Pattern defect analysis equipment, pattern defect analysis method and pattern defect analysis program
    2.
    发明授权
    Pattern defect analysis equipment, pattern defect analysis method and pattern defect analysis program 有权
    图案缺陷分析设备,图案缺陷分析方法和图案缺陷分析程序

    公开(公告)号:US08280148B2

    公开(公告)日:2012-10-02

    申请号:US13349402

    申请日:2012-01-12

    IPC分类号: G06K9/00

    摘要: A data processing unit acquires a review image including a pattern defect on a substrate, compares the review image with a reference image thereby to extract a defect image, the reference image including no pattern defect, and performs an alignment between the review image and a self-layer design pattern image which is generated from design data belonging to the identical layer in a region corresponding to the review image. The data processing unit, then, based on result of the alignment, generates an another-layer design pattern image which is generated from design data belonging to another layer in the region corresponding to the review image, and, based on a synthesized image of the defect image and the another-layer design pattern image, determines the relative position relationship between the pattern defect and a pattern belonging to another layer, and judges the criticality based on the relative position relationship.

    摘要翻译: 数据处理单元获取在基板上包含图案缺陷的检查图像,将检查图像与参考图像进行比较,从而提取缺陷图像,该参考图像不包括图案缺陷,并且在检查图像与自身之间进行对准 在与检查图像相对应的区域中属于相同层的设计数据生成的层设计图案图像。 然后,数据处理单元基于对准的结果,生成从属于与检视图像对应的区域中的另一层的设计数据生成的另一层设计图案图像,并且基于合成图像 缺陷图像和另一层设计图案图像,确定图案缺陷和属于另一层的图案之间的相对位置关系,并且基于相对位置关系来判断临界度。

    PATTERN DEFECT ANALYSIS EQUIPMENT, PATTERN DEFECT ANALYSIS METHOD AND PATTERN DEFECT ANALYSIS PROGRAM
    3.
    发明申请
    PATTERN DEFECT ANALYSIS EQUIPMENT, PATTERN DEFECT ANALYSIS METHOD AND PATTERN DEFECT ANALYSIS PROGRAM 有权
    图形缺陷分析设备,图形缺陷分析方法和图形缺陷分析程序

    公开(公告)号:US20090180680A1

    公开(公告)日:2009-07-16

    申请号:US12350783

    申请日:2009-01-08

    IPC分类号: G06K9/00

    摘要: A data processing unit acquires a review image including a pattern defect on a substrate, compares the review image with a reference image thereby to extract a defect image, the reference image including no pattern defect, and performs an alignment between the review image and a self-layer design pattern image which is generated from design data belonging to the identical layer in a region corresponding to the review image. The data processing unit, then, based on result of the alignment, generates an another-layer design pattern image which is generated from design data belonging to another layer in the region corresponding to the review image, and, based on a synthesized image of the defect image and the another-layer design pattern image, determines the relative position relationship between the pattern defect and a pattern belonging to another layer, and judges the criticality based on the relative position relationship.

    摘要翻译: 数据处理单元获取在基板上包含图案缺陷的检查图像,将检查图像与参考图像进行比较,从而提取缺陷图像,该参考图像不包括图案缺陷,并且在检查图像和自身之间进行对准 在与检查图像相对应的区域中属于相同层的设计数据生成的层设计图案图像。 然后,数据处理单元基于对准的结果,生成从属于与检视图像对应的区域中的另一层的设计数据生成的另一层设计图案图像,并且基于合成图像 缺陷图像和另一层设计图案图像,确定图案缺陷和属于另一层的图案之间的相对位置关系,并且基于相对位置关系来判断临界度。

    CHARGED PARTICLE MICROSCOPE AND MEASUREMENT IMAGE CORRECTION METHOD THEREOF
    4.
    发明申请
    CHARGED PARTICLE MICROSCOPE AND MEASUREMENT IMAGE CORRECTION METHOD THEREOF 有权
    充电颗粒显微镜及其测量图像校正方法

    公开(公告)号:US20130300854A1

    公开(公告)日:2013-11-14

    申请号:US13981326

    申请日:2011-11-02

    IPC分类号: H04N5/217

    摘要: A charged particle microscope corrects distortion in an image caused by effects of drift in the sampling stage by measuring the correction reference image in a shorter time than the observation image, making corrections by comparing the shape of the observation image with the shape of the correction reference image, and reducing distortion in the observation images. The reference image for distortion correction is measured at the same position and magnification as when acquiring images for observation. In order to reduce effects from drift, the reference image is at this time measured within a shorter time than the essential observation image. The shape of the observation image is corrected by comparing the shapes of the reference image and observation image, and correcting the shape of the observation image to match the reference image.

