公开(公告)号：US08472010B2

公开(公告)日：2013-06-25

申请号：US12886996

申请日：2010-09-21

申请人： Sven Antoin Johan Hol ,  Antonius Franciscus Johannes De Groot ,  Theodorus Petrus Maria Cadee ,  Marijn Kessels ,  Daniël Godfried Emma Hobbelen

发明人： Sven Antoin Johan Hol ,  Antonius Franciscus Johannes De Groot ,  Theodorus Petrus Maria Cadee ,  Marijn Kessels ,  Daniël Godfried Emma Hobbelen

IPC分类号： G03B27/58

CPC分类号： G03F7/70758 ,  H02K1/146 ,  H02K41/03 ,  H02K2201/18 ,  H02K2213/12

摘要： Actuator for exerting a force and a torque on an object, wherein the actuator includes a first part that is movable with respect to a second part of the actuator in at least a first degree of freedom, wherein the object is mounted to the first part, wherein one of the parts is provided with a first electrical coil that is arranged to cooperate with a magnetizable portion of the other part and wherein a controller of the actuator is arranged to generate a first electrical current through the first electrical coil for generating a force between the parts, wherein the one of the parts is provided with a second electrical coil which is arranged to cooperated with a magnetizable portion of the other part, wherein the controller is further arranged to generate a second current through the second coil and the first current through the first electrical coil for exerting the force and torque between the parts so that the actuator is arranged to exert the force and the torque on the object with respect to the second part.

摘要翻译： 用于在物体上施加力和扭矩的致动器，其中所述致动器包括能够以至少第一自由度相对于所述致动器的第二部分移动的第一部件，其中所述物体安装到所述第一部分， 其中所述部件中的一个设置有第一电线圈，所述第一电线圈布置成与所述另一部件的可磁化部分配合，并且其中所述致动器的控制器被布置成产生通过所述第一电线圈的第一电流， 所述部件，其中所述部件中的一个设置有第二电线圈，所述第二电线圈布置成与所述另一部件的可磁化部分配合，其中所述控制器还被布置成产生通过所述第二线圈的第二电流和通过 用于在部件之间施加力和扭矩的第一电线圈，使得致动器被布置成将力和扭矩施加在物体上， 尊重第二部分。

公开(公告)号：US20110069293A1

公开(公告)日：2011-03-24

申请号：US12886996

申请日：2010-09-21

申请人： Sven Antoin Johan Hol ,  Antonius Franciscus Johannes De Groot ,  Theodorus Petrus Maria Cadee ,  Marijn Kessels ,  Daniël Godfried Emma Hobbelen

发明人： Sven Antoin Johan Hol ,  Antonius Franciscus Johannes De Groot ,  Theodorus Petrus Maria Cadee ,  Marijn Kessels ,  Daniël Godfried Emma Hobbelen

IPC分类号： G03B27/54 ,  H02K41/02

CPC分类号： G03F7/70758 ,  H02K1/146 ,  H02K41/03 ,  H02K2201/18 ,  H02K2213/12

摘要： Actuator for exerting a force and a torque on an object, wherein the actuator includes a first part that is movable with respect to a second part of the actuator in at least a first degree of freedom, wherein the object is mounted to the first part, wherein one of the parts is provided with a first electrical coil that is arranged to cooperate with a magnetizable portion of the other part and wherein a controller of the actuator is arranged to generate a first electrical current through the first electrical coil for generating a force between the parts, wherein the one of the parts is provided with a second electrical coil which is arranged to cooperated with a magnetizable portion of the other part, wherein the controller is further arranged to generate a second current through the second coil and the first current through the first electrical coil for exerting the force and torque between the parts so that the actuator is arranged to exert the force and the torque on the object with respect to the second part.

