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公开(公告)号：US5483803A
公开(公告)日：1996-01-16
申请号：US331170
申请日：1994-10-28
CPC分类号： F04D19/046 , B01D8/00 , F04B37/08 , Y10S417/901
摘要： A cryogenically cooled water pump traps water vapor with a high probability but is open to non-condensing gases for high conductance to a turbomolecular pump. The preferred array is a single cylinder, having a length to diameter ratio of between 0.5 and 1, concentric with and near to an ambient temperature conduit. A center baffle, preferably of closed frustoconical shape, may be positioned at the center of the array over the upper bearing plate of the turbomolecular pump where it results in minimal reduction in conductance to the pump.
摘要翻译： 低温冷却水泵以很高的概率捕获水蒸汽，但对非冷凝气体开放，以便对涡轮分子泵进行高电导。 优选的阵列是单个圆柱体，其长度与直径之比在0.5和1之间，与环境温度导管同心并且靠近环境温度导管。 优选具有闭合截头圆锥形状的中心挡板可以位于阵列的中心位于涡轮分子泵的上支承板上，其导致对泵的电导的最小的降低。
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公开(公告)号：US5901558A
公开(公告)日：1999-05-11
申请号：US915035
申请日：1997-08-20
申请人： Stephen R. Matte , Alan L. Weeks
发明人： Stephen R. Matte , Alan L. Weeks
CPC分类号： F04D19/046 , F04B37/08 , Y10S417/901
摘要： A cold trap includes a fluid conduit having a fluid flow path therethrough, a length along the fluid flow path and a width transverse to the fluid flow path. The width of the fluid conduit is greater than the length. A gate valve is formed integrally with the fluid flow conduit for opening and closing the fluid flow path. A cryopumping array having an outer rim surrounding a central opening is positioned within the fluid conduit downstream from the gate valve and transverse to the fluid flow path such that the fluid flow path extends through the central opening. The outer rim captures water vapor from the fluid flow path.
摘要翻译： 冷阱包括具有穿过其中的流体流动路径的流体导管，沿着流体流动路径的长度和横向于流体流动路径的宽度。 流体导管的宽度大于长度。 闸阀与流体流动管道一体地形成，用于打开和关闭流体流路。 具有围绕中心开口的外边缘的低温泵阵列定位在流体导管的下游，并且横向于流体流动路径，使得流体流动路径延伸穿过中心开口。 外缘从流体流路捕获水蒸气。
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公开(公告)号：US20080267790A1
公开(公告)日：2008-10-30
申请号：US12170802
申请日：2008-07-10
申请人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matte , Martin Stein , Steven C. Rosner
发明人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matte , Martin Stein , Steven C. Rosner
IPC分类号： F04B23/08
CPC分类号： F04D27/00 , F04B37/08 , F04B49/065 , F04D19/04 , Y10S417/901
摘要： A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
摘要翻译： 真空系统包括作为整体组件的具有驱动电动机，净化阀，粗抽阀和电子控制模块的真空泵。 公开了一种低温真空泵和涡轮分子真空泵。 控制模块具有用于控制电动机和阀的编程处理器，并且是用户编程的，用于建立特定的控制顺序。 集成电子控制模块可从组件移除，并通过公共连接器组件连接到其他设备。 在涡轮分子泵系统中，通过检测泵驱动器上的当前负载或通过检测前级管路压力来检测净化气体通过净化阀的适当引入。 为了测试吹扫气体状态，可以关闭吹扫阀，然后在监视驱动电流或压力时打开。 停电后，只要泵的速度保持在阈值以上，控制器将继续正常驱动涡轮分子泵。 否则排气阀将被打开，启动顺序必须启动。 在停机期间，停止对泵驱动电机供电，并在排气阀关闭前打开排气阀。
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公开(公告)号：US6155059A
公开(公告)日：2000-12-05
申请号：US229721
申请日：1999-01-13
CPC分类号： F04B37/08
摘要： A cryopump including a radiation shield having an interior surrounded by at least one wall. The radiation shield has an opening through which gases are cryopumped into the interior. A frontal cryopanel array is positioned near the opening for condensing high boiling point gases. The radiation shield and frontal cryopanel array are cooled to a first temperature. First primary cryopanel surfaces extend near the wall within the interior of the radiation shield and are cooled to a second temperature below the first temperature for condensing low boiling point gases near the wall while leaving a central gas flow pathway from the opening past the first primary cryopanel surfaces. Second primary cryopanel surfaces cooled to about the second temperature are positioned within the interior of the radiation shield and include adsorbent for adsorbing very low boiling point gases. The first primary cryopanel surfaces limit the amount of low boiling point gases condensing on the second primary cryopanel surfaces while leaving open the central gas flow pathway to the second primary cryopanel surfaces.