    摘要翻译: 带电粒子显微镜通过在比观察图像更短的时间内测量校正参考图像来校正由采样阶段的漂移效应引起的图像中的失真,通过将观察图像的形状与校正基准的形状进行比较来进行校正 图像,减少观察图像的失真。 与获取观察图像时相同的位置和倍率测量用于失真校正的参考图像。 为了减少漂移的影响,此时在比基本观察图像更短的时间内测量参考图像。 通过比较参考图像和观察图像的形状以及校正观察图像的形状以匹配参考图像来校正观察图像的形状。

    Information memory apparatus and library apparatus using a single
magnetic tape shared with a plurality of tasks
    5.
    发明授权
    Information memory apparatus and library apparatus using a single magnetic tape shared with a plurality of tasks 失效
    使用与多个任务共享的单个磁带的信息存储装置和库装置

    公开(公告)号:US5940849A

    公开(公告)日:1999-08-17

    申请号:US658841

    申请日:1996-05-31

    申请人: Susumu Koyama

    发明人: Susumu Koyama

    摘要: An information memory apparatus which has a single magnetic tape shared with a plurality of users or a plurality of tasks. At least one information recording medium is provided with a plurality of logical volumes. Each of the logical volumes stores a set of information and is defined as a single physical volume. A recording/reproducing unit records input information on the information recording medium and/or reproduces output information from the information recording medium. A staging device stages and destages the input information to be recorded on the information recording medium and/or the output information reproduced from the information recording medium by the recording/reproducing unit. The staging device is controlled so that the staging device stages and destages the input information and/or the output information in accordance with loading and unloading of the recording/reproducing unit.

    摘要翻译: 一种具有与多个用户共享的单个磁带或多个任务的信息存储装置。 至少一个信息记录介质具有多个逻辑卷。 每个逻辑卷存储一组信息,并将其定义为单个物理卷。 记录/再现单元在信息记录介质上记录输入信息和/或从信息记录介质再现输出信息。 分级设备对记录在信息记录介质上的输入信息和/或由记录/再现单元从信息记录介质再现的输出信息进行分级和去往。 控制分级设备,使得分级设备根据记录/再现单元的加载和卸载来对输入信息和/或输出信息进行分级和去往。

    Method and apparatus for processing input/output request by using a plurality of channel buses
    6.
    发明授权
    Method and apparatus for processing input/output request by using a plurality of channel buses 失效
    通过使用多个通道总线来处理输入/输出请求的方法和装置

    公开(公告)号:US06366963B2

    公开(公告)日:2002-04-02

    申请号:US09248364

    申请日:1999-02-10

    申请人: Susumu Koyama

    发明人: Susumu Koyama

    IPC分类号: G06F1300

    摘要: With respect to each of low speed and high speed input/output ports of an input/output control unit, an activation time from a time point when an end status in association with the end of transfer is responded to a time point when an activation request is received is measured and stored in a memory. When the high speed port receives an activation request from a high speed channel, the activation time in the memory measured with respect to the low speed port is read out and an input/output request for the low speed port is preferentially accepted for such an activation time. As an activation time of the low speed port, the minimum time, average time, and maximum time are obtained from the result of the measurement. Either one of the above three times is selected as an activation time so as to almost equalize busy ratios of the high speed port and low speed port.

    摘要翻译: 对于输入/输出控制单元的低速和高速输入/输出端口中的每一个,从与传送结束相关联的结束状态的时间点响应于激活请求的时间点的激活时间 被测量并存储在存储器中。 当高速端口从高速通道接收到激活请求时,读出相对于低速端口测量的存储器中的激活时间,并且对于这种激活优先接受低速端口的输入/输出请求 时间。 作为低速端口的激活时间,从测量结果可以得到最小时间,平均时间和最大时间。 选择上述三次中的任一个作为激活时间,以便几乎相等于高速端口和低速端口的繁忙比率。

    System for restructuring input/output control system
    7.
    发明授权
    System for restructuring input/output control system 失效
    用于重组输入/输出控制系统的系统

