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    Polariscope stress measurement tool and method of use
    2.
    发明授权
    Polariscope stress measurement tool and method of use 失效
    Polariscope应力测量工具及使用方法

    公开(公告)号：US08264675B1

    公开(公告)日：2012-09-11

    申请号：US13233973

    申请日：2011-09-15

    申请人： Steven Danyluk ,  Fang Li

    发明人： Steven Danyluk ,  Fang Li

    IPC分类号： G01B11/16 ,  G01J4/00

    CPC分类号： G01B11/168 ,  G01L1/241 ,  G01L5/0047

    摘要： The present invention provides a tool for and method of using an infrared transmission technique to extract the full stress components of the in-plane residual stresses in thin, multi crystalline silicon wafers including in situ measurement of residual stress for large cast wafers. The shear difference method is used to obtain full stress components by integrating the shear stress map from the boundaries. System ambiguity at the boundaries is resolved completely by introducing a new analytical function. A new anisotropic stress optic law is provided, and stress optic coefficients are calibrated for different crystal grain orientations and stress orientations.

    摘要翻译： 本发明提供了一种使用红外透射技术提取薄多晶硅晶片中的平面内残余应力的全应力分量的工具和方法，包括原位测量大型晶圆的残余应力。 剪切差法用于通过从边界积分剪切应力图来获得全应力分量。 通过引入新的分析功能，完全解决了边界的系统模糊。 提供了新的各向异性应力光学定律，并且针对不同的晶粒取向和应力取向校准了应力光学系数。

    Method and apparatus for measuring properties of weak electrolytic, organic fluids such as hydrocarbon-based fluids
    3.
    发明授权
    Method and apparatus for measuring properties of weak electrolytic, organic fluids such as hydrocarbon-based fluids 有权
    用于测量弱电解质，有机流体如烃类流体的性质的方法和装置

    公开(公告)号：US08007655B2

    公开(公告)日：2011-08-30

    申请号：US11782199

    申请日：2007-07-24

    申请人： Steven Danyluk ,  Francis Mess ,  Sergey Tereshko ,  Anatoly Zharin

    发明人： Steven Danyluk ,  Francis Mess ,  Sergey Tereshko ,  Anatoly Zharin

    IPC分类号： G01N27/416 ,  G01N27/26

    CPC分类号： G01N33/2888 ,  G01N27/02

    摘要： A method and system for determining chemical properties of a fluid. The method and system include providing a weak electrolyte fluid, a container for the fluid, a detection method performed by a device having at least two electrodes, a detection and amplification device coupled to the electrodes and a sensed current compared to an uncontaminated, base fluid or compared to data characteristic of fluid contaminated or chemically changed in order to monitor and characterize the fluid.

    摘要翻译： 一种用于确定流体化学性质的方法和系统。 该方法和系统包括提供弱电解质流体，用于流体的容器，由具有至少两个电极的装置执行的检测方法，耦合到电极的检测和放大装置以及与未污染的基础流体相比的感测电流 或与被污染或化学变化的流体的数据特征进行比较，以便监测和表征流体。

    Non vibrating capacitance probe for wear monitoring
    4.
    再颁专利
    Non vibrating capacitance probe for wear monitoring 有权
    用于磨损监测的非振动电容探头

    公开(公告)号：USRE39803E1

    公开(公告)日：2007-09-04

    申请号：US09846835

    申请日：2001-05-01

    申请人： Steven Danyluk ,  Anatoly Zharin ,  Elmer Zanoria ,  Lennox Reid ,  Kenneth Hamall

    发明人： Steven Danyluk ,  Anatoly Zharin ,  Elmer Zanoria ,  Lennox Reid ,  Kenneth Hamall

    IPC分类号： G01R27/26 ,  G01B7/34 ,  G01B21/30 ,  G01N27/22

    CPC分类号： G01R1/07

    摘要： A non-vibrating capacitance probe for use as a non-contact sensor for tribological wear on a component. The device detects surface charge through temporal variation in the work function of a material. A reference electrode senses changing contact potential difference over the component surface, owing to compositional variation on the surface. Temporal variation in the contact potential difference induces a current through an electrical connection. This current is amplified and converted to a voltage signal by an electronic circuit with an operational amplifier.

