公开(公告)号：US06702428B2

公开(公告)日：2004-03-09

申请号：US10268083

申请日：2002-10-10

申请人： Sung-joon Park ,  Seo-hyun Cho ,  Sang-cheol Ko ,  Jae-sik Min ,  Kyong-il Kim ,  Byung-ha Park ,  Tae-kyun Kim ,  Myung-song Jung

发明人： Sung-joon Park ,  Seo-hyun Cho ,  Sang-cheol Ko ,  Jae-sik Min ,  Kyong-il Kim ,  Byung-ha Park ,  Tae-kyun Kim ,  Myung-song Jung

IPC分类号： B41J205

CPC分类号： B41J2/1603 ,  B41J2/14129 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1645

摘要： A bubble-jet type ink-jet printhead has a structure in which a base plate, a barrier wall, and a nozzle plate are stacked. The base plate includes a substrate on which a recess is formed to a predetermined depth, an adiabatic layer formed on the substrate, a heater which is formed on the adiabatic layer and generates a thermal energy, and a passivation layer which is formed on the heater and passivates the heater. The barrier wall is stacked on the base plate, defines an ink chamber, which is disposed on the recess and has a recessed bottom surface, and defines an ink passage which communicates with the ink chamber. The nozzle plate is stacked on the barrier wall, has nozzles through which ink is ejected, and is formed at a location corresponding to a center of the ink chamber. Since a height of the barrier wall surrounding the ink chamber is reduced by the recess, delamination caused by ink soaked into the barrier wall can be prevented, and print performances such as a traveling property in a straight direction of ink droplets and ejection velocity of ink droplets, are improved.

摘要翻译： 气泡喷墨式喷墨打印头具有堆叠基板，阻挡壁和喷嘴板的结构。 基板包括基板，其上形成有预定深度的凹部，在基板上形成的绝热层，形成在绝热层上并产生热能的加热器，以及形成在加热器上的钝化层 并加热加热器。 阻挡壁堆叠在基板上，限定了一个墨水室，它设置在凹槽上并具有凹入的底面，并且限定了与墨水室连通的墨水通道。 喷嘴板堆叠在阻挡壁上，具有喷嘴，墨通过喷嘴喷射，并且形成在与墨水室的中心对应的位置。 由于凹部围绕墨水室的阻挡壁的高度被凹部减小，因此能够防止由墨水浸透到阻挡壁中的墨分层，并且墨滴直线方向的行进特性和墨滴的喷射速度等打印性能 液滴，改进。

公开(公告)号：US06762012B2

公开(公告)日：2004-07-13

申请号：US10287488

申请日：2002-11-05

申请人： Tae-kyun Kim ,  Seo-hyun Cho ,  Myung-song Jung ,  Kyong-il Kim ,  Sung-joon Park

发明人： Tae-kyun Kim ,  Seo-hyun Cho ,  Myung-song Jung ,  Kyong-il Kim ,  Sung-joon Park

IPC分类号： B41J216

CPC分类号： B41J2/1603 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  G03F7/038 ,  G03F7/2022

摘要： A method of manufacturing a monolithic ink-jet printhead includes a heating element which generates bubbles by heating ink is formed on a surface of the substrate, and a negative photoresist which is coated to a predetermined thickness on the substrate on which the heating element is formed. Next, a portion, which forms a sidewall of an ink passage forming wall surrounding an ink chamber and a restrictor, of the negative photoresist is flush exposed to light and cured using a first photomask in which patterns of the ink chamber and the restrictor of the ink passage are formed. Subsequently, a second portion which forms an upper wall of the ink passage forming wall of the negative photoresist is exposed to the light using a second photomask in which the pattern of a nozzle is formed, and the second portion is exposed to the light by only a predetermined thickness. Last, an uncured portion of the negative photoresist is dissolved and removed using solvent. An ink-jet printhead whose elements are monolithically formed by a simplified process using a single negative photoresist can be manufactured.