    公开(公告)号:US5088029A

    公开(公告)日:1992-02-11

    申请号:US347756

    申请日:1989-05-05

    申请人: Susumu Koyama

    发明人: Susumu Koyama

    IPC分类号: G06F13/14 G06F13/00 G06F13/12

    CPC分类号: G06F13/122

    摘要: A system for restructuring an input/output control system having first and second input/output controllers each of which respectively connects a first or a second group of peripheral devices in a lower level and a data processing apparatus in an upper level, and controls data transfer operation between each of the corresponding group of peripheral devices and the data processing apparatus, wherein each of the first and second group of peripheral devices is also connected to the input/output controller corresponding to the other group of peripheral devices so as to realize a cross call function. Each of the first and second plurality of input/output controllers respectively holds its own control data, which is used for controlling a data transfer operation between the corresponding peripheral devices and the data processing apparatus. When a situation which requires its own input/output controller to be in an off-line state arises, that fact is notified to the other input/output controller and the control data held in its own input/output controller is transferred to the other input/output controller. The other input/output controller receives the transferred control data and restructures the control data so that the other input/output controller can control the data transfer operation between the data processing apparatus and all the peripheral devices which were originally under the control of the other input/output controller as well as all the devices originally under the control of the above input/output controller wherein the above situation has arisen.

    Charged particle microscope and measurement image correction method thereof
    8.
    发明授权
    Charged particle microscope and measurement image correction method thereof 有权
    带电粒子显微镜及其测量图像校正方法

    公开(公告)号:US08957959B2

    公开(公告)日:2015-02-17

    申请号:US13981326

    申请日:2011-11-02

    摘要: A charged particle microscope corrects distortion in an image caused by effects of drift in the sampling stage by measuring the correction reference image in a shorter time than the observation image, making corrections by comparing the shape of the observation image with the shape of the correction reference image, and reducing distortion in the observation images. The reference image for distortion correction is measured at the same position and magnification as when acquiring images for observation. In order to reduce effects from drift, the reference image is at this time measured within a shorter time than the essential observation image. The shape of the observation image is corrected by comparing the shapes of the reference image and observation image, and correcting the shape of the observation image to match the reference image.

    摘要翻译: 带电粒子显微镜通过在比观察图像更短的时间内测量校正参考图像来校正由采样阶段的漂移效应引起的图像中的失真,通过将观察图像的形状与校正基准的形状进行比较来进行校正 图像,减少观察图像的失真。 与获取观察图像时相同的位置和倍率测量用于失真校正的参考图像。 为了减少漂移的影响,此时在比基本观察图像更短的时间内测量参考图像。 通过比较参考图像和观察图像的形状以及校正观察图像的形状以匹配参考图像来校正观察图像的形状。

    Pattern defect analysis equipment, pattern defect analysis method and pattern defect analysis program

    公开(公告)号:US08121393B2

    公开(公告)日:2012-02-21

    申请号:US12350783

    申请日:2009-01-08

    IPC分类号: G06K9/00

    摘要: A data processing unit acquires a review image including a pattern defect on a substrate, compares the review image with a reference image thereby to extract a defect image, the reference image including no pattern defect, and performs an alignment between the review image and a self-layer design pattern image which is generated from design data belonging to the identical layer in a region corresponding to the review image. The data processing unit, then, based on result of the alignment, generates an another-layer design pattern image which is generated from design data belonging to another layer in the region corresponding to the review image, and, based on a synthesized image of the defect image and the another-layer design pattern image, determines the relative position relationship between the pattern defect and a pattern belonging to another layer, and judges the criticality based on the relative position relationship.

    Method and apparatus for processing input/output request by using a
plurality of channel buses

    公开(公告)号:US6029008A

    公开(公告)日:2000-02-22

    申请号:US992736

    申请日:1997-12-17

    申请人: Susumu Koyama

    发明人: Susumu Koyama

    摘要: With respect to each of low speed and high speed input/output ports of an input/output control unit, an activation time from a time point when an end status in association with the end of transfer is responded to a time point when an activation request is received is measured and stored in a memory. When the high speed port receives an activation request from a high speed channel, the activation time in the memory measured with respect to the low speed port is read out and an input/output request for the low speed port is preferentially accepted for such an activation time. As an activation time of the low speed port, the minimum time, average time, and maximum time are obtained from the result of the measurement. Either one of the above three times is selected as an activation time so as to almost equalize busy ratios of the high speed port and low speed port.