    摘要翻译： 用作非接触传感器的非振动电容探头，用于组件上的摩擦磨损。 该装置通过材料的功函数的时间变化来检测表面电荷。 参考电极由于表面上的组成变化而感测组件表面上的接触电位差的变化。 接触电位差的时间变化通过电气连接引起电流。 该电流被放大并通过具有运算放大器的电子电路转换成电压信号。

    Polariscope stress measurement tool and method of use
    6.
    发明授权
    Polariscope stress measurement tool and method of use 失效
    Polariscope应力测量工具及使用方法

    公开(公告)号：US08537342B2

    公开(公告)日：2013-09-17

    申请号：US13571481

    申请日：2012-08-10

    申请人： Steven Danyluk ,  Fang Li

    发明人： Steven Danyluk ,  Fang Li

    IPC分类号： G01B11/16 ,  G01J4/00

    CPC分类号： G01B11/168 ,  G01L1/241 ,  G01L5/0047

    摘要： The present invention provides a tool for and method of using an infrared transmission technique to extract the full stress components of the in-plane residual stresses in thin, multi crystalline silicon wafers including in situ measurement of residual stress for large cast wafers. The shear difference method is used to obtain full stress components by integrating the shear stress map from the boundaries. System ambiguity at the boundaries is resolved completely by introducing a new analytical function. A new anisotropic stress optic law is provided, and stress optic coefficients are calibrated for different crystal grain orientations and stress orientations.

    摘要翻译： 本发明提供了一种使用红外透射技术提取薄多晶硅晶片中的平面内残余应力的全应力分量的工具和方法，包括原位测量大型晶圆的残余应力。 剪切差法用于通过从边界积分剪切应力图来获得全应力分量。 通过引入新的分析功能，完全解决了边界的系统模糊。 提供了新的各向异性应力光学定律，并且针对不同的晶粒取向和应力取向校准了应力光学系数。

    METHOD AND APPARATUS FOR MEASURING PROPERTIES OF WEAK ELECTROLYTIC, ORGANIC FLUIDS SUCH AS HYDROCARBON-BASED FLUIDS
    7.
    发明申请
    METHOD AND APPARATUS FOR MEASURING PROPERTIES OF WEAK ELECTROLYTIC, ORGANIC FLUIDS SUCH AS HYDROCARBON-BASED FLUIDS 有权
    用于测量弱电解质，有机流体等作为基于油基的流体的性质的方法和装置

    公开(公告)号：US20090026090A1

    公开(公告)日：2009-01-29

    申请号：US11782199

    申请日：2007-07-24

    申请人： Steven Danyluk ,  Francis Mess ,  Sergey Tereshko ,  Anatoly Zharin

    发明人： Steven Danyluk ,  Francis Mess ,  Sergey Tereshko ,  Anatoly Zharin

    IPC分类号： G01N27/416

    CPC分类号： G01N33/2888 ,  G01N27/02

    摘要： A method and system for determining chemical properties of a fluid. The method and system include providing a weak electrolyte fluid, a container for the fluid, a detection method performed by a device having at least two electrodes, a detection and amplification device coupled to the electrodes and a sensed current compared to an uncontaminated, base fluid or compared to data characteristic of fluid contaminated or chemically changed in order to monitor and characterize the fluid.

    摘要翻译： 一种用于确定流体化学性质的方法和系统。 该方法和系统包括提供弱电解质流体，用于流体的容器，由具有至少两个电极的装置执行的检测方法，耦合到电极的检测和放大装置以及与未污染的基础流体相比的感测电流 或与被污染或化学变化的流体的数据特征进行比较，以便监测和表征流体。

    Ionization contact potential difference gyroscope
    8.
    发明授权
    Ionization contact potential difference gyroscope 有权
    电离接触电位差陀螺仪

    公开(公告)号：US06679117B2

    公开(公告)日：2004-01-20

    申请号：US09778491

    申请日：2001-02-07

    申请人： Steven Danyluk ,  Anatoly Zharin ,  Parbury P Schmidt, Jr.