摘要翻译： 一种低温泵，其包括具有由至少一个壁围绕的内部的辐射屏蔽。 辐射屏蔽有一个开口，气体通过该开口被低温泵入内部。 前端冷冻板阵列位于开口附近，用于冷凝高沸点气体。 将辐射屏蔽和正面低温板阵列冷却至第一温度。 第一个初级低温板表面在辐射屏蔽内部的壁附近延伸，并被冷却到低于第一温度的第二温度，用于冷凝壁附近的低沸点气体，同时留下从第一主冷冻板开口的中心气体流动路径 表面。 冷却至约第二温度的第二主要冷冻板表面位于辐射屏蔽的内部，并且包括用于吸附极低沸点气体的吸附剂。 第一个初级冷冻板表面限制了冷凝在第二个初级冷冻盘表面上的低沸点气体的量，同时使中心气体流动通道打开到第二个主要低温板表面。
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公开(公告)号：US5906103A
公开(公告)日：1999-05-25
申请号：US42487
申请日：1998-03-16
申请人： Stephen R. Matte
发明人： Stephen R. Matte
CPC分类号： F04B37/08 , F25D19/006 , Y10S417/901
摘要： A cryopump includes a refrigerator, a heat station cooled by the refrigerator, and a cryopanel mounted to the heat station. The cryopanel and at least part of the heat station are within a chamber defined by a chamber wall. A shield extends from the chamber and surrounds the cryopanel to minimize the convective flow of gas past the cryopanel.
摘要翻译： 低温泵包括冰箱，由冰箱冷却的加热站和安装在加热站的冷冻板。 冷冻板和加热站的至少一部分在由室壁限定的室内。 护罩从腔室延伸并围绕冷冻板，以最小化气体经过冷冻板的对流。
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公开(公告)号：US5537833A
公开(公告)日：1996-07-23
申请号：US434343
申请日：1995-05-02
申请人： Stephen R. Matte , Bruce R. Andeen
发明人： Stephen R. Matte , Bruce R. Andeen
CPC分类号： F04B37/08 , B01D8/00 , Y10S417/901
摘要： A cryogenic trap is shielded by a floating baffle array which is insulated from ambient temperature. The cryogenic trap includes a baffle array which is suspended by conductive braid from split cylinders. The split cylinders are cooled by respective closed cycle refrigerators.
摘要翻译： 低温陷阱由与环境温度绝缘的浮动挡板阵列屏蔽。 低温捕集阱包括挡板阵列，该挡板阵列由分离圆柱体的导电编织物悬挂。 分体式气缸由相应的闭式循环冷藏机冷却。
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公开(公告)号：US06571821B2
公开(公告)日：2003-06-03
申请号：US09908435
申请日：2001-07-18
申请人： Stephen R. Matte , William G. Foley
发明人： Stephen R. Matte , William G. Foley
IPC分类号： F16L5804
CPC分类号： F16K3/0263 , Y10T137/7036
摘要： A valve includes a valve housing having a fluid conduit communicating between an inlet port and an outlet port, a valve closure member that is movable between a closed position and an open position, and a radiation-absorbing coating on at least a part of the fluid conduit. The radiation-absorbing coating may be disposed on inside surfaces of mounting flanges of the valve. The coating may be black chrome or a black anodized surface, for example.
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公开(公告)号：US5799493A
公开(公告)日：1998-09-01
申请号：US708451
申请日：1996-09-05
CPC分类号： F28F21/084 , F04B37/08 , F25D19/006 , F28F19/04 , Y10S417/901
摘要： A cryopanel is formed of aluminum to avoid copper ions in a work chamber, and the aluminum is coated with a Teflon.RTM. polymer for corrosion resistance. A corrosion resistant thermally conductive link is obtained by surrounding indium with a polymer coated C-ring. The cryopanel is shaped as a trough to enable draining of liquid during regeneration.
摘要翻译： 低温板由铝形成以避免工作室中的铜离子，并且铝被涂覆有特氟龙TM聚合物以用于耐腐蚀性。 通过用聚合物涂覆的C环围绕铟获得耐腐蚀的导热连接。 冷冻板成形为槽，以在再生期间排出液体。
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公开(公告)号：US5727392A
公开(公告)日：1998-03-17
申请号：US773816
申请日：1996-12-19
申请人： Stephen R. Matte
发明人： Stephen R. Matte
CPC分类号： F04B37/08 , F25D19/006 , Y10S417/901
摘要： A cryopump includes a refrigerator, a heat station cooled by the refrigerator, and a cryopanel mounted to the heat station. The cryopanel and at least part of the heat station are within a chamber defined by a chamber wall. A shield extends from the chamber and surrounds the cryopanel to minimize the convective flow of gas past the cryopanel.
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