摘要翻译： 制造单片式喷墨打印头的方法包括：在基板的表面上形成通过加热油墨产生气泡的加热元件，以及在其上形成有加热元件的基板上涂覆预定厚度的负性光致抗蚀剂 。 接下来，将形成负光致抗蚀剂的墨水通道形成壁的侧壁和限制器的部分齐平地暴露于光并且使用第一光掩模进行固化，其中，在第一光掩模中，墨水腔和图像的限制器 形成油墨通道。 随后，使用其中形成喷嘴图案的第二光掩模将形成负光致抗蚀剂的墨通道形成壁的上壁的第二部分暴露于光，并且仅将第二部分暴露于光 预定厚度。 最后，使用溶剂溶解并除去负光致抗蚀剂的未固化部分。 可以制造通过使用单一负性光致抗蚀剂的简化工艺来单元地形成元件的喷墨打印头。

公开(公告)号：US07533971B2

公开(公告)日：2009-05-19

申请号：US11237713

申请日：2005-09-29

申请人： Sung-joon Park ,  Seo-hyun Cho ,  Sang-chul Koh ,  Jae-sik Min ,  Tae-kyun Kim ,  Myung-song Jung

发明人： Sung-joon Park ,  Seo-hyun Cho ,  Sang-chul Koh ,  Jae-sik Min ,  Tae-kyun Kim ,  Myung-song Jung

IPC分类号： B41J2/05

CPC分类号： B41J2/1603 ,  B41J2/14129 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1642

摘要： A head of an inkjet printer is formed by bonding of a heater substrate and a nozzle plate. In order to bond the heater substrate where a heater thin film and a protecting film are vapor-deposited, and the nozzle plate where a nozzle is formed, an intermediate layer is formed by forming a thin film of glass on the heater substrate by vapor-depositing, and the nozzle plate is installed on the heater substrate. SiO2 is formed at an interface between the nozzle plate and the heater thin film due to heating and application of an electric field, and thus the nozzle plate and the heater substrate are bonded with an electrostatic force of SiO2. The nozzle plate and the heater substrate are bonded by using the intermediate layer made of the thin film of glass instead of a general polymer as the bonding layer, thereby preventing swelling of the polymer and isolation of layers of the head occurring due to ink penetration into interfaces of the layers. Moreover, a bonding process is performed in wafer units to improve mass productivity.

摘要翻译： 喷墨打印机的头部通过加热衬底和喷嘴板的结合而形成。 为了将加热器薄膜和保护膜气相沉积的加热器基板和形成喷嘴的喷嘴板接合，通过在加热器基板上形成玻璃薄膜而形成中间层， 沉积，并且喷嘴板安装在加热器基板上。 由于加热和施加电场而在喷嘴板和加热器薄膜之间的界面处形成SiO 2，因此喷嘴板和加热器基板以SiO 2的静电力结合。 喷嘴板和加热器基板通过使用由玻璃薄膜代替一般聚合物作为粘结层而形成的中间层而粘合，从而防止聚合物溶胀并且由于墨渗入而发生头部的隔离 层的界面。 此外，在晶片单元中进行接合处理以提高批量生产率。

公开(公告)号：US06974208B2

公开(公告)日：2005-12-13

申请号：US10321574

申请日：2002-12-18

申请人： Sung-joon Park ,  Seo-hyun Cho ,  Sang-chul Koh ,  Jae-sik Min ,  Tae-kyun Kim ,  Myung-song Jung

发明人： Sung-joon Park ,  Seo-hyun Cho ,  Sang-chul Koh ,  Jae-sik Min ,  Tae-kyun Kim ,  Myung-song Jung

IPC分类号： B41J2/05 ,  B41J2/14 ,  B41J2/16

CPC分类号： B41J2/1603 ,  B41J2/14129 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1642

