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公开(公告)号：US6077480A
公开(公告)日：2000-06-20
申请号：US878539
申请日：1997-06-19
CPC分类号： A61L2/208 , A61L2/24 , A61L2202/15
摘要： A multiple flashpoint vaporization system rapidly sterilizes large enclosures. A plurality of vaporizers (10) inject hydrogen peroxide vapor into streams of carrier gas supplied by a generator (20). Supply lines (30) transport the mixture of carrier gas and hydrogen peroxide vapor to a plurality of regions of an enclosure (32). Monitors (52) monitor hydrogen peroxide vapor concentration or other conditions in each region of the enclosure. A control system (50) adjusts the hydrogen peroxide vapor supply rate in response to the corresponding monitored conditions.
摘要翻译： 多个闪点蒸发系统可快速消毒大型外壳。 多个蒸发器（10）将过氧化氢蒸汽注入由发生器（20）供应的载气流中。 供应管线（30）将载气和过氧化氢蒸气的混合物输送到外壳（32）的多个区域。 监视器（52）监视外壳每个区域中的过氧化氢蒸气浓度或其他条件。 控制系统（50）响应于相应的监测条件调节过氧化氢蒸汽供应速率。
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公开(公告)号：US5876664A
公开(公告)日：1999-03-02
申请号：US664985
申请日：1996-06-14
CPC分类号： A61L2/208 , A61L2/24 , G05D23/1935 , A61L2202/122 , A61L2202/24
摘要： The invention provides a method and apparatus for minimizing heat degradation of a vapor decontaminant in a vaporizer by selectively operating a plurality of vaporizer heaters to provide a decreasing heat gradient through the vaporizer. A method and apparatus are also provided for selectively operating a plurality of preheaters, in series, for preheating a carrier gas entering a vaporizer in a flow-through decontamination system, and for maintaining a predetermined carrier gas temperature. A further method and apparatus are provided for fine-tuning chamber pressure in a high flow rate closed-loop flow-through vapor phase decontamination system.
摘要翻译： 本发明提供了一种用于通过选择性地操作多个蒸发器加热器以减少通过蒸发器的热梯度来最小化汽化器中的蒸气去污剂的热降解的方法和装置。 还提供了一种方法和装置，用于选择性地操作多个串联的预热器，用于预热在流通净化系统中进入蒸发器的载气，并保持预定的载气温度。 提供了一种用于在高流量闭环流通气相净化系统中微调腔室压力的方法和装置。
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3.发明授权Process gas distribution system and method with automatic transducer zero calibration 失效具有自动换能器零点校准的过程气体分配系统和方法
公开(公告)号：US5508947A
公开(公告)日：1996-04-16
申请号：US242805
申请日：1994-05-13
CPC分类号： H01L21/67276 , F17C13/02 , F17C13/04 , H01J37/3244 , H01L21/67253 , F17C2205/0111 , F17C2205/0176 , F17C2205/0338 , F17C2205/0391 , F17C2227/044 , F17C2250/032 , F17C2250/034 , F17C2250/0443 , F17C2250/0636 , F17C2270/0518
摘要： A system including a plurality of gas flow control units in cabinets which are connected to distribute process gas, on demand, to a plurality of utilization locations known as "tool" locations in a semi-conductor manufacturing plant. Transducers are used in the system to measure pressures and other control parameters. Zero calibration of the transducers is provided by automatically subjecting each transducer to a reference computer routine to compute the difference between the standard value and the transducer output, and store the difference as an "offset" to correct the output of the transducer. Thus, re-calibration is performed simply and quickly, at a relatively low labor cost and with relatively little downtime for the system.
