component of the deposition when compared to the unmodified TDEAT-NH3 reaction. Deposition temperatures were the range of 250-450° C. and under a range of process conditions the modified precursor shows improvements in coating conformality, a reduction in resistivity and an amorphous structure, as shown by TEM and XRD analysis. SIMS and scanning AES have shown that the film is essentially stoichiometric in Ti:N ratio and contains low levels of C (˜0.4 at %) and trace levels of incorporated Si (0.01

摘要翻译： 用于沉积薄无定形TiN：Si扩散阻挡层的改性TDEAT（四十二乙基氨基钛）MOCVD前体。 使用TDMAS（三羟甲基氨基硅烷）掺杂10at％的TDEAT; 当混合在一起时，发现两种液体形成稳定的溶液。 沉积通过在加热的基底表面上热蒸发的前体和NH 3 3发生。 实验结果表明，与未改性的TDEAT-NH3反应相比，我们以这种方式修饰了前体，以减少沉积的气相成分。 沉积温度在250-450℃的范围内，并且在一系列工艺条件下，如TEM和XRD分析所示，改性前体显示涂层保形性的改善，电阻率的降低和无定形结构。 SIMS和扫描AES已经显示该膜基本上是Ti:N比率的化学计量，并且包含低水平的C（〜0.4at％）和痕量的掺入Si（0.01

公开(公告)号：US20100187097A1

公开(公告)日：2010-07-29

申请号：US12693464

申请日：2010-01-26

申请人： Mark Ian Carruthers ,  Stephen Burgess ,  Anthony Wilby ,  Amit Rastogi ,  Paul Rich ,  Nicholas Rimmer

发明人： Mark Ian Carruthers ,  Stephen Burgess ,  Anthony Wilby ,  Amit Rastogi ,  Paul Rich ,  Nicholas Rimmer

IPC分类号： C23C14/34

CPC分类号： C23C14/165 ,  C23C14/046 ,  H01L21/2855 ,  H01L21/76877

摘要： A method induces plasma vapour deposition of metal into a recess in a workpiece. The method achieves re-sputtering of the metal at the base of the recess with a sputter gas by utilising a mixture of Ar and He and/or Ne as the sputter gas with a ratio of He and/or Ne:Ar of at least about 10:1.

摘要翻译： 一种方法引起金属等离子体气相沉积到工件中的凹槽中。 该方法通过利用Ar和He和/或Ne的混合物作为溅射气体，以He和/或Ne：Ar的比例至少约为 10：1。

公开(公告)号：US08337675B2

公开(公告)日：2012-12-25

申请号：US12693464

申请日：2010-01-26

申请人： Mark Ian Carruthers ,  Stephen Burgess ,  Anthony Wilby ,  Amit Rastogi ,  Paul Rich ,  Nicholas Rimmer

发明人： Mark Ian Carruthers ,  Stephen Burgess ,  Anthony Wilby ,  Amit Rastogi ,  Paul Rich ,  Nicholas Rimmer

IPC分类号： C23C14/34

CPC分类号： C23C14/165 ,  C23C14/046 ,  H01L21/2855 ,  H01L21/76877

摘要： A method induces plasma vapor deposition of metal into a recess in a workpiece. The method achieves re-sputtering of the metal at the base of the recess with a sputter gas by utilizing a mixture of Ar and He and/or Ne as the sputter gas with a ratio of He and/or Ne:Ar of at least about 10:1.

摘要翻译： 一种方法引起金属等离子体气相沉积到工件中的凹槽中。 该方法通过利用Ar和He和/或Ne的混合物作为溅射气体，以He和/或Ne：Ar的比例至少约为 10：1。

公开(公告)号：US20050211666A1

公开(公告)日：2005-09-29

申请号：US11088261

申请日：2005-03-24

申请人： Stephen Burgess ,  Andrew Price

发明人： Stephen Burgess ,  Andrew Price

IPC分类号： C23C16/34 ,  C23C16/44 ,  C23C16/56 ,  C23F1/00 ,  H01L21/768

CPC分类号： H01L21/76856 ,  C23C16/34 ,  C23C16/4402 ,  C23C16/4412 ,  C23C16/56

摘要： This invention relates to a method of processing a workpiece in a chamber. Initially a surface of the workpiece is treated by a process which includes supplying a reactive gas to the chamber through a first gas supply and the surface is then further treated using a process gas supplied to the chamber through a second gas supply during the supply of the process gas so that a portion of the process gas flows into the first gas supply from the chamber to mitigate against residual reactive gas entering the chamber during the further treatment step.