摘要： A head of an inkjet printer is formed by bonding of a heater substrate and a nozzle plate. In order to bond the heater substrate where a heater thin film and a protecting film are vapor-deposited, and the nozzle plate where a nozzle is formed, an intermediate layer is formed by forming a thin film of glass on the heater substrate by vapor-depositing, and the nozzle plate is installed on the heater substrate. SiO2 is formed at an interface between the nozzle plate and the heater thin film due to heating and application of an electric field, and thus the nozzle plate and the heater substrate are bonded with an electrostatic force of SiO2. The nozzle plate and the heater substrate are bonded by using the intermediate layer made of the thin film of glass instead of a general polymer as the bonding layer, thereby preventing swelling of the polymer and isolation of layers of the head occurring due to ink penetration into interfaces of the layers. Moreover, a bonding process is performed in wafer units to improve mass productivity.

摘要翻译： 喷墨打印机的头部通过加热衬底和喷嘴板的结合而形成。 为了将加热器薄膜和保护膜气相沉积的加热器基板和形成喷嘴的喷嘴板接合，通过在加热器基板上形成玻璃薄膜而形成中间层， 沉积，并且喷嘴板安装在加热器基板上。 SiO 2由于加热和施加电场而在喷嘴板和加热器薄膜之间的界面处形成，因此喷嘴板和加热器基板以静电力的SiO 2 。 喷嘴板和加热器基板通过使用由玻璃薄膜代替一般聚合物作为粘结层而形成的中间层而粘合，从而防止聚合物溶胀并且由于墨渗入而发生头部的隔离 层的界面。 此外，在晶片单元中进行接合处理以提高批量生产率。

公开(公告)号：US20060023028A1

公开(公告)日：2006-02-02

申请号：US11237713

申请日：2005-09-29

申请人： Sung-joon Park ,  Seo-hyun Cho ,  Sang-chul Koh ,  Jae-sik Min ,  Tae-kyun Kim ,  Myung-song Jung

发明人： Sung-joon Park ,  Seo-hyun Cho ,  Sang-chul Koh ,  Jae-sik Min ,  Tae-kyun Kim ,  Myung-song Jung

IPC分类号： B41J2/04

CPC分类号： B41J2/1603 ,  B41J2/14129 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1642

摘要： A head of an inkjet printer is formed by bonding of a heater substrate and a nozzle plate. In order to bond the heater substrate where a heater thin film and a protecting film are vapor-deposited, and the nozzle plate where a nozzle is formed, an intermediate layer is formed by forming a thin film of glass on the heater substrate by vapor-depositing, and the nozzle plate is installed on the heater substrate. SiO2 is formed at an interface between the nozzle plate and the heater thin film due to heating and application of an electric field, and thus the nozzle plate and the heater substrate are bonded with an electrostatic force of SiO2. The nozzle plate and the heater substrate are bonded by using the intermediate layer made of the thin film of glass instead of a general polymer as the bonding layer, thereby preventing swelling of the polymer and isolation of layers of the head occurring due to ink penetration into interfaces of the layers. Moreover, a bonding process is performed in wafer units to improve mass productivity.

摘要翻译： 喷墨打印机的头部通过加热衬底和喷嘴板的结合而形成。 为了将加热器薄膜和保护膜气相沉积的加热器基板和形成喷嘴的喷嘴板接合，通过在加热器基板上形成玻璃薄膜而形成中间层， 沉积，并且喷嘴板安装在加热器基板上。 SiO 2由于加热和施加电场而在喷嘴板和加热器薄膜之间的界面处形成，因此喷嘴板和加热器基板以静电力的SiO 2 。 喷嘴板和加热器基板通过使用由玻璃薄膜代替一般聚合物作为粘结层而形成的中间层而粘合，从而防止聚合物溶胀并且由于墨渗入而发生头部的隔离 层的界面。 此外，在晶片单元中进行接合处理以提高批量生产率。

