摘要:
A novel lactone compound exhibiting a larger spontaneous polarization value when added to ferroelectric liquid crystal compositions as a basic substance, than those of so far known lactone compounds, and yet having a relatively low viscosity, and a liquid crystal composition comprising the compound, and further a liquid crystal element using the same are provided, the lactone compound being expressed by the formula ##STR1## wherein R.sup.1 is a linear or branched alkyl group or alkoxy group of 1-15C, R.sup.2 is a linear or branched alkyl group of 1-16C, --A-- is single bond, 1,4-phenylene group or 1,4-cyclohexylene group and * is an asymmetric carbon atom.
摘要:
A data processing unit acquires a review image including a pattern defect on a substrate, compares the review image with a reference image thereby to extract a defect image, the reference image including no pattern defect, and performs an alignment between the review image and a self-layer design pattern image which is generated from design data belonging to the identical layer in a region corresponding to the review image. The data processing unit, then, based on result of the alignment, generates an another-layer design pattern image which is generated from design data belonging to another layer in the region corresponding to the review image, and, based on a synthesized image of the defect image and the another-layer design pattern image, determines the relative position relationship between the pattern defect and a pattern belonging to another layer, and judges the criticality based on the relative position relationship.
摘要:
A data processing unit acquires a review image including a pattern defect on a substrate, compares the review image with a reference image thereby to extract a defect image, the reference image including no pattern defect, and performs an alignment between the review image and a self-layer design pattern image which is generated from design data belonging to the identical layer in a region corresponding to the review image. The data processing unit, then, based on result of the alignment, generates an another-layer design pattern image which is generated from design data belonging to another layer in the region corresponding to the review image, and, based on a synthesized image of the defect image and the another-layer design pattern image, determines the relative position relationship between the pattern defect and a pattern belonging to another layer, and judges the criticality based on the relative position relationship.
摘要:
A charged particle microscope corrects distortion in an image caused by effects of drift in the sampling stage by measuring the correction reference image in a shorter time than the observation image, making corrections by comparing the shape of the observation image with the shape of the correction reference image, and reducing distortion in the observation images. The reference image for distortion correction is measured at the same position and magnification as when acquiring images for observation. In order to reduce effects from drift, the reference image is at this time measured within a shorter time than the essential observation image. The shape of the observation image is corrected by comparing the shapes of the reference image and observation image, and correcting the shape of the observation image to match the reference image.
摘要:
An information memory apparatus which has a single magnetic tape shared with a plurality of users or a plurality of tasks. At least one information recording medium is provided with a plurality of logical volumes. Each of the logical volumes stores a set of information and is defined as a single physical volume. A recording/reproducing unit records input information on the information recording medium and/or reproduces output information from the information recording medium. A staging device stages and destages the input information to be recorded on the information recording medium and/or the output information reproduced from the information recording medium by the recording/reproducing unit. The staging device is controlled so that the staging device stages and destages the input information and/or the output information in accordance with loading and unloading of the recording/reproducing unit.
摘要:
With respect to each of low speed and high speed input/output ports of an input/output control unit, an activation time from a time point when an end status in association with the end of transfer is responded to a time point when an activation request is received is measured and stored in a memory. When the high speed port receives an activation request from a high speed channel, the activation time in the memory measured with respect to the low speed port is read out and an input/output request for the low speed port is preferentially accepted for such an activation time. As an activation time of the low speed port, the minimum time, average time, and maximum time are obtained from the result of the measurement. Either one of the above three times is selected as an activation time so as to almost equalize busy ratios of the high speed port and low speed port.
摘要:
A system for restructuring an input/output control system having first and second input/output controllers each of which respectively connects a first or a second group of peripheral devices in a lower level and a data processing apparatus in an upper level, and controls data transfer operation between each of the corresponding group of peripheral devices and the data processing apparatus, wherein each of the first and second group of peripheral devices is also connected to the input/output controller corresponding to the other group of peripheral devices so as to realize a cross call function. Each of the first and second plurality of input/output controllers respectively holds its own control data, which is used for controlling a data transfer operation between the corresponding peripheral devices and the data processing apparatus. When a situation which requires its own input/output controller to be in an off-line state arises, that fact is notified to the other input/output controller and the control data held in its own input/output controller is transferred to the other input/output controller. The other input/output controller receives the transferred control data and restructures the control data so that the other input/output controller can control the data transfer operation between the data processing apparatus and all the peripheral devices which were originally under the control of the other input/output controller as well as all the devices originally under the control of the above input/output controller wherein the above situation has arisen.
摘要:
A charged particle microscope corrects distortion in an image caused by effects of drift in the sampling stage by measuring the correction reference image in a shorter time than the observation image, making corrections by comparing the shape of the observation image with the shape of the correction reference image, and reducing distortion in the observation images. The reference image for distortion correction is measured at the same position and magnification as when acquiring images for observation. In order to reduce effects from drift, the reference image is at this time measured within a shorter time than the essential observation image. The shape of the observation image is corrected by comparing the shapes of the reference image and observation image, and correcting the shape of the observation image to match the reference image.
摘要:
A data processing unit acquires a review image including a pattern defect on a substrate, compares the review image with a reference image thereby to extract a defect image, the reference image including no pattern defect, and performs an alignment between the review image and a self-layer design pattern image which is generated from design data belonging to the identical layer in a region corresponding to the review image. The data processing unit, then, based on result of the alignment, generates an another-layer design pattern image which is generated from design data belonging to another layer in the region corresponding to the review image, and, based on a synthesized image of the defect image and the another-layer design pattern image, determines the relative position relationship between the pattern defect and a pattern belonging to another layer, and judges the criticality based on the relative position relationship.
摘要:
With respect to each of low speed and high speed input/output ports of an input/output control unit, an activation time from a time point when an end status in association with the end of transfer is responded to a time point when an activation request is received is measured and stored in a memory. When the high speed port receives an activation request from a high speed channel, the activation time in the memory measured with respect to the low speed port is read out and an input/output request for the low speed port is preferentially accepted for such an activation time. As an activation time of the low speed port, the minimum time, average time, and maximum time are obtained from the result of the measurement. Either one of the above three times is selected as an activation time so as to almost equalize busy ratios of the high speed port and low speed port.