摘要翻译： 本发明涉及一种在室内处理工件的方法。 最初，工件的表面通过包括通过第一气体供应向反应气体提供反应性气体的方法进行处理，然后在供给第二气体供应期间使用供应给室的工艺气体通过第二气体供应进一步处理表面 处理气体，使得一部分工艺气体从腔室流入第一气体供应，以在进一步的处理步骤期间减少进入腔室的剩余反应气体。

公开(公告)号：US20050278059A1

公开(公告)日：2005-12-15

申请号：US11066687

申请日：2005-02-25

申请人： Andrew Osborn ,  Charles Cowham ,  Sarah Brown ,  Stephen Briers ,  Stephen Burgess ,  Alan Newson ,  Kyle Rhodes

发明人： Andrew Osborn ,  Charles Cowham ,  Sarah Brown ,  Stephen Briers ,  Stephen Burgess ,  Alan Newson ,  Kyle Rhodes

IPC分类号： G05B19/042 ,  G06F9/44 ,  G06F19/00

CPC分类号： G05B19/0426 ,  G05B2219/23258 ,  G06F8/34

摘要： Various methods of programming a processing system utilizing a computer having a configuration canvas, at least one processor, and a plurality of function objects is disclosed. A processing configuration is created by placing object icons associated with function objects onto the canvas. Execution paths are automatically routed between the object icons based on orientations of icons on the canvas. Data flow paths are created between object icons on the canvas separately from the routings of the execution paths. Execution paths can be re-routed to increase the versatility of the processing system. Also, visual instruments and instrument icons can be utilized to further graphically illustrate and control the processing configuration.

摘要翻译： 公开了利用具有配置画布，至少一个处理器和多个功能对象的计算机对处理系统进行编程的各种方法。 通过将与功能对象相关联的对象图标放置在画布上来创建处理配置。 基于画布上的图标的方向，执行路径在对象图标之间自动路由。 在执行路径的路由上分别在画布上的对象图标之间创建数据流路径。 可以重新路由执行路径，以增加处理系统的多功能性。 此外，可以利用视觉仪器和仪器图标来进一步图形地说明和控制处理配置。

公开(公告)号：US20050130011A1

公开(公告)日：2005-06-16

申请号：US10978847

申请日：2004-11-01

申请人： Stephen Burgess ,  Douglas Ausdemore

发明人： Stephen Burgess ,  Douglas Ausdemore

IPC分类号： F01C21/08 ,  F04C18/20 ,  F04C18/344 ,  F04C23/00 ,  H01M8/04 ,  H01M8/06

CPC分类号： H01M8/04097 ,  F04C18/3441 ,  F04C23/001 ,  H01M8/04089 ,  H01M8/04111 ,  H01M8/0606

摘要： A fuel cell system (12) wherein a fluid-supplying device (10) supplies a cathode gas (e.g., an oxygen-containing gas) and an anode gas (e.g., a hydrogen-containing gas) to a fuel cell (14). The fluid-supplying device (12) comprises a cathode-side compressor (30c), an anode-side compressor (30a), and a motor (32). The motor (32) is driveably coupled to both the rotor (62c) of the cathode-side compressor (30c) and the rotor (62a) of the anode-side compressor (30a).

摘要翻译： 一种燃料电池系统（12），其中流体供应装置（10）向燃料电池（14）供应阴极气体（例如含氧气体）和阳极气体（例如含氢气体）。 流体供给装置（12）包括阴极侧压缩机（30c），阳极侧压缩机（30A）和电动机（32）。 马达（32）可驱动地联接到阴极侧压缩机（30c）的转子（62c）和阳极侧压缩机（30A）的转子（62a）。

