Abstract:
Provided are a compensating mask, a multi-optical system using the compensating mask, and a method of compensating for a 3-dimensional (3-D) mask effect using the compensating mask. Methods of compensating for a 3-D mask effect using a compensating mask may include generating a first kernel corresponding to a normal mask used for forming a minute pattern, generating a second kernel corresponding to a compensating mask, mixing the first kernel corresponding to the normal mask with the second kernel corresponding to the compensating mask, and generating a multi-optical system kernel corresponding to mixing the first kernel and the second kernel.
Abstract:
A method of performing etch proximity correction, taking into account an orientation-dependent component, includes providing a layout, selecting a target point on an edge of the layout, defining a proximity range from the target point, defining a probability function including a distance-dependent component, an orientation-dependent component, or both a distance-dependent component and an orientation-dependent component with respect to the proximity range, and calculating a surface integral of the probability function over the proximity range.
Abstract:
A method of forming patterns wherein a first exposure is performed using a first alternating phase shift mask, and a second exposure is performed using a second alternating phase shift mask. Phase shift regions and non-phase shift regions of the second mask are made to correspond respectively to non-phase shift regions and phase shift regions of the first mask. Consequently, light transmitted through phase shift regions of the first mask during the first exposure, is transmitted through second non-phase shift regions of the second mask during the second exposure, so that weak light intensity is compensated for. Intensities of light passed through phase shift regions and non-phase shift regions are thus the same. Therefore, the &Dgr;CD phenomenon and the inversion phenomenon of critical dimensions between phase shift regions and non-phase shift regions with respect to different focuses, may be prevented.
Abstract:
Provided are a compensating mask, a multi-optical system using the compensating mask, and a method of compensating for a 3-dimensional (3-D) mask effect using the compensating mask. Methods of compensating for a 3-D mask effect using a compensating mask may include generating a first kernel corresponding to a normal mask used for forming a minute pattern, generating a second kernel corresponding to a compensating mask, mixing the first kernel corresponding to the normal mask with the second kernel corresponding to the compensating mask, and generating a multi-optical system kernel corresponding to mixing the first kernel and the second kernel.
Abstract:
Provided are a compensating mask, a multi-optical system using the compensating mask, and a method of compensating for a 3-dimensional (3-D) mask effect using the compensating mask. Methods of compensating for a 3-D mask effect using a compensating mask may include generating a first kernel corresponding to a normal mask used for forming a minute pattern, generating a second kernel corresponding to a compensating mask, mixing the first kernel corresponding to the normal mask with the second kernel corresponding to the compensating mask, and generating a multi-optical system kernel corresponding to mixing the first kernel and the second kernel.
Abstract:
An encryption method and apparatus for implementing an overlapping operation, a variable clock operation, and a combination of the two operations. In the encryption method based on an overlapping operation technique, first, first through N-th fault sources effect first through N-th rounds of a first hardware engine to output a first cipher text. Thereafter, the second through (N+1)th fault sources effect first through N-th rounds of a second hardware engine, respectively, to output a second cipher text. The first and second cipher texts are compared to each other, and if the first and second cipher texts are identical, the first or second cipher text is output. The first and second hardware engines operate according to a data encryption standard (DES) algorithm. As described above, if the first and second cipher texts are identical, the first or second cipher text is output. Thus, a highly stable encryption algorithm is provided.
Abstract:
A method and system for managing suspicious devices on a network. The method includes, setting based on a manager's input or selection a suspicious group corresponding to each of at least one suspicious management item for managing a plurality of devices on a network via a user interface; accessing the devices and reading information corresponding to the suspicious management item; determining whether each device is a suspicious device based on the information corresponding to the suspicious management item, and registering the device in the suspicious group if the device is determined as a suspicious device; checking whether an error of the device comprised in the suspicious group is resolved; and eliminating the device from the suspicious group if the error of the device is resolved.
Abstract:
Disclosed herein is a soil inflow prevention apparatus in which an angular-rotation opening/closing plate is adapted to be inclined within a predetermined angle by virtue of opening stoppers to prevent a rear portion of the opening/closing plate from being excessively lowered in the beginning that an inflow amount of sewage increases due to rainfall, thereby preventing soil from entering an intercepting sewer in the beginning of an inflow of sewage.
Abstract:
In an inverse calculation circuit, an inverse calculation method, and a storage medium encoded with a computer readable computer program code, a random number generator generates a first random number and a second random number; and an inverter receives a plurality of first bits expressing a first element of a finite field(s) as first inputs, receives a plurality of second bits expressing a second element of a finite field(s) as second inputs. In response to the first and second random numbers, the inverter outputs a plurality of third bits expressing the inverse elements of the first element. The first random number prevents a different power analysis (DPA) decryption attack, and the second random number prevents a timing decryption attack.
Abstract:
An electron gun for use in a color picture tube includes electrodes forming at least one unipotential focusing lens for focusing electron beams. An electrode disposed between first and second electrodes forming a unipotential focusing lens includes first and second plate-shaped members. The first member forms, in cooperation with the first electrode, a focusing lens having an electrostatic field weaker in the vertical direction than in the lateral direction. The second member forms, in cooperation with the second electrode, a focusing lens having an electrostatic field weaker in the vertical direction than in the lateral direction. The electron gun removes halos appearing in the peripheral region of the tube screen.