摘要翻译： 一种系统，包括在机柜中的多个气体流量控制单元，其被连接以根据需要将处理气体分配到半导体制造工厂中被称为“工具”位置的多个利用位置。 系统中使用传感器来测量压力和其他控制参数。 通过将每个换能器自动对参考计算机程序进行计算，以计算标准值和换能器输出之间的差异，并将差值存储为“偏移”来校正换能器的输出，从而提供换能器的零点校准。 因此，以相对低的人工成本且系统的停机时间相对较少，简单而快速地执行重新校准。
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4.发明授权Process gas distribution system and method with gas cabinet exhaust flow control 失效具有气柜排气流量控制的工艺气体分配系统和方法
公开(公告)号：US5329463A
公开(公告)日：1994-07-12
申请号：US3550
申请日：1993-01-13
CPC分类号： H01L21/67276 , F17C13/02 , F17C13/04 , H01J37/3244 , H01L21/67253 , F17C2205/0111 , F17C2205/0176 , F17C2205/0338 , F17C2205/0391 , F17C2227/044 , F17C2250/032 , F17C2250/034 , F17C2250/0443 , F17C2250/0636 , F17C2270/0518
摘要： Gas flow control units in cabinets are connected to distribute process gas, on demand, to a plurality of utilization locations known as "tool" locations in a semi-conductor manufacturing plant. Each gas flow control cabinet has an exhaust duct which connects to an exhaust duct in the plant through which waste gases from the cabinet are exhausted by a fan to the atmosphere. Low flow alarm signals are generated if the exhaust flow is below a desired level. A programmable controller is provided for controlling the alarm function according to the size of the exhaust ducting from the plant so as to facilitate installation and operation of each cabinet in a variety of locations with different duct sizes.
摘要翻译： 机柜中的气体流量控制单元被连接以将处理气体根据需要分配到半导体制造工厂中被称为“工具”位置的多个利用位置。 每个气体流量控制柜具有排气管道，该排气管道连接到设备中的排气管道，来自柜体的废气通过风扇排放到大气中。 如果排气流低于期望水位，则会产生低流量报警信号。 提供了可编程控制器，用于根据来自设备的排气管道的尺寸控制报警功能，以便于在各种具有不同管道尺寸的位置安装和操作每个机柜。
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公开(公告)号：US07424563B2
公开(公告)日：2008-09-09
申请号：US11361402
申请日：2006-02-24
申请人： Michael Egnoah Birenbach , Gregory Lee Brookshire , James Norris Dieffenderfer , Stephen G. Geist , Richard Alan Moore , Thomas Andrew Sartorius , Rodney Wayne Smith
发明人： Michael Egnoah Birenbach , Gregory Lee Brookshire , James Norris Dieffenderfer , Stephen G. Geist , Richard Alan Moore , Thomas Andrew Sartorius , Rodney Wayne Smith
IPC分类号： G06F13/26
CPC分类号： G06F9/4812
摘要： A processor provides two-level interrupt servicing. In one embodiment, the processor comprises a storage device and an interrupt handler. The storage device is configured to store an interrupt identifier corresponding to an interrupt request. The interrupt handler is configured to recognize the interrupt request, initiate a common interrupt service routine responsive to recognizing the interrupt request and subsequently initiate an interrupt service routine corresponding to the stored interrupt identifier.
摘要翻译： 处理器提供两级中断服务。 在一个实施例中，处理器包括存储设备和中断处理程序。 存储装置被配置为存储对应于中断请求的中断标识符。 中断处理程序被配置为识别中断请求，响应于识别中断请求并且随后发起与存储的中断标识符相对应的中断服务程序，启动公共中断服务程序。
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6.发明授权Process gas distribution system and method with automatic transducer zero calibration 失效具有自动换能器零点校准的过程气体分配系统和方法
公开(公告)号：US5657254A
公开(公告)日：1997-08-12
申请号：US632708
申请日：1996-04-15
CPC分类号： H01L21/67276 , F17C13/02 , F17C13/04 , H01J37/3244 , H01L21/67253 , F17C2205/0111 , F17C2205/0176 , F17C2205/0338 , F17C2205/0391 , F17C2227/044 , F17C2250/032 , F17C2250/034 , F17C2250/0443 , F17C2250/0636 , F17C2270/0518
摘要： A system including a plurality of gas flow control units in cabinets which are connected to distribute process gas, on demand, to a plurality of utilization locations known as "tool" locations in a semi-conductor manufacturing plant. Transducers are used in the system to measure pressures and other control parameters. Zero calibration of the transducers is provided by automatically subjecting each transducer to a reference computer routine to compute the difference between the standard value and the transducer output, and store the difference as an "offset" to correct the output of the transducer. Thus, re-calibration is performed simply and quickly, at a relatively low labor cost and with relatively little downtime for the system.