公开(公告)号：US20070182513A1

公开(公告)日：2007-08-09

申请号：US10589039

申请日：2005-02-14

申请人： Stephen Burgess ,  Andrew Varney ,  Darren Houlden

发明人： Stephen Burgess ,  Andrew Varney ,  Darren Houlden

IPC分类号： H01H73/00

CPC分类号： G01R33/3815 ,  H01F6/04

摘要： A superconducting magnet system comprises a cryogenic vessel (1), a superconducting magnet (11) contained in an inner reservoir (16) within the vessel (1) to be cooled by liquid helium within the inner reservoir (16), and an outer reservoir (7) containing liquid helium and linked to the inner reservoir (16) by a feed tube (10) and a needle valve (9). In operation of the system current is supplied to the magnet (11) by a removable current lead (19) extending through the wall of the vessel (1) by way of a supply passage (17) in order to initiate superconducting current flow in the magnet. The supply of current to the magnet (11) is then stopped and the lead (19) is removed whilst the superconducting current flow persists in the magnet. After an extended period of superconducting current flow in the magnet (11) and without stopping such superconducting current flow, liquid helium at a temperature of about 4.2 K may be supplied to an upper part of the inner reservoir (16) above the magnet (11) from the outer reservoir (7) such that the magnet is still surrounded by liquid helium at a temperature of below 4.2 K. After a period of time the supply of liquid helium to the inner reservoir 16 is stopped, and the liquid helium in the inner reservoir (7) is cooled to a temperature below 4.2 K. Such a system is capable of being operated at very low temperatures down to below the lambda point, and of producing magnetic fields of high strengths and stability suitable for NMR spectroscopy.

摘要翻译： 超导磁体系统包括低温容器（1），容纳在容器（1）内的内部容器（16）中以由内部容器（16）内的液氦冷却的超导磁体（11），以及外部容器 （7），其包含液氦并通过进料管（10）和针阀（9）连接到内储存器（16）。 在系统的操作中，电流通过可通过供应通道（17）延伸穿过容器（1）的壁的可移除的电流引线（19）提供给磁体（11），以便引发超导电流 磁铁。 然后停止向磁体（11）供应电流，并且除去导线（19），同时超导电流持续在磁体中。 在磁体（11）中延长的超导电流流动并且不停止这样的超导电流之后，可以在磁体（11）上方的内部储存器（16）的上部供应约4.2K的温度的液氦 ），使得磁体在低于4.2K的温度下仍然被液氦包围。在一段时间之后，停止向内储存器16供应液氦，并且液氦在 内部储存器（7）被冷却到低于4.2K的温度。这种系统能够在低至低于λ点的非常低的温度下操作，并产生适于NMR光谱的高强度和稳定的磁场。

公开(公告)号：US20050106216A1

公开(公告)日：2005-05-19

申请号：US10767352

申请日：2004-01-30

申请人： Barry Maurer ,  Charles Reynolds ,  David Yesair ,  Robert McKee ,  Stephen Burgess ,  Walter Shaw

发明人： Barry Maurer ,  Charles Reynolds ,  David Yesair ,  Robert McKee ,  Stephen Burgess ,  Walter Shaw

IPC分类号： A23L1/30 ,  A61K9/00 ,  A61K31/167 ,  A61K47/00 ,  A61K31/16

CPC分类号： A61K9/0095 ,  A23L33/10 ,  A23V2002/00 ,  A61K9/1617 ,  A61K9/1664 ,  A61K31/167 ,  A23V2250/30 ,  A23V2250/186 ,  A23V2250/192 ,  A23V2250/1846

摘要： The present invention provides an edible composition for oral delivery of an active agent such as a retinide. The composition comprises, in the form of a dry flowable powder: (a) an active agent such as a retinide; (b) lipid matrix composition; (c) optionally sweetener; (d) flour. Compositions of the invention may be administered per se or mixed with a solid or liquid food carrier, for direct oral consumption by a subject or administration through a feeding tube.

摘要翻译： 本发明提供了用于口服递送活性剂如视黄酸盐的可食用组合物。 组合物包含干燥可流动粉末的形式：（a）活性剂如视黄酸盐; （b）脂质基质组成; （c）任选的甜味剂; （d）面粉。 本发明的组合物本身可以施用或与固体或液体食物载体混合，由受试者或给药通过饲管直接口服消费。