    发明人： Steven Danyluk ,  Anatoly Zharin ,  Parbury P Schmidt, Jr.

    IPC分类号： G01P900

    CPC分类号： G01C19/58 ,  G01P15/08

    摘要： An ionization contact potential difference gyroscope including a housing enclosing a first and second electrode with a gas, further including an ionization source capable of providing ions from the gas, and a contact potential difference measurement circuit that is capable of measuring an electrical signal related to the amount of ions striking at least one of the two surfaces. The measurement circuit of the present invention is capable of sensing the small amount of electrical current flowing as the electrons and ions strike one or both of the surfaces.

    摘要翻译： 一种电离接触电位差陀螺仪，包括：包围第一和第二电极与气体的壳体，还包括能够提供来自气体的离子的电离源;以及接触电位差测量电路，其能够测量与 冲击至少两个表面之一的离子的量。 本发明的测量电路能够感测当电子和离子撞击一个或两个表面时流动的少量电流。

    Non-vibrating capacitance probe for wear monitoring
    9.
    发明授权
    Non-vibrating capacitance probe for wear monitoring 失效
    用于磨损监测的非振动电容探头

    公开(公告)号：US5974869A

    公开(公告)日：1999-11-02

    申请号：US971101

    申请日：1997-11-14

    申请人： Steven Danyluk ,  Anatoly Zharin ,  Elmer Zanoria ,  Lennox Reid ,  Kenneth M. Hamall

    发明人： Steven Danyluk ,  Anatoly Zharin ,  Elmer Zanoria ,  Lennox Reid ,  Kenneth M. Hamall

    IPC分类号： G01R1/07 ,  G01R27/26

    CPC分类号： G01R1/07

    摘要： A non-vibrating capacitance probe for use as a non-contact sensor for tribological wear on a component. The device detects surface charge through temporal variation in the work function of a material. A reference electrode senses changing contact potential difference over the component surface, owing to compositional variation on the surface. Temporal variation in the contact potential difference induces a current through an electrical connection. This current is amplified and converted to a voltage signal by an electronic circuit with an operational amplifier.

    摘要翻译： 用作非接触传感器的非振动电容探头，用于组件上的摩擦磨损。 该装置通过材料的功函数的时间变化来检测表面电荷。 参考电极由于表面上的组成变化而感测组件表面上的接触电位差的变化。 接触电位差的时间变化通过电气连接引起电流。 该电流被放大并通过具有运算放大器的电子电路转换成电压信号。

    POLARISCOPE STRESS MEASUREMENT TOOL AND METHOD OF USE
    10.
    发明申请
    POLARISCOPE STRESS MEASUREMENT TOOL AND METHOD OF USE 失效
    极化应力测量工具及其使用方法

    公开(公告)号：US20120314202A1

    公开(公告)日：2012-12-13

    申请号：US13571481

    申请日：2012-08-10

    申请人： Steven Danyluk ,  Fang Li

    发明人： Steven Danyluk ,  Fang Li

    IPC分类号： G01B11/16 ,  G01J4/00

    CPC分类号： G01B11/168 ,  G01L1/241 ,  G01L5/0047

    摘要： The present invention provides a tool for and method of using an infrared transmission technique to extract the full stress components of the in-plane residual stresses in thin, multi crystalline silicon wafers including in situ measurement of residual stress for large cast wafers. The shear difference method is used to obtain full stress components by integrating the shear stress map from the boundaries. System ambiguity at the boundaries is resolved completely by introducing a new analytical function. A new anisotropic stress optic law is provided, and stress optic coefficients are calibrated for different crystal grain orientations and stress orientations.

    摘要翻译： 本发明提供了一种使用红外透射技术提取薄多晶硅晶片中的平面内残余应力的全应力分量的工具和方法，包括原位测量大型晶圆的残余应力。 剪切差法用于通过从边界积分剪切应力图来获得全应力分量。 通过引入新的分析功能，完全解决了边界的系统模糊。 提供了新的各向异性应力光学定律，并且针对不同的晶粒取向和应力取向校准了应力光学系数。