公开(公告)号：US07758165B2

公开(公告)日：2010-07-20

申请号：US12000579

申请日：2007-12-13

申请人： Myung-song Jung ,  Sung-joon Park ,  Tae-kyun Kim ,  Jae-sik Min

发明人： Myung-song Jung ,  Sung-joon Park ,  Tae-kyun Kim ,  Jae-sik Min

IPC分类号： B41J2/04

CPC分类号： B41J2/1646 ,  B41J2/14 ,  B41J2/16 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2002/14346

摘要： An ink-jet printhead and a manufacturing method thereof include a substrate on which a space portion is formed, a passage plate installed on the substrate in which an ink chamber is formed to store ink, a nozzle plate installed at a top surface of the passage plate in which a nozzle is formed to eject the ink, and a vibration plate disposed between the substrate and the passage plate to generate a pressure for ejecting the ink by changing a volume of the ink chamber. The vibration plate includes a base layer formed at a top surface of the substrate so as to cover at least a part of the space portion, a thin film shape memory alloy layer which contacts the ink contained in the ink chamber and varies according to a temperature variation, a heating element disposed between the base layer and the thin film shape memory alloy to generate heat, and an insulating layer disposed between the heating element and the thin film shape memory alloy layer and transfers the heat generated by the heating element to the thin film shape memory alloy layer. Due to a stable temperature coefficient of resistance (TCR) of the heating element, a height and a width of a voltage supplied to the heat element can be easily controlled, and thus power of the vibration plate can be precisely controlled, thereby having a predetermined image quality, and the heating element does not contact directly the ink, thereby realizing stability of the ink-jet printhead.

摘要翻译： 喷墨打印头及其制造方法包括：基板，其上形成有空间部分，安装在基板上的通道板，其中形成有用于存储墨水的墨水室;喷嘴板，安装在通道的顶表面 其中形成有喷嘴以喷射墨水的板;以及设置在基板和通道板之间的振动板，以通过改变墨水室的体积产生用于喷射墨水的压力。 所述振动板包括形成在所述基板的顶面的基底层，以覆盖所述空间部分的至少一部分;薄膜形状记忆合金层，其与容纳在所述墨水室中的墨水接触并根据温度变化 设置在基底层和薄膜形状记忆合金之间以产生热量的加热元件，以及设置在加热元件和薄膜形状记忆合金层之间的绝缘层，并将由加热元件产生的热量传递到薄 薄膜形状记忆合金层。 由于加热元件的稳定的电阻温度系数（TCR），可以容易地控制供给到热元件的电压的高度和宽度，从而可以精确地控制振动板的功率，从而具有预定的 图像质量，并且加热元件不直接接触墨水，从而实现喷墨打印头的稳定性。

公开(公告)号：US07341332B2

公开(公告)日：2008-03-11

申请号：US10268726

申请日：2002-10-11

申请人： Myung-song Jung ,  Sung-joon Park ,  Tae-kyun Kim ,  Jae-sik Min

发明人： Myung-song Jung ,  Sung-joon Park ,  Tae-kyun Kim ,  Jae-sik Min

IPC分类号： B41J2/04

CPC分类号： B41J2/1646 ,  B41J2/14 ,  B41J2/16 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2002/14346

摘要： An ink-jet printhead and a manufacturing method thereof include a substrate on which a space portion is formed, a passage plate installed on the substrate in which an ink chamber is formed to store ink, a nozzle plate installed at a top surface of the passage plate in which a nozzle is formed to eject the ink, and a vibration plate disposed between the substrate and the passage plate to generate a pressure for ejecting the ink by changing a volume of the ink chamber. The vibration plate includes a base layer formed at a top surface of the substrate so as to cover at least a part of the space portion, a thin film shape memory alloy layer which contacts the ink contained in the ink chamber and varies according to a temperature variation, a heating element disposed between the base layer and the thin film shape memory alloy to generate heat, and an insulating layer disposed between the heating element and the thin film shape memory alloy layer and transfers the heat generated by the heating element to the thin film shape memory alloy layer. Due to a stable temperature coefficient of resistance (TCR) of the heating element, a height and a width of a voltage supplied to the heat element can be easily controlled, and thus power of the vibration plate can be precisely controlled, thereby having a predetermined image quality, and the heating element does not contact directly the ink, thereby realizing stability of the ink-jet printhead.