公开(公告)号：US20110039707A1

公开(公告)日：2011-02-17

申请号：US12094077

申请日：2006-11-16

申请人： Stephen Burgess ,  Nicholas William Kerley

发明人： Stephen Burgess ,  Nicholas William Kerley

IPC分类号： H01F6/04 ,  F25B19/00

CPC分类号： G01R33/3815 ,  F17C2270/0527 ,  H01F6/04

摘要： A superconducting magnet system comprises an annular cryogenic vessel (1) having an outer vacuum container (2) and containing a superconducting magnet (3) within an annular reservoir (4) containing liquid helium. A cryocooler (5) has a first stage (7) linked by a thermal link (9) to a thermal shield (6) within the vacuum space surrounding the reservoir (4) and a second stage (8) that serves to recondense evaporating helium gas from the reservoir (4). In the absence of special measures, such a cryocooled shield (6) would warm up quickly in the event of a power failure and would radiate heat onto the reservoir (4) causing all of the liquid helium to evaporate. However an inertial shield (11) is provided between the reservoir (4) and the thermal shield (6) in such a position that the outgoing helium gas from the reservoir (4) carries away the heat being transferred to the inertial shield (11) from the thermal shield (6) and thus slows down the rate at which the thermal inertial shield (11) warms up. Such a system does not require cryogenic fluid refilling at intervals and is less sensitive to the effect of a power failure or malfunction than existing systems.

摘要翻译： 超导磁体系统包括环形低温容器（1），其具有外部真空容器（2）并且在包含液体氦的环形容器（4）内容纳超导磁体（3）。 低温冷却器（5）具有通过热连接件（9）与围绕储存器（4）的真空空间内的热屏蔽（6）连接的第一级（7）和用于重新冷凝蒸发氦的第二级（8） 来自蓄水池（4）的气体。 在没有特殊措施的情况下，这种低温冷却的护罩（6）将在电源故障的情况下快速预热，并且将热量辐射到储存器（4）上，导致所有的液氦蒸发。 然而，在储存器（4）和热屏蔽（6）之间设置惯性屏蔽（11），使得来自储存器（4）的输出氦气带走传递到惯性屏蔽（11）的热量， （6），从而减慢热惯性屏蔽（11）加热的速率。 这样的系统不需要间歇地进行低温液体补充，并且比现有系统对电源故障或故障的影响较不敏感。

公开(公告)号：US07629868B2

公开(公告)日：2009-12-08

申请号：US10589039

申请日：2005-02-14

申请人： Stephen Burgess ,  Andrew John Varney ,  Darren Houlden

发明人： Stephen Burgess ,  Andrew John Varney ,  Darren Houlden

IPC分类号： H01F1/00

CPC分类号： G01R33/3815 ,  H01F6/04

摘要： A superconducting magnet system comprises a cryogenic vessel (1), a superconducting magnet (11) contained in an inner reservoir (16) within the vessel (1) to be cooled by liquid helium within the inner reservoir (16), and an outer reservoir (7) containing liquid helium and linked to the inner reservoir (16) by a feed tube (10) and a needle valve (9). In operation of the system current is supplied to the magnet (11) by a removable current lead (19) extending through the wall of the vessel (1) by way of a supply passage (17) in order to initiate superconducting current flow in the magnet. The supply of current to the magnet (11) is then stopped and the lead (19) is removed whilst the superconducting current flow persists in the magnet. After an extended period of superconducting current flow in the magnet (11) and without stopping such superconducting current flow, liquid helium at a temperature of about 4.2 K may be supplied to an upper part of the inner reservoir (16) above the magnet (11) from the outer reservoir (7) such that the magnet is still surrounded by liquid helium at a temperature of below 4.2 K. After a period of time the supply of liquid helium to the inner reservoir 16 is stopped, and the liquid helium in the inner reservoir (7) is cooled to a temperature below 4.2 K. Such a system is capable of being operated at very low temperatures down to below the lambda point, and of producing magnetic fields of high strengths and stability suitable for NMR spectroscopy.

摘要翻译： 超导磁体系统包括低温容器（1），容纳在容器（1）内的内部容器（16）中以由内部容器（16）内的液氦冷却的超导磁体（11），以及外部容器 （7），其包含液氦并通过进料管（10）和针阀（9）连接到内储存器（16）。 在系统的操作中，电流通过可通过供应通道（17）延伸穿过容器（1）的壁的可移除的电流引线（19）提供给磁体（11），以便引发超导电流 磁铁。 然后停止向磁体（11）供应电流，并且除去导线（19），同时超导电流持续在磁体中。 在磁体（11）中延长的超导电流流动并且不停止这样的超导电流之后，可以在磁体（11）上方的内部储存器（16）的上部供应约4.2K的温度的液氦 ），使得磁体在低于4.2K的温度下仍然被液氦包围。在一段时间之后，停止向内储存器16供应液氦，并且液氦在 内部储存器（7）被冷却到低于4.2K的温度。这样的系统能够在低至低于λ点的非常低的温度下操作，并产生适合于NMR光谱的高强度和稳定性的磁场。