摘要翻译： 用于在物体上施加力和扭矩的致动器，其中所述致动器包括能够以至少第一自由度相对于所述致动器的第二部分移动的第一部件，其中所述物体安装到所述第一部分， 其中所述部件中的一个设置有第一电线圈，所述第一电线圈布置成与所述另一部件的可磁化部分配合，并且其中所述致动器的控制器被布置成产生通过所述第一电线圈的第一电流， 所述部件，其中所述部件中的一个设置有第二电线圈，所述第二电线圈布置成与所述另一部件的可磁化部分配合，其中所述控制器还被布置成产生通过所述第二线圈的第二电流和通过 用于在部件之间施加力和扭矩的第一电线圈，使得致动器被布置成将力和扭矩施加在物体上， 尊重第二部分。

公开(公告)号：US08896811B2

公开(公告)日：2014-11-25

申请号：US12853916

申请日：2010-08-10

申请人： Sven Antoin Johan Hol ,  Jan Van Eijk ,  Antonius Franciscus Johannes De Groot ,  Johannes Petrus Martinus Bernardus Vermeulen ,  Geert-Jan Petrus Naaijkens ,  Marijn Kessels ,  Daniël Godfried Emma Hobbelen

发明人： Sven Antoin Johan Hol ,  Jan Van Eijk ,  Antonius Franciscus Johannes De Groot ,  Johannes Petrus Martinus Bernardus Vermeulen ,  Geert-Jan Petrus Naaijkens ,  Marijn Kessels ,  Daniël Godfried Emma Hobbelen

IPC分类号： G03B27/42 ,  G03F7/20

CPC分类号： G03F7/70758

摘要： A method for positioning a substage, supported by a main stage, relative to a reference object, the substage moveable in a direction between a first and second position relative to the main stage. The method includes positioning the first stage using a passive force system that is activated by positioning the main stage. The passive force system includes two magnet systems, each magnet system being configured to apply a force in the direction to the first stage with respect to the second stage in a non-contact manner, the forces resulting in a resultant force applied to the first stage in the direction by the passive force system. A magnitude and/or a direction of the resultant force depends on the position of the first stage relative to the second stage, and the first stage has a zero-force position between the first and second position in which the resultant force is zero.

摘要翻译： 一种用于定位由主台支撑的子台相对于参考对象的方法，所述子台可在相对于主台的第一和第二位置之间的方向上移动。 该方法包括使用通过定位主平台来激活的被动力系统来定位第一阶段。 被动力系统包括两个磁体系统，每个磁体系统构造成以非接触方式相对于第二平台向第一阶段施加力，所述力施加到第一阶段 被动力系统的方向。 合力的大小和/或方向取决于第一级相对于第二级的位置，第一级在合力为零的第一和第二位置之间具有零力位置。

公开(公告)号：US20110075122A1

公开(公告)日：2011-03-31

申请号：US12853916

申请日：2010-08-10

申请人： Sven Antoin Johan Hol ,  Jan Van Eijk ,  Antonius Fraciscus Johannes De Groot ,  Johannes Petrus Martinus Bernardus Vermeulen ,  Geert-Jan Petrus Naaijkens ,  Marijn Kessels ,  Daniël Godfried Emma Hobbelen

发明人： Sven Antoin Johan Hol ,  Jan Van Eijk ,  Antonius Fraciscus Johannes De Groot ,  Johannes Petrus Martinus Bernardus Vermeulen ,  Geert-Jan Petrus Naaijkens ,  Marijn Kessels ,  Daniël Godfried Emma Hobbelen

IPC分类号： G03B27/58

CPC分类号： G03F7/70758

摘要： A method for positioning a substage, supported by a main stage, relative to a reference object, the substage moveable in a direction between a first and second position relative to the main stage. The method includes positioning the first stage using a passive force system that is activated by positioning the main stage. The passive force system includes two magnet systems, each magnet system being configured to apply a force in the direction to the first stage with respect to the second stage in a non-contact manner, the forces resulting in a resultant force applied to the first stage in the direction by the passive force system. A magnitude and/or a direction of the resultant force depends on the position of the first stage relative to the second stage, and the first stage has a zero-force position between the first and second position in which the resultant force is zero.

摘要翻译： 一种用于定位由主台支撑的子台相对于参考对象的方法，所述子台可在相对于主台的第一和第二位置之间的方向上移动。 该方法包括使用通过定位主平台来激活的被动力系统来定位第一阶段。 被动力系统包括两个磁体系统，每个磁体系统构造成以非接触方式相对于第二平台向第一阶段施加力，所述力施加到第一阶段 被动力系统的方向。 合力的大小和/或方向取决于第一级相对于第二级的位置，第一级在合力为零的第一和第二位置之间具有零力位置。