公开(公告)号：US07168787B2

公开(公告)日：2007-01-30

申请号：US10712356

申请日：2003-11-14

申请人： Myung-song Jung ,  Jung-woog Son ,  Tae-kyun Kim

发明人： Myung-song Jung ,  Jung-woog Son ,  Tae-kyun Kim

IPC分类号： B41J2/14 ,  B41J2/16

CPC分类号： B41J2/1603 ,  B41J2/1628 ,  B41J2/1631

摘要： A monolithic bubble ink jet print head includes an anti-curing-deformation part formed at at least one of an inner surface of a nozzle plate or a chamber/nozzle plate forming ink chambers and an outer surface of the nozzle plate or the chamber/nozzle plate forming a front or outer surface of the printer head to prevent an abnormal deformation from being generated in the nozzle plate or the chamber/nozzle plate during a curing process. A fabrication method of a monolithic bubble-ink jet print head includes forming a sacrificial photo resist mold having a flow channel structure including ink chambers and restrictors on the substrate, forming a chamber/nozzle plate having an anti-curing-deformation part and nozzles on the sacrificial photo resist mold, removing the sacrificial photo resist mold from the substrate over which chamber/nozzle plate is formed, and curing the substrate from which the sacrificial photo resist mold is removed.

摘要翻译： 单片式气泡喷墨打印头包括形成在喷嘴板的内表面或形成油墨室的室/喷嘴板中的至少一个上的防固化变形部分和喷嘴板或室/喷嘴的外表面 形成打印头的前表面或外表面，以防止在固化过程中在喷嘴板或腔/喷嘴板中产生异常变形。 单片气泡喷墨印刷头的制造方法包括在基板上形成具有包括墨水室和限流器的流动通道结构的牺牲光致抗蚀剂模具，形成具有防固化变形部分和喷嘴的腔室/喷嘴板 牺牲光致抗蚀剂模具，从形成有腔室/喷嘴板的基板上去除牺牲光致抗蚀剂模具，并固化除去牺牲光致抗蚀剂模具的基板。

公开(公告)号：US07988257B2

公开(公告)日：2011-08-02

申请号：US12239913

申请日：2008-09-29

申请人： Myung-song Jung ,  Chang-shin Park ,  Tae-kyun Kim ,  Jae-cheol Lee ,  Dong-hwan Kim

发明人： Myung-song Jung ,  Chang-shin Park ,  Tae-kyun Kim ,  Jae-cheol Lee ,  Dong-hwan Kim

IPC分类号： B41J2/15 ,  B41J29/38 ,  B41J2/175

CPC分类号： B41J2/17553 ,  B41J2/155 ,  B41J2/17513 ,  B41J2/2135

摘要： An ink cartridge to prevent image degradation due to a misalignment of nozzles in a transfer direction of a printing medium and a transverse direction includes a print head substrate, a first head unit including at least one first print head chip which is disposed on the print head substrate and includes a plurality of first nozzles arranged in plural lines in a second direction perpendicular to a first direction which is a transfer direction of a printing medium, thereby forming a first line in the second direction, and a second head unit including at least one second print head chip which is disposed on the print head substrate and which has an ink jetting area overlapping a predetermined area of the first line, thereby forming an overlapping area, and which includes a plurality of second nozzles arranged in plural lines in the second direction, thereby forming a second line spaced from the first line, and dots formed by the first and the second nozzles, which neighbor each other in the overlapping area when jetting ink, have a gap with respect to the first and the second directions within a range satisfying the following equation: T≦(n±⅛)*P(n is integer) wherein “T” denotes a gap between dots formed by the first and the second nozzles neighboring each other, and “P” denotes a pixel value.