摘要翻译： 一种系统，包括在机柜中的多个气体流量控制单元，其被连接以根据需要将处理气体分配到半导体制造工厂中被称为“工具”位置的多个利用位置。 系统中使用传感器来测量压力和其他控制参数。 通过将每个换能器自动对参考计算机程序进行计算，以计算标准值和换能器输出之间的差异，并将差值存储为“偏移”来校正换能器的输出，从而提供换能器的零点校准。 因此，以相对低的人工成本且系统的停机时间相对较少，简单而快速地执行重新校准。
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公开(公告)号：US5497316A
公开(公告)日：1996-03-05
申请号：US416511
申请日：1995-04-04
CPC分类号： H01L21/67276 , F17C13/02 , F17C13/04 , H01J37/3244 , H01L21/67253 , F17C2205/0111 , F17C2205/0176 , F17C2205/0338 , F17C2205/0391 , F17C2227/044 , F17C2250/032 , F17C2250/034 , F17C2250/0443 , F17C2250/0636 , F17C2270/0518
摘要： Gas flow control units in cabinet are connected to distribute process gas, on demand, to a plurality of utilization locations known as "tool" locations in a semi-conductor manufacturing plant. The flow control units are adapted to deliver process gas selectively from one of two supply tanks to any one or all of four different tool locations. Simple, fast, low-cost purging of the gas delivery conduits is provided to facilitate maintenance, gas cylinder changes, etc. Means are provided to enable pulse purging of the long gas delivery conduit from the cabinet to the tool when flow-through or other purging is not possible.
摘要翻译： 机柜中的气体流量控制单元被连接以将处理气体根据需要分配到半导体制造工厂中称为“工具”位置的多个利用位置。 流量控制单元适于从两个供应罐中的一个选择性地将工艺气体输送到四个不同工具位置中的任何一个或全部。 提供简单，快速，低成本的气体输送管道的清洗，以便于维护，气瓶更换等。提供了使流体通过或其它流体从长时间的气体输送管道从机柜到工具的脉冲吹扫 清洗是不可能的。
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公开(公告)号：US5220517A
公开(公告)日：1993-06-15
申请号：US576067
申请日：1990-08-31
CPC分类号： H01L21/67276 , F17C13/02 , F17C13/04 , H01J37/3244 , H01L21/67253 , F17C2205/0111 , F17C2205/0176 , F17C2205/0338 , F17C2205/0391 , F17C2227/044 , F17C2250/032 , F17C2250/034 , F17C2250/0443 , F17C2250/0636 , F17C2270/0518
摘要： A plurality of gas flow control units in cabinets are connected to distribute process gas, on demand, to a plurality of utilization locations known as "tool" locations in a semi-conductor manufacturing plant. Each gas flow control unit is connected to a single tool interface controller over a single communications cable. The status and operational characteristics of the individual units are communicated through the tool interface controller to a supervisory control computer by means of polling. Each flow control cabinet has its own data processor, and can be operated alone. Also, the supervisory computer can be used to operate each cabinet, as well as to monitor operations of the system. Gas demand and other signals are communicated from each tool location to the control units through a single cable connected to the interface controller, thus reducing the original wiring cost. Changing the communications path to accompany a change of the tool to which a given conduit in one of the cabinets delivers its gas can be done quickly, in software, with a few keystrokes. Mechanical re-wiring is not needed.
摘要翻译： 连接机柜中的多个气体流量控制单元，以将处理气体根据需要分配到半导体制造工厂中被称为“工具”位置的多个利用位置。 每个气体流量控制单元通过单个通信电缆连接到单个工具接口控制器。 各个单元的状态和操作特性通过工具界面控制器通过轮询方式传送到监控控制计算机。 每个流量控制柜都有自己的数据处理器，可以单独操作。 此外，监控计算机可用于操作每个机柜，以及监视系统的操作。 气体需求和其他信号通过连接到接口控制器的单个电缆从每个工具位置传送到控制单元，从而降低原始接线成本。 改变通信路径以伴随其中一个机柜中的给定导管传送其气体的工具的改变，可以通过软件快速地进行几次击键。 不需要机械重新布线。
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