公开(公告)号：US12090602B2

公开(公告)日：2024-09-17

申请号：US17371709

申请日：2021-07-09

申请人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

发明人： Bruce Cho ,  Chia-Ying Tien ,  Huang-Chu Ko

IPC分类号： H01L21/67 ,  B24B1/00 ,  B24B37/005 ,  B24B37/04 ,  B24B37/10 ,  B24B47/12 ,  H01L21/306 ,  H01L21/321 ,  H01L21/687 ,  H02P29/00

CPC分类号： B24B47/12 ,  B24B1/00 ,  B24B37/005 ,  B24B37/044 ,  B24B37/10 ,  H01L21/30625 ,  H01L21/3212 ,  H02P29/00

摘要： A device includes a rotator assembly configured to control a rotational kinetic energy of a wafer-platen based on an electrical energy input. The device further includes a controller configured to control the rotational kinetic energy of the wafer-platen, wherein a rotational velocity of the wafer-platen is either increased or decreased. The device further includes a converter configured to generate an electrical energy output of the rotator assembly based on decreased rotational kinetic energy of the wafer-platen. The device further includes an energy storage device configured to store the electrical energy outputted by the rotator assembly based on the decreased rotational kinetic energy of the wafer-platen.

公开(公告)号：US11072051B2

公开(公告)日：2021-07-27

申请号：US16740809

申请日：2020-01-13

申请人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

发明人： Bruce Cho ,  Chia-Ying Tien ,  Huang-Chu Ko

IPC分类号： B24B47/12 ,  B24B37/005 ,  B24B37/10 ,  H01L21/321 ,  H02P29/00 ,  B24B37/04 ,  H01L21/306 ,  B24B1/00

摘要： A method of controlling platen rotation includes receiving an electrical energy input at a rotator assembly, using the rotator assembly to increase a rotational kinetic energy of a platen based on the electrical energy input, using the rotator assembly to decrease the rotational kinetic energy of the platen, and generating an electrical energy output of the rotator assembly based on the decreased rotational kinetic energy of the platen.

公开(公告)号：US10576606B2

公开(公告)日：2020-03-03

申请号：US15626597

申请日：2017-06-19

申请人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

发明人： Bruce Cho ,  Chia-Ying Tien ,  Huang-Chu Ko

IPC分类号： B24B47/12 ,  B24B37/005 ,  B24B37/10 ,  H01L21/321

摘要： A platen rotation apparatus includes a rotator assembly coupled with a platen. The rotator assembly operates in a first mode to increase a rotational kinetic energy of the platen based on an electrical energy input, and, in a second mode, to decrease the rotational kinetic energy of the platen and generate an electrical energy output based on the decreased rotational kinetic energy of the platen. An energy storage device electrically coupled with the rotator assembly provides the electrical energy input when the rotator assembly is in the first mode and receives the electrical energy output when the rotator assembly is in the second mode.