公开(公告)号：US20190103220A1

公开(公告)日：2019-04-04

申请号：US16145231

申请日：2018-09-28

Applicant: TDK Corporation

Inventor： Masahiro HIRAOKA ,  Hitoshi SAITA ,  Suguru ANDOH ,  Atsuo MATSUTANI

IPC: H01G4/01 ,  H01G4/33 ,  H01G4/12

CPC classification number: H01G4/01 ,  H01G4/005 ,  H01G4/1227 ,  H01G4/1245 ,  H01G4/33 ,  H01G7/06

Abstract: Provided is a thin film capacitor that includes: a first electrode layer having a principal surface in which a plurality of recesses are provided; a dielectric layer laminated on the principal surface of the first electrode layer; and a second electrode layer laminated on the dielectric layer. When a depth of the recess is defined as FL and a thickness of the dielectric layer is defined as T, H/T is 0.05 or more and 0.5 or less.

公开(公告)号：US20160133825A1

公开(公告)日：2016-05-12

申请号：US14934988

申请日：2015-11-06

Applicant: TDK CORPORATION

Inventor： Masahiro OISHI ,  Atsuo MATSUTANI ,  Ryu OHTA

IPC: H01L41/18 ,  C01G33/00 ,  H01L41/257

CPC classification number: C01G33/006 ,  B41J2/14233 ,  B41J2202/03 ,  C01P2002/34 ,  C01P2002/82 ,  C01P2006/40 ,  G01N21/65 ,  H01L41/0805 ,  H01L41/0973 ,  H01L41/1132 ,  H01L41/1873 ,  H01L41/316

Abstract: A piezoelectric layer made of potassium sodium niobate which is a perovskite type compound represented by the formula ABO3, wherein, in the Raman spectroscopy measurement of the piezoelectric layer which is performed while the piezoelectric layer is rotated in the in-plane direction, the measured intensity of the lattice vibration region of the perovskite type compound in the Raman spectrum obtained in polarized Raman spectroscopy measurement (yx) has a periodicity of approximately 90°, wherein, the polarized Raman spectroscopy measurement (yx) is performed while the piezoelectric layer is rotated in the in-plane direction and Raman scattering light is polarized in a direction perpendicular to that of the incident light.

Abstract translation: 由铌酸钾钠制成的压电层，其为由式ABO3表示的钙钛矿型化合物，其中，在压电层在面内方向上旋转时进行的压电层的拉曼光谱测量中，测量的强度 在偏振拉曼光谱测量（yx）中获得的拉曼光谱中的钙钛矿型化合物的晶格振动区域的周期约为90°，其中在压电层旋转的同时进行极化拉曼光谱测量（yx） 面内方向和拉曼散射光在垂直于入射光的方向上极化。