摘要翻译： 一种用于防止由于打印介质和横向传送方向上的喷嘴不对准导致的图像劣化的墨盒包括打印头基板，第一打印头单元，其包括设置在打印头上的至少一个第一打印头芯片 基板，并且包括在垂直于作为打印介质的传送方向的第一方向的第二方向上以多条线布置的多个第一喷嘴，从而在第二方向上形成第一线，以及第二头单元，其包括至少一个 第二打印头芯片，其布置在打印头基板上，并且具有与第一行的预定区域重叠的喷墨区域，从而形成重叠区域，并且包括在第二方向上以多行排列的多个第二喷嘴 从而形成与第一线间隔开的第二线，以及由相邻的第一和第二喷嘴形成的点 在喷墨时的重叠区域在满足以下等式的范围内相对于第一和第二方向具有间隔：T＆lt; ll;（n±⅛）* P（n为整数）其中“T”表示点之间的间隙 由彼此相邻的第一和第二喷嘴形成，“P”表示像素值。

公开(公告)号：US20090195578A1

公开(公告)日：2009-08-06

申请号：US12239913

申请日：2008-09-29

申请人： Myung-song Jung ,  Chang-shin Park ,  Tae-kyun Kim ,  Jae-cheol Lee ,  Dong-hwan Kim

发明人： Myung-song Jung ,  Chang-shin Park ,  Tae-kyun Kim ,  Jae-cheol Lee ,  Dong-hwan Kim

IPC分类号： B41J29/38 ,  H01L21/00

CPC分类号： B41J2/17553 ,  B41J2/155 ,  B41J2/17513 ,  B41J2/2135

摘要： An ink cartridge to prevent image degradation due to a misalignment of nozzles in a transfer direction of a printing medium and a transverse direction includes a print head substrate, a first head unit including at least one first print head chip which is disposed on the print head substrate and includes a plurality of first nozzles arranged in plural lines in a second direction perpendicular to a first direction which is a transfer direction of a printing medium, thereby forming a first line in the second direction, and a second head unit including at least one second print head chip which is disposed on the print head substrate and which has an ink jetting area overlapping a predetermined area of the first line, thereby forming an overlapping area, and which includes a plurality of second nozzles arranged in plural lines in the second direction, thereby forming a second line spaced from the first line, and dots formed by the first and the second nozzles, which neighbor each other in the overlapping area when jetting ink, have a gap with respect to the first and the second directions within a range satisfying the following equation: T≦(n±⅛)*P(n is integer) wherein “T” denotes a gap between dots formed by the first and the second nozzles neighboring each other, and “P” denotes a pixel value.

摘要翻译： 一种用于防止由于打印介质和横向传送方向上的喷嘴不对准导致的图像劣化的墨盒包括打印头基板，第一打印头单元，其包括设置在打印头上的至少一个第一打印头芯片 基板，并且包括在垂直于作为打印介质的传送方向的第一方向的第二方向上以多条线布置的多个第一喷嘴，从而在第二方向上形成第一线，以及第二头单元，其包括至少一个 第二打印头芯片，其布置在打印头基板上，并且具有与第一行的预定区域重叠的喷墨区域，从而形成重叠区域，并且包括在第二方向上以多行排列的多个第二喷嘴 从而形成与第一线间隔开的第二线，以及由相邻的第一和第二喷嘴形成的点 喷墨时的重叠区域在满足以下等式的范围内相对于第一和第二方向具有间隙：<？in-line-formula description =“In-line formula”end =“lead”？> T <=（n±1/8）* P（n为整数）<？in-line-formula description =“In-line Formulas”end =“tail”？>其中“T”表示由 第一和第二喷嘴相邻，“P”表示像素值。